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Wafer holding, wafer support member, wafer boat and heat treatment furnace

  • US 7,204,887 B2
  • Filed: 10/16/2001
  • Issued: 04/17/2007
  • Est. Priority Date: 10/16/2000
  • Status: Expired due to Term
First Claim
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1. A wafer holder to hold a wafer on the upper surface characterized in that:

  • the wafer holder comprises a wafer support plate and three or more wafer support members mounted on said wafer support plate, wherein said wafer support members maintain rigidity and each having one or more wafer support portions;

    wherein said wafer support members are fabricated from a material selected from the group consisting of SiC, Si3N4, Si and combinations thereof;

    at least one of said wafer support members is a tilting wafer support member which has a plurality of upward-convex wafer support portions on the upper surface; and

    is tiltable by a fulcrum located between said tilting wafer support member and the wafer support plate with respect to the wafer support plate; and

    the wafer is supported by at least four wafer support portions by point contact;

    including point contact by the upward-convex wafer support portions located on said upper surface of said tilting wafer support member.

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