Wafer holding, wafer support member, wafer boat and heat treatment furnace
First Claim
1. A wafer holder to hold a wafer on the upper surface characterized in that:
- the wafer holder comprises a wafer support plate and three or more wafer support members mounted on said wafer support plate, wherein said wafer support members maintain rigidity and each having one or more wafer support portions;
wherein said wafer support members are fabricated from a material selected from the group consisting of SiC, Si3N4, Si and combinations thereof;
at least one of said wafer support members is a tilting wafer support member which has a plurality of upward-convex wafer support portions on the upper surface; and
is tiltable by a fulcrum located between said tilting wafer support member and the wafer support plate with respect to the wafer support plate; and
the wafer is supported by at least four wafer support portions by point contact;
including point contact by the upward-convex wafer support portions located on said upper surface of said tilting wafer support member.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention provides a wafer holder, a wafer support member, a wafer boat and a heat treatment furnace, which are capable of sufficiently suppressing slip dislocations, without lowering productivity and at low cost, in the high temperature heat treatment of silicon wafers, and said wafer holder is characterized in that: the wafer holder is composed of a wafer support plate and three or more wafer support members mounted on said wafer support plate, each of the wafer support members having a wafer support portion or more; at least one of said wafer support members is a tilting wafer support member which has a plurality of upward-convex wafer support portions on the upper surface and is tiltable with respect to said wafer support plate; and the wafer is supported by at least four wafer support portions.
-
Citations
11 Claims
-
1. A wafer holder to hold a wafer on the upper surface characterized in that:
- the wafer holder comprises a wafer support plate and three or more wafer support members mounted on said wafer support plate, wherein said wafer support members maintain rigidity and each having one or more wafer support portions;
wherein said wafer support members are fabricated from a material selected from the group consisting of SiC, Si3N4, Si and combinations thereof;
at least one of said wafer support members is a tilting wafer support member which has a plurality of upward-convex wafer support portions on the upper surface; and
is tiltable by a fulcrum located between said tilting wafer support member and the wafer support plate with respect to the wafer support plate; and
the wafer is supported by at least four wafer support portions by point contact;
including point contact by the upward-convex wafer support portions located on said upper surface of said tilting wafer support member. - View Dependent Claims (2, 3, 5, 6, 7, 8, 9, 10)
- the wafer holder comprises a wafer support plate and three or more wafer support members mounted on said wafer support plate, wherein said wafer support members maintain rigidity and each having one or more wafer support portions;
-
4. A wafer holder to hold a wafer on the upper surface characterized by comprising:
- a wafer support plate;
three or more wafer support members placed on said wafer support plate, at least one of which is a first tilting wafer support member having a flat upper surface and a fulcrum provided substantially at the center of the bottom surface and contacting the wafer support plate at a point or along a line and being tiltable with respect to the wafer support plate; and
at least one second tilting wafer support member located above the flat upper surface of said first tilting wafer support member, said second tilting wafer support member having an upper surface and bottom surface, a fulcrum provided substantially at the center of the bottom surface of said second tilting wafer support member and contacting with said first tilting wafer support member on its flat upper surface at a point or along a line, and a plurality of upward-convex wafer support portions provided on the upper surface of said second tilting wafer support member, wherein each of said wafer support members maintains rigidity, wherein said wafer support members are fabricated from a material selected from the group consisting of SiC, Si3N4, Si and combinations thereof; and
the wafer is supported by at least four wafer support portions by point contact;
including point contact by the upward-convex wafer support portions located on said upper surface of said second tilting wafer support member. - View Dependent Claims (11)
- a wafer support plate;
Specification