Method and apparatus for an improved bellows shield in a plasma processing system

• US 7,204,912 B2
• Filed: 09/30/2002
• Issued: 04/17/2007
• Est. Priority Date: 09/30/2002
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Nakayama, Hiroyuki, Mitsuhashi, Kouji, Takase, Taira, Saigusa, Hidehito
• Primary Examiner(s): Kackar; Ram N.
• Application Number:
  US10/259,306
• Publication Number:
  US 20040060656A1
• Time in Patent Office: 1,660 Days
• Field of Search: 118/728, 118/720, 156/345.51, 156/345.3, 427/534
• US Class Current: 156/345.51
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings
• CPC Class Codes: H01L 21/67069 for drying etching

Abstract

The present invention presents an improved bellows shield for a plasma processing system, wherein the design and fabrication of the bellows shield coupled to a substrate holder electrode advantageously provides protection of a bellows with substantially minimal erosion of the bellows shield.

Claims

1. A bellows shield for protecting a bellows on a substrate holder of a plasma processing system, comprising:

a cylindrical wall comprising an inner surface, an outer surface, a first end, and a second end;

wherein said first end comprises an attachment flange, said attachment flange comprising;

an interior surface having a first surface extending radially inward from said inner surface of said cylindrical wall, and a mating surface extending radially inward from said first surface and axially recessed from said first surface, said mating surface being configured to mate with said substrate holder and having a groove therein further axially recessed from the mating surface and extending circumferentially around the mating surface, the groove being adjacent to the first surface

an inner radial surface coupled to said mating surface

an exterior surface coupled to said outer surface and said inner radial surface, said exterior surface comprising;

a first exterior surface extending radially inward from said outer surface of said cylindrical wall,

a second exterior surface axially protruded from said first exterior surface and extending radially inward from said first exterior surface, and

a sidewall connecting said first exterior surface to said second exterior surface,

wherein said attachment flange further comprises a plurality of fastening receptors coupled to said interior surface and said second exterior surface of said attachment flange and configured to receive fastening devices in order to couple said bellows shield to said substrate holder; and

wherein said second end of said cylindrical wall comprises an end surface; and

a protective barrier provided on a plurality of exposed surfaces of said bellows shield, wherein said exposed surfaces comprise said end surface of said second end, said outer surface of said cylindrical wall, and said exterior surface of said attachment flange of said first end, and said protective barrier is a coating which comprises Yttria, and

wherein at least a portion of said inner surface includes an anodization layer thereon and does not include said protective barrier thereon, and wherein at least a portion of said mating surface does not include an anodization layer thereon and does not include said protective barrier thereon.

2. The bellows shield as recited in claim 1, wherein each of said plurality of fastening receptors comprises an entrant cavity opening to said second exterior surface, an exit through-hole opening to said interior surface, and an inner receptor surface provided within said fastening receptor.

3. The bellows shield as recited in claim 2, wherein said entrant cavity comprises:

a first entrant cavity opening to said second exterior surface; and

a second entrant cavity coupling said first entrant cavity to said exit through hole, wherein said second entrant cavity is wider than said exit through hole, and said first entrant cavity is wider than said second entrant cavity.

4. The bellows shield as recited in claim 3, wherein said protective barrier is not provided on said first entrant cavity, not provided on said second entrant cavity and not provided on said exit through-hole.

5. The bellows shield as recited in claim 2, wherein said protective baffler is not provided on at least a portion said inner receptor surface.

6. The bellows shield as recited in claim 2, wherein said protective barrier is a spray coating and said entrant cavity comprises:

a first entrant cavity opening to said second exterior surface; and

a second entrant cavity coupling said first entrant cavity to said exit through hole, wherein said second entrant cavity is wider than said exit through hole, and said first entrant cavity is wider than said second entrant cavity.

7. The bellows shield as recited in claim 1, wherein said bellows shield is formed of a metal.

8. The bellows shield as recited in claim 7, wherein said metal comprises aluminum.

9. The bellows shield as recited in claim 1, wherein said protective barrier is provided in direct contact with a bare surface of said bellows shield not having an anodization layer thereon.

10. The bellows shield as recited in claim 1, wherein said protective barrier is provided only in direct contact with a bare surface of said bellows shield not having an anodization layer thereon.

11. The bellows shield as recited in claim 1, wherein said protective barrier comprises a thermal spray coating having a minimum thickness and said minimum thickness is constant across at least one of said exposed surfaces.

12. The bellows shield as recited in claim 1, wherein said protective barrier comprises a thermal spray coating having a minimum thickness and said minimum thickness is variable across at least one of said exposed surfaces.

13. The bellows shield as recited in claim 1, wherein said cylindrical wall has a minimum thickness of at least two millimeters.

14. The bellows shield as recited in claim 1, wherein said inner radial surface comprises a minimum diameter of at least 200 millimeters.

15. The bellows shield as recited in claim 1 wherein said outer surface of the cylindrical wall is a bare surface not having an anodization layer provided thereon, and said protective barrier is provided in direct contact with said bare surface.

16. The bellows shield as recited in claim 1, wherein said mating surface comprises:

a first mating surface coupled to said inner radial surface;

and a second mating surface coupled to said first mating surface and said first surface of the interior surface, said second mating surface being axially recessed from said first mating surface and said first surface of the interior surface to form a portion of said groove.

17. The bellows shield as recited in claim 1, wherein:

said protective barrier is not provided on said inner surface, is not provided on said first surface of the interior surface, is not provided on said second mating surface and is not provided on said first mating surface; and

an anodization layer is provided on said inner surface, said first surface of the interior surface and said second mating surface.

18. The bellows shield as recited in claim 17, wherein said first mating surface is a bare metal surface not having said protective barrier provided thereon and not having said anodization layer provided thereon.

19. The bellows shield as recited in claim 1, wherein said protective barrier is not provided on said inner surface and is not provided on any portion of said interior surface.

20. The bellows shield as recited in claim 19, wherein said inner surface and said first surface of the interior surface each include an anodization layer provided thereon;

and

wherein said mating surface is a bare metal surface not having said protective barrier provided thereon and not having said anodization layer provided thereon.

21. The bellows shield as recited in claim 1, wherein said protective baffler is not provided on any portion of said inner receptor surface.

22. The bellows shield as recited in claim 1, wherein said first exterior surface, said second exterior surface and said sidewall form a shoulder structure configured to receive a shield ring,

wherein said exterior surface is a bare metal surface having said protective barrier in direct contact therewith.

23. The bellows shield as recited in claim 22, wherein said exterior surface further comprises:

a rounded transition region coupling said outer surface to said first exterior surface;

a rounded transition region coupling said first exterior surface to said sidewall; and

a rounded transition region coupling said sidewall to said second exterior surface.

24. The bellows shield as recited in claim 1, wherein said end surface comprises:

a first tapered transition coupling said inner surface to said end surface; and

a second tapered transition coupling said outer surface to said end surface, wherein said protective barrier is provided on said first tapered surface, provided on said end surface, provided on said second tapered surface and provided on said outer surface.

25. The bellows shield as recited in claim 24, wherein each of said first tapered transition, said end surface, said second tapered transition and said outer surface are bare surfaces not having an anodization layer thereon.

26. The bellows shield as recited in claim 1 wherein said protective barrier is a spray coating.

27. The bellows shield as recited in claim 26, wherein said mating surface comprises:

a first mating surface coupled to said inner radial surface;

a second mating surface coupled to said first mating surface and said first surface of the interior surface, said second mating surface being axially recessed from said first mating surface and said first surface of the interior surface.

28. The bellows shield as recited in claim 1, wherein said inner radial surface does not have said protective barrier thereon.

29. The bellows shield as recited in claim 28, wherein said inner radial surface has an anodization layer provided thereon.

30. The bellows shield as recited in claim 1, wherein each of said end surface of the second end, said outer surface of the cylindrical wall and said exterior surface of the attachment flange is a bare surface not having an anodization layer thereon.