Memory cell dual protection

• US 7,206,110 B2
• Filed: 12/03/2004
• Issued: 04/17/2007
• Est. Priority Date: 06/19/2002
• Status: Expired due to Fees

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Kelly, James D., Zhang, Shoucheng
• Primary Examiner(s): Mack; Ricky
• Assistant Examiner(s): Dinh; Jack
• Application Number:
  US11/004,595
• Publication Number:
  US 20050174628A1
• Time in Patent Office: 865 Days
• Field of Search: 359291-293, 359/237, 359/245, 359/248, 359/295
• US Class Current: 359/237
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 7/0029 Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A spatial light modulator for use in projection display applications is provided. The spatial light modulator includes a substrate including a plurality of electrically active circuits and an electrode layer electrically coupled to at least one of the plurality of electrically active circuits. In one embodiment, the electrode layer includes a semi-continuous layer with at least one optical path. The spatial light modulator also includes a shielding layer electrically isolated from the electrode layer and disposed between the substrate and the plurality of electrically active circuits and an electrical connector coupling the shielding layer to a reference potential. In a specific embodiment, the shielding layer of the spatial light modulator converts incident light energy to electrical current and routes the current back to a source. In another specific embodiment, the shielding layer converts electrical field disturbance to electrical current and routes the current back to a source.

Claims

1. A spatial light modulator for use in projection display applications, the spatial light modulator comprising:

a substrate comprising a plurality of electrically active circuits;

an electrode layer electrically coupled to at least one of the plurality of electrically active circuits, wherein the electrode layer comprises a semi-continuous layer including at least one optical path;

an electrically conductive shielding layer electrically isolated from the electrode layer and disposed between the plurality of electrically active circuits and the electrode layer; and

an electrical connector coupling the electrically conductive shielding layer to a reference potential.

2. The spatial light modulator of claim 1 wherein the electrically conductive shielding layer converts an incident light energy to an electrical current and routes the electrical current back to a source.

3. The spatial light modulator of claim 1 wherein the electrically conductive shielding layer converts an electrical field disturbance to an electrical current and routes the electrical current back to a source.

4. The spatial light modulator of claim 1 wherein the electrically conductive shielding layer has a thickness greater than a skin depth of the electrically conductive shielding layer.

5. The spatial light modulator of claim 1 wherein the electrically conductive shielding layer is coupled to a ground bus for routing an electrical current out of the spatial light modulator.

6. The spatial light modulator of claim 5 wherein the ground bus is an equipotential current return path.

7. The spatial light modulator of claim 1 wherein the electrode layer comprises a plurality of addressing electrodes.

8. The spatial light modulator of claim 7 wherein the electrically conductive shielding layer is electrically isolated from the plurality of addressing electrodes.

9. The spatial light modulator of claim 1 wherein the substrate is formed using CMOS processing technology.

10. The spatial light modulator of claim 1 wherein the electrically conductive shielding layer defines small openings to allow one or more electrical connections to pass through, but not make electrical contact with the electrically conductive shielding layer.

11. The spatial light modulator of claim 1 wherein the electrically conductive shielding layer comprises an aluminum layer.