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Load lock chamber for large area substrate processing system

  • US 7,207,766 B2
  • Filed: 04/26/2004
  • Issued: 04/24/2007
  • Est. Priority Date: 10/20/2003
  • Status: Active Grant
First Claim
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1. A loadlock chamber comprising:

  • a chamber body having a first side adapted for coupling to a vacuum chamber, a second side adapted for coupling to a factory interface and a third side coupling the first and second sides;

    N vertically stacked substrate transfer chambers formed in the chamber body, where N is an integer greater than two;

    N−

    1 interior walls, each interior wall separating and environmentally isolating adjacent substrate transfer chambers; and

    at least one alignment mechanism disposed in each substrate transfer chamber, each said alignment mechanism in each said substrate transfer chamber rotatable about an axis coplanar with a plane of the third side.

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