Load lock chamber for large area substrate processing system
First Claim
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1. A loadlock chamber comprising:
- a chamber body having a first side adapted for coupling to a vacuum chamber, a second side adapted for coupling to a factory interface and a third side coupling the first and second sides;
N vertically stacked substrate transfer chambers formed in the chamber body, where N is an integer greater than two;
N−
1 interior walls, each interior wall separating and environmentally isolating adjacent substrate transfer chambers; and
at least one alignment mechanism disposed in each substrate transfer chamber, each said alignment mechanism in each said substrate transfer chamber rotatable about an axis coplanar with a plane of the third side.
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Abstract
A load lock chamber and method for transferring large area substrates is provided. In one embodiment, a load lock chamber suitable for transferring large area substrates includes a plurality of vertically stacked single substrate transfer chambers. The configuration of vertically stacked single substrate transfer chambers contributes to reduced size and greater throughput as compared to conventional state of the art, dual slot dual substrate designs. Moreover, the increased throughput has been realized at reduced pumping and venting rates, which corresponds to reduced probability of substrate contamination due to particulates and condensation.
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Citations
33 Claims
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1. A loadlock chamber comprising:
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a chamber body having a first side adapted for coupling to a vacuum chamber, a second side adapted for coupling to a factory interface and a third side coupling the first and second sides; N vertically stacked substrate transfer chambers formed in the chamber body, where N is an integer greater than two; N−
1 interior walls, each interior wall separating and environmentally isolating adjacent substrate transfer chambers; andat least one alignment mechanism disposed in each substrate transfer chamber, each said alignment mechanism in each said substrate transfer chamber rotatable about an axis coplanar with a plane of the third side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A loadlock chamber comprising:
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a chamber body having a first side adapted for coupling to a vacuum chamber and a second side adapted for coupling to a factory interface; a first chamber formed within the chamber body; a first slit valve coupled to the chamber body selectively sealing a first substrate access port formed through the first side of the chamber body and coupled to the first chamber; a second slit valve coupled to the chamber body selectively sealing a second substrate access port formed through the second side of the chamber body and coupled to the first chamber; at least a second chamber formed in the chamber body and isolated from the first chamber by a horizontal wall; a third slit valve selectively sealing a third substrate access port formed through the first side of the chamber body and coupled to the second chamber; a fourth slit valve coupled to the chamber body selectively sealing a fourth substrate access support coupled to the second chamber; a third chamber formed in the chamber body above the first and second chambers and separated from the second chamber by a second horizontal wall; a fifth slit valve coupled to the chamber body selectively sealing a fifth substrate access port coupled to the third chamber; a sixth slit valve coupled to the chamber body selectively sealing a sixth substrate access port coupled to the third chamber; and at least two alignment mechanisms disposed in each chamber, each alignment mechanism having a rotational axis coplanar with a wall of the chamber body. - View Dependent Claims (28, 29)
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30. A large area substrate processing system comprising:
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a transfer chamber; a transfer robot disposed in the transfer chamber; a plurality of processing chambers coupled to the transfer chamber; and a plurality of vertically stacked single substrate loadlock chambers forming a unitary body coupled to the transfer chamber, wherein each chamber further comprises a rotating alignment mechanism adapted to center a substrate within the chamber, and the alignment mechanism rotates about an axis defined coplanar with a wall of the chamber. - View Dependent Claims (31, 32, 33)
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Specification