Process for fabricating MEMS membrane with integral mirror/lens
First Claim
Patent Images
1. A process for fabricating an optical membrane device, comprisingproviding a support;
- forming a sacrificial layer on the support;
forming a device layer on the sacrificial layer;
patterning a membrane structure into the device layer on an optical axis of the optical membrane device;
releasing the membrane structure by selectively removing the sacrificial layer; and
forming an optically curved surface on part of the membrane structure of the device layer, the optically curved surface being positioned on the optical axis of the optical membrane device.
7 Assignments
0 Petitions
Accused Products
Abstract
An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
114 Citations
10 Claims
-
1. A process for fabricating an optical membrane device, comprising
providing a support; -
forming a sacrificial layer on the support; forming a device layer on the sacrificial layer; patterning a membrane structure into the device layer on an optical axis of the optical membrane device; releasing the membrane structure by selectively removing the sacrificial layer; and forming an optically curved surface on part of the membrane structure of the device layer, the optically curved surface being positioned on the optical axis of the optical membrane device. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A process for fabricating concave mirror structures, comprising an optical membrane device, comprising
depositing a photoresist layer over a well in a substrate, the well being positioned on an optical axis of the optical membrane device; -
transferring curved surface over the well into the substrate by etching the photoresist and the substrate; and coating a curved surface of the substrate with a dielectric mirror coating. - View Dependent Claims (9, 10)
-
Specification