Plasma processing method
First Claim
1. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, a heater being provided for the outer cylinder and an inner cylinder being detachably held inside of the outer cylinder and being directly contacted by plasma generated during the plasma processing of the specimen, the inner cylinder being made of non-magnetic material and being replaceable from the outer cylinder, the plasma processing method comprising:
- monitoring a temperature of the inner cylinder during processing of the specimen;
comparing a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen with the monitored temperature of the inner cylinder; and
controlling the heater to control a temperature of the outer cylinder in response to a result of the comparison thereby indirectly controlling the inner cylinder temperature to a predetermined value.
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Abstract
A plasma processing method utilizing a plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material and being replaceable arranged inside the outer cylinder, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen and a vacuum pumping unit. A temperature of the inner cylinder is monitored, and a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen is compared with the monitored temperature of the inner cylinder. A temperature of the outer cylinder is controlled in response to a result of the comparison so as to control the inner cylinder temperature to a predetermined value.
36 Citations
28 Claims
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1. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, a heater being provided for the outer cylinder and an inner cylinder being detachably held inside of the outer cylinder and being directly contacted by plasma generated during the plasma processing of the specimen, the inner cylinder being made of non-magnetic material and being replaceable from the outer cylinder, the plasma processing method comprising:
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monitoring a temperature of the inner cylinder during processing of the specimen; comparing a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen with the monitored temperature of the inner cylinder; and controlling the heater to control a temperature of the outer cylinder in response to a result of the comparison thereby indirectly controlling the inner cylinder temperature to a predetermined value. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
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monitoring a temperature of the inner cylinder; comparing a desired inner cylinder temperature which is inputted in advance in response to a processing condition of a lot of the specimens with the monitored temperature of the inner cylinder; and controlling a temperature of the outer cylinder in response to a result of the comparison so as to correct a variation in initial processing of the lot by changing the inner cylinder temperature at the initial stage of processing of the lot. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
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monitoring a temperature of the inner cylinder; comparing, when a specimen having a multi-layer film structure is processed, a desired inner cylinder temperature which is inputted in advance in response to a film quality of each of the films of the multi-layer film structure, a type of processing gas and an electrical discharging condition with the monitored temperature of the inner cylinder; and controlling the inner cylinder temperature to a predetermined value by controlling a temperature of the outer cylinder in response to a result of the comparison; wherein the inner cylinder is detachably held inside of the outer cylinder and is directly contacted by plasma generated during the plasma processing, a heater being provided for the outer cylinder, and the inner cylinder being replaceable from the outer cylinder, the plasma processing method further comprising the monitoring of the temperature of the inner cylinder during processing of the specimen, and controlling the temperature of the outer cylinder by the heater in response to a result of the comparison thereby indirectly controlling the inner cylinder temperature to the predetermined value. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification