Lithographic apparatus and device manufacturing method utilizing plural patterning devices

• US 7,209,217 B2
• Filed: 04/08/2005
• Issued: 04/24/2007
• Est. Priority Date: 04/08/2005
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Troost, Kars Zeger
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US11/101,635
• Publication Number:
  US 20060227311A1
• Time in Patent Office: 746 Days
• Field of Search: 355/53, 355/67, 355/71, 355/75, 359291-292, 43/5, 43/22, 43/30
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70283 Mask effects on the imaging process
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A lithographic apparatus includes an illumination system, a patterning system, a projection system, and a combining system. The illumination system supplies a beam of radiation. The patterning system patterns the beam. The patterning system includes at least two arrays of individually controllable elements arranged to be illuminated by respective portions of the beam, each of the arrays pattering the respective portion of the beam. The combining system combines the patterned portions into the patterned beam. The projection system projects the patterned beam onto a target portion of a substrate.

Claims

1. A lithographic apparatus, comprising:

an illumination system that supplies a beam of radiation;

a dividing system configured to divide the beam of radiation into portions;

a patterning system that comprises at least two arrays of individually controllable elements arranged to be illuminated by the respective portions of the beam, each of the arrays patterning the respective portion of the beam;

a combining system configured to combine the patterned portions of the beam into a patterned beam;

a directing device that directs each of the portions between (a) the dividing system and respective ones of the at least two arrays of individually controllable elements and (b) the respective ones of the at least two arrays of individually controllable elements and the combining system; and

a projection system that projects the patterned beam onto a target portion of a substrate.

2. The apparatus of claim 1, wherein the combining system, the directing device, and the dividing system are a combined system.

3. The apparatus of claim 1, wherein the combining system and the dividing system comprise a common element, the common element being arranged to divide the beam into the portions for direction to the patterning system and to combine the patterned portions from the patterning system into the patterned beam.

4. The apparatus of claim 3, wherein the common element comprises a prism.

5. The apparatus of claim 1, wherein the combining system and the dividing system comprise a plurality of common elements, each common element in the plurality of common elements arranged to divide at least a portion of the beam into the portions for direction to the patterning system and to combine the patterned portions from the patterning system into the patterned beam.

6. The apparatus of claim 5, wherein each common element comprise a prism.

10. The apparatus of claim 1, wherein the combining system comprises at least one prism.

11. The apparatus of claim 1, wherein the combining system comprises:

a plurality of beam combining elements arranged as a branching network, the branching network being arranged to receive the patterned beam portions from the arrays of elements, to combine the patterned portions, and to output the patterned beam.

12. The apparatus of claim 11, wherein each beam combining element comprises a prism.

13. The apparatus of claim 1, wherein the projection system comprises:

an array of lenses arranged to receive the patterned beam and focus the patterned beam onto the target portion of the substrate as a plurality of radiation spots.

14. The apparatus of claim 1, wherein the projection system comprises:

a plurality of lens arrays, each of lens arrays in the plurality of lens arrays being arranged to receive and focus a respective portion of the patterned beam onto the target portion of the substrate as a corresponding plurality of radiation spots.

15. The apparatus of claim 1, wherein the combining system is arranged such that the patterns imparted to at least two portions of the beam are adjacent to each other within the patterned beam.

16. The apparatus of claim 1, wherein the combining system is arranged such that the patterns imparted to at least two portions of the beam are separated from each other within the patterned beam.

17. The apparatus of claim 1, wherein the combining system is arranged such that the patterns imparted to at least two portions of the beam overlap each other within the patterned beam.

18. The apparatus of claim 1, wherein the substrate is an FPD substrate.

19. The apparatus of claim 1, wherein the substrate is an LCD substrate.

20. The apparatus of claim 1, wherein the substrate is an IC substrate.

21. The apparatus of claim 1, wherein the substrate is a wafer for an IC.

7. The apparatus of 1, wherein the dividing system comprises at least one prism.

8. The apparatus of 1, wherein the dividing system comprises:

a plurality of beam dividing elements arranged as a branching network, the branching network being arranged to receive the beam, to divide the beam into the portions, and to direct each of the portions to a respective one of the arrays.

9. The apparatus of claim 8, wherein each beam dividing element comprises a prism.

22. A device manufacturing method, comprising:

dividing a beam of radiation into portions using a dividing device;

directing the portions onto first and second corresponding arrays of individually controllable elements using a directing device;

patterning respective ones of the portions with the first and second corresponding arrays of individually controllable elements;

directing the patterned portions towards a combining device using the directing device;

combining the patterned portions into a patterned beam using the combining device; and

projecting the patterned beam onto a target portion of a substrate.