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High fill-factor bulk silicon mirrors

  • US 7,209,274 B2
  • Filed: 12/31/2003
  • Issued: 04/24/2007
  • Est. Priority Date: 06/02/2001
  • Status: Expired due to Term
First Claim
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1. Micro-Electromechanical Systems (MEMS) apparatus comprising a base support;

  • a planar support layer having a support surface;

    a plurality of hinges for suspending said support layer relative to said base support for movement about two axes, the plurality of hinges being disposed in a different plane from said support layer;

    a bulk element comprising a device layer having an optical surface; and

    a pedestal that extends between the support surface and the device layer.

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