Vibrating gyro element, support structure of vibrating gyro element, and gyro sensor

• US 7,210,350 B2
• Filed: 01/10/2006
• Issued: 05/01/2007
• Est. Priority Date: 01/24/2005
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Ogura, Seiichiro
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US11/329,692
• Publication Number:
  US 20060107740A1
• Time in Patent Office: 476 Days
• Field of Search: 735/040.4, 735/041.2, 735/041.4, 735/041.5, 735/041.6, 310/370
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

A vibrating gyro element includes in the same plane a base portion; a pair of vibrating arms for detection extended out of the base portion on both sides in a straight line shape; a pair of connecting arms extended-out from the base portion onto both sides in directions perpendicular to the vibrating arms for detection; a pair of vibrating arms for driving each extended-out from the tip portion of each of the connecting arms to both sides perpendicularly to this tip portion; four beams extended out of the base portion; and a support portion connected to the tip of each of the beams; wherein each of the beams is once extended out of the base portion in a direction approximately perpendicular to the extending-out direction of the vibrating arm for driving.

Claims

1. A vibrating gyro element comprising in the same plane:

a base portion having opposite ends with opposite corners on each of the opposite ends and having opposite sides;

a pair of vibrating arms for detection extended out of the base portion from both ends in a straight line shape;

a pair of connecting arms extended-out from the base portion from said opposite sides in directions perpendicular to the vibrating arms for detection;

additional pairs of vibrating arms for driving with each pair extending out from a tip portion of each of the connecting arms in a direction parallel to the pair of vibrating arms;

four beams extending out from the opposite corners on both ends of the base portion with each beam having a configuration substantially conforming to the letter “

S”

; and

a support portion connected to the tip portion of each each of the beams;

wherein each of the beams is once extended out of the base portion in a direction approximately perpendicular to the extending-out direction of the pair of connecting arms.

2. The vibrating gyro element according to claim 1 wherein the beams and the support portions are arranged in positions symmetrical in rotation with respect to the center of gravity of the vibrating gyro element.

3. A support structure of a vibrating gyro element comprising:

the vibrating gyro element according to claim 1

a support base for placing the vibrating gyro element thereon; and

a fixing member for fixing the support portion of the vibrating gyro element and the support base.

4. The support structure of the vibrating gyro element according to claim 3, wherein the fixing member is constructed by a material having elasticity.

5. A gyro sensor comprising:

the vibrating gyro element according to claim 1;

a support base for placing the vibrating gyro element thereon;

a fixing member for fixing the support portion of the vibrating gyro element and the support base;

a driving circuit for operating and vibrating the vibrating gyro element; and

a detecting circuit for detecting a detecting vibration caused in the vibrating gyro element when an angular velocity is applied to the vibrating gyro element.