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Fluid ejection device with inner and outer arms

  • US 7,210,666 B2
  • Filed: 01/26/2006
  • Issued: 05/01/2007
  • Est. Priority Date: 06/30/1999
  • Status: Expired due to Fees
First Claim
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1. A microelectromechanical fluid ejection device, said device comprising:

  • a mechanical actuator comprising an outer arm portion and an inner arm portion, said actuator being displaceable upon receipt of an electrical current in said inner arm portion, said outer arm portion electrically isolated from said inner arm portion, said displacement causing ejection of fluid from an aperture in the device; and

    ,drive circuitry for supplying the electrical current to said inner arm portion;

    wherein the current causes heating of said inner arm portion, and the heating causes elongation of said inner arm portion, inducing bending of said actuator.

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