×

Exposure apparatus with laser device

  • US 7,212,275 B2
  • Filed: 04/22/2005
  • Issued: 05/01/2007
  • Est. Priority Date: 09/10/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A laser apparatus comprising:

  • a laser light generation section that includes a single wavelength oscillatory laser and which generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ

    m to about 1.59 μ

    m;

    an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light;

    a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light; and

    a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×