Exposure apparatus with laser device
First Claim
1. A laser apparatus comprising:
- a laser light generation section that includes a single wavelength oscillatory laser and which generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m;
an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light;
a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light; and
a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section.
0 Assignments
0 Petitions
Accused Products
Abstract
A laser apparatus that includes a laser light generation section, an optical amplification section, a wavelength conversion section and a suppressing section is provided. The laser light generation section includes a single wavelength oscillatory laser and generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 to 1.59 μm. The optical amplification section includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light. The wavelength conversion section includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light. The suppressing section suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section.
44 Citations
38 Claims
-
1. A laser apparatus comprising:
-
a laser light generation section that includes a single wavelength oscillatory laser and which generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m;an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light; a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light; and a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
-
24. A light irradiation apparatus which irradiates an object with ultraviolet light, comprising:
-
a laser device which generates the ultraviolet light, and an optical system, through which the ultraviolet light, generated from the laser device and directed to the object, passes. wherein the laser device includes; a laser light generation section that includes a single wavelength oscillatory laser and that generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m;an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light; a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into the ultraviolet light; and a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section. - View Dependent Claims (25)
-
-
26. An apparatus used in a device producing process, comprising:
-
a laser device that generates ultraviolet light; and a body optically connected to the laser device, wherein the laser device includes; a laser light generation section that includes a single wavelength oscillatory laser and that generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m;an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light; a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into the ultraviolet light; and a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section.
-
-
27. A testing An inspection apparatus used in a device producing process, comprising:
-
a laser device that generates ultraviolet light; and a detection system optically connected to the laser device, which detects an object to be inspected with the ultraviolet light, wherein the laser device includes; a laser light generation section that includes a single wavelength oscillatory laser and that generates pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m;an optical amplification section that includes an optical fiber amplifier and is optically connected to the laser light generation section to amplify the pulsed light; a wavelength conversion section that includes a nonlinear optical crystal and is optically connected to the optical amplification section to perform wavelength conversion of the amplified pulsed light into ultraviolet light; and a suppressing section that suppresses expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the wavelength conversion section. - View Dependent Claims (28)
-
-
29. A method for irradiating an object with ultraviolet light, comprising:
-
generating pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m from a laser light generation section including a single wavelength oscillatory laser;amplifying the pulsed light a plurality of times by a plurality of optical fiber amplifiers; performing wavelength conversion of the amplified pulsed light into ultraviolet light by a plurality of nonlinear optical crystals; and suppressing expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the plurality of the nonlinear optical crystals. - View Dependent Claims (30, 31, 32, 33, 34, 35, 38)
-
-
36. A device manufacturing method, comprising:
-
generating pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m from a laser light generation section including a single wavelength oscillatory laser;amplifying the pulsed light a plurality of times by a plurality of optical fiber amplifiers; performing wavelength conversion of the amplified pulsed light into ultraviolet light by a plurality of nonlinear optical crystals; suppressing expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the plurality of the nonlinear optical crystals; and irradiating a substrate with the ultraviolet light.
-
-
37. An inspection method used in a device producing process, comprising:
-
generating pulsed light having a single wavelength within a wavelength range ranging from about 1.51 μ
m to about 1.59 μ
m from a laser light generation section including a single wavelength oscillatory laser;amplifying the pulsed light a plurality of times by a plurality of optical fiber amplifiers; performing wavelength conversion of the amplified pulsed light into ultraviolet light by a plurality of nonlinear optical crystals; suppressing expansion of a wavelength width of light originated in a nonlinear effect of an optical element between the single wavelength oscillatory laser and the plurality of the nonlinear optical crystals; and irradiating an object to be inspected with the ultraviolet light.
-
Specification