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Interferometer calibration methods and apparatus

  • US 7,212,292 B2
  • Filed: 06/26/2006
  • Issued: 05/01/2007
  • Est. Priority Date: 07/21/2004
  • Status: Expired due to Fees
First Claim
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1. A Fabry-Perot interferometer, comprising:

  • a) substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces; and

    b) means for controlling the optical gap, including a plurality of electrostatic control plates, each electrostatic control plate having a fixed control-plate area and each control plate being adapted to control the optical gap by application of a control-plate voltage, the control-plate areas being related by integral ratios.

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