Method for automatic configuration of processing system
First Claim
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1. A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment comprising:
- generating an auto-configuration script for executing an auto-configuration program, wherein said auto-configuration script activates default values for input to said auto-configuration program;
executing said auto-configuration script to generate an enabled parameter file output from said auto-configuration program, wherein said enabled parameter file identifies parameters for statistical process control (SPC) chart generation; and
generating control limits for at least one of said at least one SPC charts, wherein said generating comprises automatic calculation of said control limits per the execution of said auto-configuration script.
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Abstract
A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment in which an auto-configuration script is generated for executing an auto-configuration program. The auto-configuration script activates default values for input to the auto-configuration program. The auto-configuration script is executed to generate an enabled parameter file output from the auto-configuration program. The enabled parameter file identifies parameters for statistical process control (SPC) chart generation.
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Citations
36 Claims
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1. A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment comprising:
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generating an auto-configuration script for executing an auto-configuration program, wherein said auto-configuration script activates default values for input to said auto-configuration program; executing said auto-configuration script to generate an enabled parameter file output from said auto-configuration program, wherein said enabled parameter file identifies parameters for statistical process control (SPC) chart generation; and generating control limits for at least one of said at least one SPC charts, wherein said generating comprises automatic calculation of said control limits per the execution of said auto-configuration script. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification