Method and device for generating an activated gas curtain for surface treatment

• US 7,214,413 B2
• Filed: 05/03/2002
• Issued: 05/08/2007
• Est. Priority Date: 05/03/2001
• Status: Expired due to Fees

• Current Assignee: APIT Corporation SA
• Original Assignee: APIT Corporation SA
• Inventors: Koulik, Pavel, Evguenia, Zorina, Samsonov, Mikhai
• Primary Examiner(s): Fletcher, III; William Phillip
• Assistant Examiner(s): Sellman; Cachet I.
• Application Number:
  US10/474,669
• Publication Number:
  US 20040115872A1
• Time in Patent Office: 1,831 Days
• Field of Search: None
• US Class Current: 427/562
• CPC Class Codes: H05H 1/484 Arrangements to provide plasma curtains or plasma showers
• CPC Class Codes: H05H 2245/40 Surface treatments

Abstract

The invention relates to a surface treatment device comprising: electrodes (24a, 24b) that are used to initiate an electric arc of stabilised plasma (14); a stabilising channel (12) which is disposed in a body (10) in order to confine the electric arc of stabilised plasma; conduits (38, 39) which are disposed in the body and used to introduce a treatment gas Q₁, uniformly distributed along the arc, upstream of the arc in a direction that is essentially perpendicular to axis A of said arc in such a way as to form an activated gas curtain (8); means for introducing a complementary treatment gas Q₂ downstream of the electric arc; and a support (28) that is used to hold the object or material to be treated in place and to position the object or material surface to be treated in relation to the body (10).

Claims

1. A method for the treatment of surfaces or for the formation of powders on a surface includes initiating an electric arc of stabilised plasma, generating a jet of activated gas in the form of a curtain from said electric arc substantially perpendicularly to the axis A of said electric arc and projecting the curtain of activated gas on the surface to be treated, wherein the distance L of the axis A of the electric arc from the surface to be treated, as well as the speed v of the stream of activated gas are adjusted in such a manner that the particles of the curtain of activated gas be electrically neutral and in a metastable state at the moment contact with the surface to be treated.

2. A treatment method according to claim 1, wherein the distance L of the electrical axis from the surface to be treated and the speed v of the stream of activated gas are adjusted in such a manner as to satisfy the relation L/v<

τ

, in which τ

is the relaxation time of the activated metastable states of the particles of the curtain.

3. A method according to claim 1, wherein the parameters of the stream of activated gas and of the scanning speed of the surface to be treated are adjusted with respect to the stabilised electric arc, in such a manner that the diffusion length D of the activated molecules, radicals and atoms contained in the curtain of activated gas be greater than the thickness δ

of the boundary layer separating the impinging activated gas from the surface to be treated.

4. A method according to claim 1, wherein the curtain of activated gas is generated at ambient pressure.

5. A method according to claim 1, wherein a relative scanning motion is produced between the curtain of activated gas and the surface to be treated, in a direction which is substantially perpendicular to the central axis A of the electric arc of plasma.

6. A method according to claim 1, wherein a stream of treatment gas Q₁ is introduced upstream of the electric arc of plasma.

7. A method according to claim 6, wherein a stream of complementary treatment gas Q₂ is injected into the curtain of activated gas downstream of the electric arc of plasma.

8. A method according to claim 7, wherein the stream of complementary treatment gas Q₂ is blown onto the surface to be treated in such a manner that, in the zone of contact of the curtain of activated gas with the surface to be treated, the boundary layer thereof be supplied by said complementary treatment gas.

9. A method according to claim 1, wherein the surface to be treated is subjected to an undulatory motion, in particular through the application of acoustic or of ultrasonic vibrations, for the purpose of accelerating the treatment and/or of conferring an anisotropic character thereto.

10. A method according to claim 1, wherein streams of reactive gases are injected into a treatment zone in the curtain of activated gas, in order to form, by contact with the curtain of activated gas, powders having a composition, a particle size distribution and dimensions which are controlled via the parameters of both the streams of gas supplied to the curtain of activated gas and the complementary treatment gas Q₂.

11. A device for carrying out the method according to claim 1, including electrodes (24a, 24b) for initiating a stabilised electrical arc of plasma (14), a stabilising channel (12) in a body (10) to confine the electric arc of stabilised plasma, conduits (38, 39) in the body for the introduction, uniformly distributed along said arc, of a treatment gas Q₁, upstream of said arc and in a direction substantially perpendicular to the axis A of said arc, so as to form a curtain (8) of an activated gas, means for introducing a complementary treatment gas Q₂ downstream of said electric arc and a support (28) for holding the object or the material to be treated and for positioning the surface to be treated of said object or material with respect to the body (10).

12. A device according to claim 11, wherein the conduits for the introduction of the treatment gas Q₁ include lateral slots (38) for the introduction of the treatment gas Q₁ into the stabilising channel (12) at an angle greater than zero, relative to the direction of the stream of the gas of the curtain of activated gas.

13. A device according to claim 11, wherein the distance of the support from the body is adjustable, which makes it possible to define and control the parameters of the boundary layer on the surface to be treated.

14. A device according to claim 11, wherein the means for introducing the complementary treatment gas Q₂ include a slot in the body (10), located downstream of the stabilising channel.

15. A device according to claim 11, wherein the stabilising channel has a profile which is substantially cylindrical.

16. A device according to claim 11, wherein the stabilising channel has a profile which is substantially square or rectangular.

17. A device according to claim 11, wherein the stabilising channel has a profile which is substantially triangular.

18. A device according to claim 11, wherein the body of the device for generating a curtain of activated gas includes an outlet passage (20) for the curtain of activated gas, having the shape of a slot of a width lesser than the diameter of the electric arc of plasma (14).

19. A device according to claim 11, wherein the outlet passage for the curtain of activated gas includes a labyrinth portion, arranged so that the ultraviolet rays produced from the arc be unable to reach the surface to be treated.

20. A device according to claim 11, wherein the support of the object to be treated is fixed to a mechanism enabling a relative motion of the surface to be treated with respect to the curtain of activated gas, in a direction perpendicular to the curtain of activated gas, in order to scan the surface to be treated by the curtain of activated gas.

21. A device according to claim 11, wherein it includes means for inverting the operations of the conduits for the stream of complementary treatment gas and for the stream of residual gases, according to the direction of the relative motion of the surface to be treated and of the curtain of activated gas.

22. A device according to claim 11, wherein it includes a source of acoustic or ultrasonic vibrations.

23. A device according to claim 11, wherein the stabilising channel 12 confining the electric arc of plasma is made from a dielectric material which is porous and refractory.

24. A device according to claim 11, wherein the stabilising channel is made from a metal which is sectioned along the axis of the electric arc of plasma into diaphragms which are electrically insulated from one another.

25. A device according to claim 11 for the formation of a powder, wherein the support of the surface to be treated is provided in the form of a conveyor, to carry away the powder generated from the contact of the curtain of activated gas with the surface of the conveyor, acting as the surface to be treated.