Method of forming thin film patterning substrate including formation of banks
First Claim
1. A thin film formation method for forming thin films in patterns on a thin film patterning substrate, comprising:
- forming banks and areas to be coated on a surface, the areas to be coated being partitioned by said banks, surfaces of said banks being formed of an organic substance, and said areas to be coated being formed of an inorganic substance; and
forming thin films in patterns by at least one of a dip process and a spin-coating process.
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Accused Products
Abstract
Display devices such as EL elements or LED elements, are formed from thin film elements having banks of prescribed height and a thin film layer formed by an ink jet method in areas to be coated that are partitioned by those banks. The banks may be formed of an organic material on a bank formation surface configured of an inorganic material, plasma treatment is performed under conditions that the induction gas is fluorine-based and that fluorine is present excessively, and the areas enclosed by the banks subjected to surface treatment are filled with the liquid thin film material to form the thin film layer or layers.
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Citations
47 Claims
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1. A thin film formation method for forming thin films in patterns on a thin film patterning substrate, comprising:
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forming banks and areas to be coated on a surface, the areas to be coated being partitioned by said banks, surfaces of said banks being formed of an organic substance, and said areas to be coated being formed of an inorganic substance; and forming thin films in patterns by at least one of a dip process and a spin-coating process. - View Dependent Claims (2, 3, 4, 5)
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6. A thin film formation method for filling areas enclosed by banks with a liquid thin film material to form thin film layers, comprising:
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forming said banks of an organic material on a bank formation surface configured of an inorganic material; performing a prescribed surface treatment on said banks and said bank formation surface under certain conditions when said surface treatment has been performed, a degree of non-affinity for said liquid thin film material exhibited by said organic material becomes higher than that exhibited by said inorganic material; and filling areas enclosed by banks subjected to said surface treatment with said liquid thin film material to form thin film layers. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A surface modification method for filling areas enclosed by banks formed on a substrate with a liquid thin film material, comprising:
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performing a first process of an oxygen gas plasma treatment on said substrate whereon said banks are formed; and performing thereon, consecutively, after said first process, a second process of a fluorine-based gas plasma treatment. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A surface modification method for filling areas enclosed by banks formed on a substrate with a liquid thin film material, comprising:
performing a process of a fluorine-based gas plasma treatment on said substrate whereon said banks are formed. - View Dependent Claims (45)
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46. A surface modification method for filling areas enclosed by banks in a substrate with a liquid thin film material, comprising:
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performing a series of surface modification treatments uniformly over an entire surface of said substrate whereon said banks are formed; and raising a non-affinity of bank surfaces for said liquid thin film material relative to that of surfaces between said banks.
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47. A surface modification method for filling areas enclosed by banks formed on a substrate with a liquid thin film material, comprising:
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performing a first process of an oxygen gas plasma treatment on the substrate whereon the banks are formed; consecutively performing a second process of a fluorine-based gas plasma treatment on the substrate whereon the banks are formed; forming an upper surface of the banks of an organic substance; further forming side surfaces of the banks of an organic substance; further forming the banks in two layers including a lower layer inorganic substance and an upper layer organic substance, with at least side surfaces of the inorganic substance not being covered by the organic substance; further forming the substrate of the inorganic substance exhibiting liquid affinity; and further forming a surface of said banks of said organic substance exhibiting liquid repellency.
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Specification