Electro-optical device and method of manufacturing the same comprising an interlayer insulating film having a multi-layered structure
First Claim
1. An electro-optical device, comprising:
- a substrate;
a data line extending above the substrate;
a scanning line extending in a direction intersecting the data line;
a thin film transistor including a semiconductor layer and a gate electrode, the gate electrode being supplied with scanning signals by the scanning line;
a pixel electrode supplied with image signals by the data line through the thin film transistor;
an interlayer insulating film arranged beneath the pixel electrode;
a passivation film arranged directly beneath the pixel electrode with no additional layer between the passivation film and the pixel electrode and directly on a surface of the interlayer insulating film with no additional layer between the passivation film-and the interlayer insulating film, the passivation film including at least one of boron or phosphorus; and
a storage capacitor electrically connected to the thin film transistor and to the pixel electrode, and a capacitor wiring line to supply fixed electric potential to the storage capacitor;
wherein;
the interlayer insulating film includes a second interlayer insulating film on which the capacitor wiring line is laminated, under a first interlayer insulating film, and a third interlayer insulating film on which the data line is laminated, under the second interlayer insulating film, anda second passivation film including at least one of boron or phosphorus is arranged on a surface of the second interlayer insulating film or a surface of the third interlayer insulating film.
2 Assignments
0 Petitions
Accused Products
Abstract
To provide an electro-optical device capable of reducing the likelihood of preventing moisture from permeating into a laminated structure formed on a substrate, in particular, thin film transistors that constitute the laminated structure and of performing a stable operation, and/or electro-optical device includes data lines, scanning lines, thin film transistors including semiconductor layers, and pixel electrodes to which image signals are supplied by the data lines through the thin film transistors, on a substrate. The electro-optical device may include an interlayer insulating film arranged between the data lines and the pixel electrodes, and a passivation film arranged on the surface of the interlayer insulating film.
22 Citations
12 Claims
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1. An electro-optical device, comprising:
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a substrate; a data line extending above the substrate; a scanning line extending in a direction intersecting the data line; a thin film transistor including a semiconductor layer and a gate electrode, the gate electrode being supplied with scanning signals by the scanning line; a pixel electrode supplied with image signals by the data line through the thin film transistor; an interlayer insulating film arranged beneath the pixel electrode; a passivation film arranged directly beneath the pixel electrode with no additional layer between the passivation film and the pixel electrode and directly on a surface of the interlayer insulating film with no additional layer between the passivation film-and the interlayer insulating film, the passivation film including at least one of boron or phosphorus; and a storage capacitor electrically connected to the thin film transistor and to the pixel electrode, and a capacitor wiring line to supply fixed electric potential to the storage capacitor; wherein; the interlayer insulating film includes a second interlayer insulating film on which the capacitor wiring line is laminated, under a first interlayer insulating film, and a third interlayer insulating film on which the data line is laminated, under the second interlayer insulating film, and a second passivation film including at least one of boron or phosphorus is arranged on a surface of the second interlayer insulating film or a surface of the third interlayer insulating film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing an electro-optical device, comprising:
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extending a data line above a substrate; extending a scanning line in a direction intersecting the data line; forming a thin film transistor including a semiconductor layer and a gate electrode, the gate electrode being supplied with scanning signals by the scanning line; forming a pixel electrode supplied with image signals by the data line through the thin film transistor; forming an interlayer insulating film arranged beneath the pixel electrode; forming a passivation film directly beneath the pixel electrode with no additional layer between the passivation film and the pixel electrode and directly on a surface of the interlayer insulating film with no additional layer between the passivation film and the interlayer insulating film, the passivation film including at least one of boron and phosphorous; and forming a storage capacitor electrically connected to the thin film transistor and to the pixel electrode, and a capacitor wiring line to supply fixed electric potential to the storage capacitor; wherein; the interlayer insulating film includes a second interlayer insulating film on which the capacitor wiring line is laminated, under a first interlayer insulating film, and a third interlayer insulating film on which the data line is laminated, under the second interlayer insulating film, and a second passivation film including at least one of boron or phosphorus is formed on a surface of the second interlayer insulating film or a surface of the third interlayer insulating film. - View Dependent Claims (11, 12)
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Specification