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Deflection mechanisms in micromirror devices

  • US 7,215,458 B2
  • Filed: 11/05/2004
  • Issued: 05/08/2007
  • Est. Priority Date: 01/10/2003
  • Status: Expired due to Term
First Claim
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1. A method for operating a micromirror device having a deflectable reflective mirror plate that is attached to a deformable hinge held on a substrate, and an addressing electrode that is positioned proximate to the mirror plate, the method comprising:

  • upon receiving an ON state signal, applying a first voltage to the mirror plate and a second voltage to the addressing electrode such that the mirror plate is rotated to an ON state angle of 12°

    degrees or more from a non-deflected state, wherein the difference between said two voltages is 30 volts or more.

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