Deflection mechanisms in micromirror devices
First Claim
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1. A method for operating a micromirror device having a deflectable reflective mirror plate that is attached to a deformable hinge held on a substrate, and an addressing electrode that is positioned proximate to the mirror plate, the method comprising:
- upon receiving an ON state signal, applying a first voltage to the mirror plate and a second voltage to the addressing electrode such that the mirror plate is rotated to an ON state angle of 12°
degrees or more from a non-deflected state, wherein the difference between said two voltages is 30 volts or more.
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Abstract
A method and apparatus for operating spatial light modulator have been disclosed herein. The spatial light modulator comprises an array of micromirror devices, each of which further comprises a reflective deflectable mirror plate attached to a deformable hinge, and an addressing electrode for addressing and deflecting the mirror plate.
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Citations
78 Claims
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1. A method for operating a micromirror device having a deflectable reflective mirror plate that is attached to a deformable hinge held on a substrate, and an addressing electrode that is positioned proximate to the mirror plate, the method comprising:
upon receiving an ON state signal, applying a first voltage to the mirror plate and a second voltage to the addressing electrode such that the mirror plate is rotated to an ON state angle of 12°
degrees or more from a non-deflected state, wherein the difference between said two voltages is 30 volts or more.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method for operating a micromirror device having a deflectable reflective minor plate that is attached to a deformable hinge held on a substrate, and an addressing electrode that is positioned proximate to the mirror plate, the method comprising:
upon receiving an OFF state signal, applying a first voltage to the mirror plate and a second voltage to the addressing electrode such that the voltage difference between the addressing electrode and minor plate is 17 volts or less under which the minor plate returns to its natural resting state. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A spatial light modulator, comprising:
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an array of micromirrors, each of which comprises;
a substrate; and
a deflectable minor plate attached to a deformable hinge that is held on the substrate such that the minor plate is operable to rotate to an ON state and an OFF state; andan array of addressing electrodes for addressing and deflecting the mirror plates, wherein a change of a voltage on the addressing electrode when the minor plate switches between the ON and OFF state is 10 volts or more, wherein each micromirror has only one addressing electrode for deflecting the minor plate of said micromirror. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68)
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69. A method of operating a spatial light modulator that comprises an array of micromirror devices, each of which comprises a reflective deflectable mirror plate attached to a deformable hinge;
- and an addressing electrode for addressing deflecting the mirror plate, the method comprising;
applying a mirror voltage on the mirror plate; applying a first voltage on the addressing electrode so as to rotate the mirror plate to a first operation state; and applying a second voltage state on the addressing electrode such that the minor plate rotates to a second operation state, where in the second voltage and first voltage have opposite polarities. - View Dependent Claims (70, 71, 72, 73, 74, 75, 76, 77, 78)
- and an addressing electrode for addressing deflecting the mirror plate, the method comprising;
Specification