Micromirror devices with in-plane deformable hinge
First Claim
Patent Images
1. A spatial light modulation device, comprising:
- an army of micromirror devices, each of which comprises;
a single crystal mirror plate;
a deformable hinge in the same plane of the mirror plate, wherein the hinge extends along a direction that is offset from said diagonal of the mirror plate, and is not parallel to any major sides of the mirror plate; and
one addressing electrode proximate to the mirror plate for deflecting the mirror plate.
4 Assignments
0 Petitions
Accused Products
Abstract
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
65 Citations
68 Claims
-
1. A spatial light modulation device, comprising:
an army of micromirror devices, each of which comprises; a single crystal mirror plate; a deformable hinge in the same plane of the mirror plate, wherein the hinge extends along a direction that is offset from said diagonal of the mirror plate, and is not parallel to any major sides of the mirror plate; and one addressing electrode proximate to the mirror plate for deflecting the mirror plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
-
45. A spatial light modulator device, comprising:
-
an array of micromirror devices, each of which comprises; a single crystal mirror plate; a deformable hinge in the same plane of the mirror plate; wherein the hinge is connected to the mirror plate such that the mirror plate is operable to be deflected; and wherein the hinge comprises on a top surface of the hinge a light absorbing material that is operable to absorb 83% or more of visible light incident thereto. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63)
-
-
64. A spatial light modulator device, comprising:
-
an array of micromirror devices, each of which comprises; a single crystal mirror plate; a deformable hinge in the same plane of the mirror plate; wherein the hinge is connected to the mirror plate such that the mirror plate is operable to be deflected; and wherein the hinge comprises on a top surface of the hinge a light absorbing material with an absorpbility higher than that of the single crystal silicon. - View Dependent Claims (65, 66, 67, 68)
-
Specification