Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit
First Claim
1. A micro mirror unit including a frame and a mirror substrate, formed from a single substrate material, the mirror body having a mirror surface thereof formed on the mirror substrate being linked to the frame by means of hinges in such a manner that the mirror body is supported movably in relation to the frame,the hinges of the micro mirror unit being formed from a different material from that from which the frame and mirror body are formed,wherein the hinges are formed from a composite material of SiO2 having a metallic material laminated thereon.
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Abstract
The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
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Citations
2 Claims
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1. A micro mirror unit including a frame and a mirror substrate, formed from a single substrate material, the mirror body having a mirror surface thereof formed on the mirror substrate being linked to the frame by means of hinges in such a manner that the mirror body is supported movably in relation to the frame,
the hinges of the micro mirror unit being formed from a different material from that from which the frame and mirror body are formed, wherein the hinges are formed from a composite material of SiO2 having a metallic material laminated thereon.
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2. A micro mirror unit including a frame and a mirror substrate, formed from a single substrate material, the mirror body having a mirror surface thereof formed on the mirror substrate being linked to the frame by means of hinges in such a manner that the mirror body is supported movably in relation to the frame,
the hinges of the micro mirror unit being formed from a different material from that from which the frame and mirror body are formed, wherein the hinges are formed from a composite material of SiC having a metallic material laminated thereon.
Specification