Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit

• US 7,215,630 B2
• Filed: 04/26/2005
• Issued: 05/08/2007
• Est. Priority Date: 12/28/1999
• Status: Expired due to Fees

• Current Assignee: Sony Corporation (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Hori, Kazuhito, Kojima, Naoto, Hara, Masaki, Ido, Hiroto, Hane, Kazuhiro
• Primary Examiner(s): Dinh; Tan
• Assistant Examiner(s): CHU, KIM KWOK
• Application Number:
  US11/114,868
• Publication Number:
  US 20050195466A1
• Time in Patent Office: 742 Days
• Field of Search: 369/112.29, 369/44.23, 369/44.16, 369/244, 369/44.17, 359/224, 359/876, 372/20
• US Class Current: 369/112.29
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2201/11 Read heads, write heads or micropositioners for hard- or optical disks
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81C 1/00595 Control etch selectivity
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 7/1821 for rotating or oscillating mirrors
• CPC Class Codes: G11B 7/08564 using galvanomirrors
• CPC Class Codes: G11B 7/08576 Swinging-arm positioners
• CPC Class Codes: Y10T 428/24942 including components having same physical characteristic in differing degree

Abstract

The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiN_x, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

Claims

1. A micro mirror unit including a frame and a mirror substrate, formed from a single substrate material, the mirror body having a mirror surface thereof formed on the mirror substrate being linked to the frame by means of hinges in such a manner that the mirror body is supported movably in relation to the frame,

the hinges of the micro mirror unit being formed from a different material from that from which the frame and mirror body are formed,

wherein the hinges are formed from a composite material of SiO₂ having a metallic material laminated thereon.

2. A micro mirror unit including a frame and a mirror substrate, formed from a single substrate material, the mirror body having a mirror surface thereof formed on the mirror substrate being linked to the frame by means of hinges in such a manner that the mirror body is supported movably in relation to the frame,

the hinges of the micro mirror unit being formed from a different material from that from which the frame and mirror body are formed,

wherein the hinges are formed from a composite material of SiC having a metallic material laminated thereon.