Selection of wavelengths for integrated circuit optical metrology

• US 7,216,045 B2
• Filed: 06/03/2002
• Issued: 05/08/2007
• Est. Priority Date: 06/03/2002
• Status: Active Grant

• Current Assignee: Tokyo Electron America Incorporated (Tokyo Electron Limited)
• Original Assignee: Timbre Technologies Incorporated (Tokyo Electron Limited)
• Inventors: Vuong, Vi, Bao, Junwei, Drege, Emmanuel, Jakatdar, Nickhil, Doddi, Srinivas, Lane, Lawrence, Barry, Kelly, Laughery, Mike
• Primary Examiner(s): Hoff; Marc S.
• Assistant Examiner(s): O MALLEY, MARY CATHERINE
• Application Number:
  US10/162,516
• Publication Number:
  US 20030225535A1
• Time in Patent Office: 1,800 Days
• Field of Search: 702/40, 702/66, 702 70- 71, 702/127, 702/159, 702/172, 702/189, 702/193, 438/7, 438/14, 438/16, 438/29, 356/328, 356/369, 356484-488, 356497-499
• US Class Current: 702/66
• CPC Class Codes: G01B 11/00 Measuring arrangements characterised by the use of optical techniques

Abstract

Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.

Claims

1. A system for selecting wavelengths to use in optical metrology processing and simulation, the system comprising:

a wavelength selector configured to determine one or more termination criteria for selection of wavelengths, to set selection one or more criteria for selection of wavelengths; and

to perform one or more iterations of selection of wavelengths, the iterations of the selection of wavelengths continuing until the termination criteria for selection of wavelengths are met, each iteration of the selection of wavelengths using one or more input diffraction spectra for the integrated circuit structure and the criteria for selection of wavelength; and

one or more wavelength selection engines coupled to the wavelength selector, the one or more wavelength selection engines configured to optimize the selection of wavelengths meeting one or more selection criteria.

2. The system of claim 1 wherein:

the one or more wavelength selection engine include an engine utilizing a set cover feature selection algorithm, Eigen Covariance Analysis algorithm, singular value decomposition algorithm, or other feature selection algorithm.