Micromachined apparatus with split vibratory masses
First Claim
Patent Images
1. Apparatus comprising a plurality of resonator structures including a pair of split masses suspended by suspension flexures, wherein each split mass includes two lobes interconnected with a flexure that allows the lobes to rotate slightly as the masses resonate so as to reduce longitudinal stresses in the suspension flexures.
1 Assignment
0 Petitions
Accused Products
Abstract
Each of a number of resonator masses is split into two separate lobes or masses joined together by a short flexure. The short flexure allows the separate lobes or masses to rotate slightly as they resonate so as to substantially relieve longitudinal stresses in certain resonator structures.
120 Citations
20 Claims
- 1. Apparatus comprising a plurality of resonator structures including a pair of split masses suspended by suspension flexures, wherein each split mass includes two lobes interconnected with a flexure that allows the lobes to rotate slightly as the masses resonate so as to reduce longitudinal stresses in the suspension flexures.
- 11. Apparatus comprising a plurality of resonator structures including a first pair of masses coupled through a first flexure and a second pair of masses coupled through a second flexure, each mass suspended by a suspension flexure, wherein the first and second flexures allow the masses to rotate slightly as the masses resonate so as to reduce longitudinal stresses in the suspension flexures.
Specification