MEMS-based inertial switch
First Claim
1. A MEMS device, comprising:
- a movable electrode supported on a substrate; and
a stationary electrode attached to the substrate, wherein;
the movable electrode is adapted to move with respect to the substrate in response to an inertial force acting upon the MEMS device such that, when the inertial force reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrodethe movable electrode comprises an annular mass supported by a segmented spring attached between the annular mass and a support structure; and
the annular mass comprises an open grid structure.
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Abstract
In one embodiment, an inertial switch of the invention includes a MEMS device manufactured using a layered wafer. The MEMS device has a movable electrode supported on a substrate layer of the wafer and a stationary electrode attached to that substrate layer. The movable electrode is adapted to move with respect to the substrate layer in response to an inertial force such that, when the inertial force per unit mass reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrode, thereby changing the state of the inertial switch from open to closed. In one embodiment, the MEMS device is a substantially planar device, designed such that, when the inertial force is parallel to the device plane, the displacement amplitude of the movable electrode from an initial position is substantially the same for all force directions. Advantageously, inertial switches of the invention can be designed to have a relatively small size, e.g., less than one millimeter, and be relatively inexpensive. Due to the small size and low cost, several inertial switches of the invention may be incorporated into a corresponding switch circuit, thereby providing protection against mechanical failure and/or malfunction of any individual inertial switch in that circuit.
20 Citations
15 Claims
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1. A MEMS device, comprising:
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a movable electrode supported on a substrate; and a stationary electrode attached to the substrate, wherein; the movable electrode is adapted to move with respect to the substrate in response to an inertial force acting upon the MEMS device such that, when the inertial force reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrode the movable electrode comprises an annular mass supported by a segmented spring attached between the annular mass and a support structure; and the annular mass comprises an open grid structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A MEMS device, comprising:
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a movable mass supported on a substrate; a support structure attached to the substrate; and a segmented spring attached between the movable mass and the support structure, wherein the segmented spring is a substantially planar spring having a substantially isotropic spring constant for deformations within a plane defined by the spring, wherein; the segmented spring comprises three spiral segments, each attached between the movable mass and the support structure; segment ends that are attached to the support structure lie approximately on a first circle and are separated from each other by an angle of about 120 degrees; and segment ends that are attached to the movable mass lie approximately on a second circle and are separated from each other by an angle of about 120 degrees. - View Dependent Claims (11, 12)
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13. A MEMS device, comprising:
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a movable electrode supported on a substrate; and a stationary electrode attached to the substrate, wherein; the movable electrode is adapted to move with respect to the substrate in response to an inertial force acting upon the MEMS device such that, when the inertial force reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrode; the movable electrode comprises an annular mass supported by a segmented spring attached between the annular mass and a support structure; the segmented spring comprises three spiral segments, each attached between the annular mass and the support structure; segment ends that are attached to the support structure lie approximately on a first circle and are separated from each other by an angle of about 120 degrees; and segment ends that are attached to the annular mass lie approximately on a second circle and are separated from each other by an angle of about 120 degrees.
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14. A MEMS device, comprising:
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a movable electrode supported on a substrate; and a stationary electrode attached to the substrate, wherein; the movable electrode is adapted to move with respect to the substrate in response to an inertial force acting upon the MEMS device such that, when the inertial force reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrode; the movable electrode comprises an annular mass supported by a segmented spring attached between the annular mass and a support structure; and each segment spans for about 240 degrees about an axis of the annular mass.
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15. A MEMS device, comprising:
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a movable electrode supported on a substrate; and a stationary electrode attached to the substrate, wherein; the movable electrode is adapted to move with respect to the substrate in response to an inertial force acting upon the MEMS device such that, when the inertial force reaches or exceeds a contact threshold value, the movable electrode is brought into contact with the stationary electrode; the movable electrode comprises an annular mass supported by a segmented spring attached between the annular mass and a support structure; the support structure is located within an opening of the annular mass; and the stationary electrode surrounds the annular mass.
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Specification