Force-detecting device

US 7,219,561 B2
Filed: 04/15/2004
Issued: 05/22/2007
Est. Priority Date: 04/28/2003
Status: Active Grant

First Claim

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1. A force detection device comprising:

a force receiving member (10;

100), receiving forces to be detected;

a supporting member (20;

300), positioned below the force receiving member;

a first force transmitting member (11;

T1), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (215), having flexibility, to said supporting member;

a second force transmitting member (12;

T2), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (225), having flexibility, to said supporting member;

a third force transmitting member (13;

T3), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (235), having flexibility, to said supporting member;

a fourth force transmitting member (14;

T4), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (245), having flexibility, to said supporting member;

a first sensor (21;

S1) having capacitance elements (C11 to C15) each of which comprises a fixed electrode (E11 to E15), fixed to said supporting member, and a displaceable electrode (215), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said first force transmitting member;

a second sensor (22;

S2) having capacitance elements (C21 to C25) each of which comprises a fixed electrode (E21 to E25), fixed to said supporting member, and a displaceable electrode (225), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said second force transmitting member;

a third sensor (23;

S3) having capacitance elements (C31 to C35) each of which comprises a fixed electrode (E31 to E35), fixed to said supporting member, and a displaceable electrode (235), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said third force transmitting member;

a fourth sensor (24;

S4) having capacitance elements (C41 to C45) each of which comprises a fixed electrode (E41 to E45), fixed to said supporting member, and a displaceable electrode (245), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said fourth force transmitting member;

wiring, dividing the respective capacitance elements of said first to fourth sensors into a plurality of groups and connecting the plurality of capacitance elements, belonging to the same group, to each other in parallel; and

a detection circuit (30), detecting a force or a moment, acting on said force receiving member, based on a difference between an overall static capacitance value of a set of capacitance elements belonging to one group and an overall static capacitance value of a set of capacitance elements belonging to another group.

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Abstract

Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, four columnar force transmitting members (11 to 14) are connected. Connecting members, having flexibility, are interposed at the upper and lower ends of each of the columnar force transmitting members (11 to 14) so that the columnar force transmitting members (11 to 14) can become inclined when the force receiving member (10) becomes displaced upon receiving a force. Sensors (21 to 24), each equipped with capacitance elements, are positioned at the connections parts of the respective columnar force transmitting members (11 to 14) and the supporting member (20) to detect forces that are transmitted from the respective columnar force transmitting members (11 to 14) to the supporting member (20). Based on the detection values of the sensors (21 to 24), a detection circuit (30) detects, in a distinguishing manner, forces and moments acting on the force receiving member (10). All of forces Fx, Fy, and Fz and moments Mx, My, and Mz can be detected.

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53 Claims

1. A force detection device comprising:
- a force receiving member (10;
  
  100), receiving forces to be detected;
  
  a supporting member (20;
  
  300), positioned below the force receiving member;
  
  a first force transmitting member (11;
  
  T1), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (215), having flexibility, to said supporting member;
  
  a second force transmitting member (12;
  
  T2), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (225), having flexibility, to said supporting member;
  
  a third force transmitting member (13;
  
  T3), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (235), having flexibility, to said supporting member;
  
  a fourth force transmitting member (14;
  
  T4), having an upper end thereof connected to said force receiving member and a lower end thereof connected via a connecting member (245), having flexibility, to said supporting member;
  
  a first sensor (21;
  
  S1) having capacitance elements (C11 to C15) each of which comprises a fixed electrode (E11 to E15), fixed to said supporting member, and a displaceable electrode (215), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said first force transmitting member;
  
  a second sensor (22;
  
  S2) having capacitance elements (C21 to C25) each of which comprises a fixed electrode (E21 to E25), fixed to said supporting member, and a displaceable electrode (225), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said second force transmitting member;
  
  a third sensor (23;
  
  S3) having capacitance elements (C31 to C35) each of which comprises a fixed electrode (E31 to E35), fixed to said supporting member, and a displaceable electrode (235), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said third force transmitting member;
  
  a fourth sensor (24;
  
  S4) having capacitance elements (C41 to C45) each of which comprises a fixed electrode (E41 to E45), fixed to said supporting member, and a displaceable electrode (245), fixed to a displaceable surface that becomes displaced in accordance to a displacement of a lower part of said fourth force transmitting member;
  
  wiring, dividing the respective capacitance elements of said first to fourth sensors into a plurality of groups and connecting the plurality of capacitance elements, belonging to the same group, to each other in parallel; and
  
  a detection circuit (30), detecting a force or a moment, acting on said force receiving member, based on a difference between an overall static capacitance value of a set of capacitance elements belonging to one group and an overall static capacitance value of a set of capacitance elements belonging to another group.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53)
- - 2. The force detection device according to claim 1, whereinwhen an XYZ three-dimensional coordinate system with an X-axis, a Y-axis and a Z-axis is defined,each of the first to fourth force transmitting members (T1 to T4) is comprised of a structure having the Z-axis direction as a longitudinal direction,a surface on which the fixed electrodes are formed is a surface parallel to an XY plane,the first sensor (S1) has an “
    - X-axis inclination detection capacitance element, belonging to a first group and being positioned at a position at which an electrode interval narrows when the first force transmitting member (T1) becomes inclined in a positive X-axis direction”
      
      (C11), and an “
      
      X-axis inclination detection capacitance element, belonging to a second group and being positioned at a position at which an electrode interval widens when the first force transmitting member (T1) becomes inclined in the positive X-axis direction”
      
      (C12),the second sensor (S2) has an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows when the second force transmitting member (T2) becomes inclined in the positive X-axis direction”
      
      (C21), and an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens when the second force transmitting member (T2) becomes inclined in the positive X-axis direction”
      
      (C22),the third sensor (S3) has an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows when the third force transmitting member (T3) becomes inclined in the positive X-axis direction”
      
      (C31), and an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens when the third force transmitting member (T3) becomes inclined in the positive X-axis direction”
      
      (C32),the fourth sensor (S4) has an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows when the fourth force transmitting member (T4) becomes inclined in the positive X-axis direction”
      
      (C41), and an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens when the fourth force transmitting member (T4) becomes inclined in the positive X-axis direction”
      
      (C42), andthe detection circuit (30) has a function of detecting a force Fx in the X-axis direction, which acts on the force receiving member, by a difference between an overall static capacitance value of a set of X-axis inclination detection capacitance elements belonging to the first group and an overall static capacitance value of a set of X-axis inclination detection capacitance elements belonging to the second group.
  - 3. The force detection device according to claim 2, whereinthe first sensor (S1) furthermore has a “
    - Y-axis inclination detection capacitance element, belonging to a third group and being positioned at a position at which an electrode interval narrows when the first force transmitting member (T1) becomes inclined in a positive Y-axis direction”
      
      (C13), and a “
      
      Y-axis inclination detection capacitance element, belonging to a fourth group and being positioned at a position at which an electrode interval widens when the first force transmitting member (T1) becomes inclined in the positive Y-axis direction”
      
      (C14),the second sensor (S2) furthermore has a “
      
      Y-axis inclination detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval narrows when the second force transmitting member (T2) becomes inclined in the positive Y-axis direction”
      
      (C23), and a “
      
      Y-axis inclination detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval widens when the second force transmitting member (T2) becomes inclined in the positive Y-axis direction”
      
      (C24),the third sensor (S3) furthermore has a “
      
      Y-axis inclination detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval narrows when the third force transmitting member (T3) becomes inclined in the positive Y-axis direction”
      
      (C33), and a “
      
      Y-axis inclination detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval widens when the third force transmitting member (T3) becomes inclined in the positive Y-axis direction”
      
      (C34),the fourth sensor (S4) furthermore has a “
      
      Y-axis inclination detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval narrows when the fourth force transmitting member (T4) becomes inclined in the positive Y-axis direction”
      
      (C43), and a “
      
      Y-axis inclination detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval widens when the fourth force transmitting member (T4) becomes inclined in the positive Y-axis direction”
      
      (C44), andthe detection circuit (30) has a function of detecting a force Fy in the Y-axis direction, which acts on the force receiving member, by a difference between an overall static capacitance value of a set of Y-axis inclination detection capacitance elements belonging to the third group and an overall static capacitance value of a set of Y-axis inclination detection capacitance elements belonging to the fourth group.
  - 4. The force detection device according to claim 2, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the first force transmitting member (T1) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C 15),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the second force transmitting member (T2) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the third force transmitting member (T3) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the fourth force transmitting member (T4) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45),the Z-axis displacement detection capacitance elements of said first to fourth sensors are connected to each other in parallel by a wiring, andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by an overall static capacitance value of a set of capacitance elements that are connected in parallel.
  - 5. The force detection device according to claim 1, whereinwhen an XYZ three-dimensional coordinate system with an X-axis, a Y-axis and a Z-axis is defined,each of the first to fourth force transmitting members (T1 to T4) is comprised of a structure having the Z-axis direction as a longitudinal direction,a surface on which the fixed electrodes are formed is a surface parallel to an XY plane,the first sensor (S1) has a “
    - Z-axis displacement detection capacitance element, belonging to a first group and being positioned at a position at which an electrode interval widens in an overall manner when the first force transmitting member (T1) becomes displaced in a positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15) and a “
      
      Z-axis displacement detection capacitance element, belonging to a second group and being positioned at a position at which an electrode interval narrows in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C16),the second sensor (S2) has a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25) and a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C26),the third sensor (S3) has a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35) and a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C36),the fourth sensor (S4) has a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45) and a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C46), andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the first group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the second group.
  - 6. The force detection device according to claim 1, whereinwhen an XYZ three-dimensional coordinate system with an X-axis, a Y-axis and a Z-axis is defined,each of the first to fourth force transmitting members (T1 to T4) is comprised of a structure having the Z-axis direction as a longitudinal direction,a surface on which the fixed electrodes are formed is a surface parallel to an XY plane,the first force transmitting member (T1) is positioned so that a longitudinal direction axis thereof is in the first quadrant of the XY plane, the second force transmitting member (T2) is positioned so that a longitudinal direction axis thereof is in the second quadrant of the XY plane, the third force transmitting member (T3) is positioned so that a longitudinal direction axis thereof is in the third quadrant of the XY plane, and the fourth force transmitting member (T4) is positioned so that a longitudinal direction axis thereof is in the fourth quadrant of the XY plane.
  - 7. The force detection device according to claim 6, whereinthe first sensor (S1) has a “
    - Z-axis displacement detection capacitance element, belonging to a first group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the first force transmitting member (T1) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15),the second sensor (S2) has a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the second force transmitting member (T2) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25),the third sensor (S3) has a “
      
      Z-axis displacement detection capacitance element, belonging to a second group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the third force transmitting member (T3) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35),the fourth sensor (S4) has a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the fourth force transmitting member (T4) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45), andthe detection circuit (30) has a function of detecting a moment Mx about the X-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the first group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the second group.
  - 8. The force detection device according to claim 7, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, belonging to a third group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the first force transmitting member (T1) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to a fourth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the second force transmitting member (T2) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the third force transmitting member (T3) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the fourth force transmitting member (T4) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45), andthe detection circuit (30) has a function of detecting a moment My about the Y-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the third group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fourth group.
  - 9. The force detection device according to claim 7, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, belonging to a fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the first force transmitting member (T1) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the second force transmitting member (T2) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the third force transmitting member (T3) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the fourth force transmitting member (T4) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45), andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fifth group.
  - 10. The force detection device according to claim 6, whereinthe first sensor (S1) has a “
    - Z-axis displacement detection capacitance element, belonging to a first group and being positioned at a position at which an electrode interval widens in an overall manner when the first force transmitting member (T1) becomes displaced in a positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15) and a “
      
      Z-axis displacement detection capacitance element, belonging to a second group and being positioned at a position at which an electrode interval narrows in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C16),the second sensor (S2) has a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25) and a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C26),the third sensor (S3) has a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35) and a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C36),the fourth sensor (S4) has a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45) and a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C46), andthe detection circuit (30) has a function of detecting a moment Mx about the X-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the first group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the second group.
  - 11. The force detection device according to claim 10, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, belonging to a third group and being positioned at a position at which an electrode interval widens in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15) and a “
      
      Z-axis displacement detection capacitance element, belonging to a fourth group and being positioned at a position at which an electrode interval narrows in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C16),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval widens in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25) and a “
      
      Z-axis displacement detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval narrows in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C26),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval widens in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35) and a “
      
      Z-axis displacement detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval narrows in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C36),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval widens in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45) and a “
      
      Z-axis displacement detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval narrows in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C46), andthe detection circuit (30) has a function of detecting a moment My about the Y-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the third group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fourth group.
  - 12. The force detection device according to claim 10, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, belonging to a fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15) and a “
      
      Z-axis displacement detection capacitance element, belonging to a sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C16),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C26),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C36),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C46), andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fifth group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the sixth group.
  - 13. The force detection device according to claim 6, whereinthe first sensor (S1) has an “
    - X-axis inclination detection capacitance element, belonging to a first group and being positioned at a position at which an electrode interval narrows when the first force transmitting member (T1) becomes inclined in a positive X-axis direction”
      
      (C11), an “
      
      X-axis inclination detection capacitance element, belonging to a second group and being positioned at a position at which an electrode interval widens when the first force transmitting member (T1) becomes inclined in the positive X-axis direction”
      
      (C12), a “
      
      Y-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows when the first force transmitting member (T1) becomes inclined in a positive Y-axis direction”
      
      (C13), and a “
      
      Y-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens when the first force transmitting member (T1) becomes inclined in the positive Y-axis direction”
      
      (C14),the second sensor (S2) has an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows when the second force transmitting member (T2) becomes inclined in the positive X-axis direction”
      
      (C21), an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens when the second force transmitting member (T2) becomes inclined in the positive X-axis direction”
      
      (C22), a “
      
      Y-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows when the second force transmitting member (T2) becomes inclined in the positive Y-axis direction”
      
      (C23), and a “
      
      Y-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens when the second force transmitting member (T2) becomes inclined in the positive Y-axis direction”
      
      (C24),the third sensor (S3) has an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows when the third force transmitting member (T3) becomes inclined in the positive X-axis direction”
      
      (C31), an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens when the third force transmitting member (T3) becomes inclined in the positive X-axis direction”
      
      (C32), a “
      
      Y-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows when the third force transmitting member (T3) becomes inclined in the positive Y-axis direction”
      
      (C33), and a “
      
      Y-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens when the third force transmitting member (T3) becomes inclined in the positive Y-axis direction”
      
      (C34),the fourth sensor (S4) has an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows when the fourth force transmitting member (T4) becomes inclined in the positive X-axis direction”
      
      (C41), an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens when the fourth force transmitting member (T4) becomes inclined in the positive X-axis direction”
      
      (C42), a “
      
      Y-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows when the fourth force transmitting member (T4) becomes inclined in the positive Y-axis direction”
      
      (C43), and a “
      
      Y-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens when the fourth force transmitting member (T4) becomes inclined in the positive Y-axis direction”
      
      (C44), andthe detection circuit (30) has a function of detecting a moment Mz about the Z-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of capacitance elements belonging to the first group and an overall static capacitance value of a set of capacitance elements belonging to the second group.
  - 14. The force detection device according to claim 13, whereinthe X-axis inclination detection capacitance element, belonging to the first group that forms the first sensor, and the Y-axis inclination detection capacitance element, belonging to the first group that forms the first sensor, are comprised as a physically single capacitance element (E11/14, 215), the X-axis inclination detection capacitance element, belonging to the second group that forms the first sensor, and the Y-axis inclination detection capacitance element, belonging to the second group that forms the first sensor, are comprised as a physically single capacitance element (E12/13, 215),the X-axis inclination detection capacitance element, belonging to the first group that forms the second sensor, and the Y-axis inclination detection capacitance element, belonging to the first group that forms the second sensor, are comprised as a physically single capacitance element (E21/23, 225), the X-axis inclination detection capacitance element, belonging to the second group that forms the second sensor, and the Y-axis inclination detection capacitance element, belonging to the second group that forms the second sensor, are comprised as a physically single capacitance element (E22/24, 225),the X-axis inclination detection capacitance element, belonging to the first group that forms the third sensor, and the Y-axis inclination detection capacitance element, belonging to the first group that forms the third sensor, are comprised as a physically single capacitance element (E31/34, 235), the X-axis inclination detection capacitance element, belonging to the second group that forms the third sensor, and the Y-axis inclination detection capacitance element, belonging to the second group that forms the third sensor, are comprised as a physically single capacitance element (E32/33, 235), andthe X-axis inclination detection capacitance element, belonging to the first group that forms the fourth sensor, and the Y-axis inclination detection capacitance element, belonging to the first group that forms the fourth sensor, are comprised as a physically single capacitance element (E41/43, 245), the X-axis inclination detection capacitance element, belonging to the second group that forms the fourth sensor, and the Y-axis inclination detection capacitance element, belonging to the second group that forms the fourth sensor, are comprised as a physically single capacitance element (E42/44, 245).
  - 15. The force detection device according to claim 1, whereinwhen an XYZ three-dimensional coordinate system with an X-axis, a Y-axis and a Z-axis is defined,each of the first to fourth force transmitting members (T1 to T4) is comprised of a structure having the Z-axis direction as a longitudinal direction,a surface on which the fixed electrodes are formed is a surface parallel to an XY plane,the first force transmitting member (T1) is positioned at a position at which a longitudinal direction axis thereof intersects a positive part of the X-axis, the second force transmitting member (T2) is positioned at a position at which a longitudinal direction axis thereof intersects a negative part of the X-axis, the third force transmitting member (T3) is positioned at a position at which a longitudinal direction axis thereof intersects a positive part of the Y-axis, and the fourth force transmitting member (T4) is positioned at a position at which a longitudinal direction axis thereof intersects a negative part of the Y-axis.
  - 16. The force detection device according to claim 15, whereinthe first sensor (S1) has a “
    - Z-axis displacement detection capacitance element, belonging to a first group and being positioned at a position at which an electrode interval widens in an overall manner when the first force transmitting member (T1) becomes displaced in a positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15) and a “
      
      Z-axis displacement detection capacitance element, belonging to a second group and being positioned at a position at which an electrode interval narrows in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C16),the second sensor (S2) has a “
      
      Z-axis displacement detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25) and a “
      
      Z-axis displacement detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C26),the third sensor (S3) has a “
      
      Z-axis displacement detection capacitance element, belonging to a third group and being positioned at a position at which an electrode interval widens in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35) and a “
      
      Z-axis displacement detection capacitance element, belonging to a fourth group and being positioned at a position at which an electrode interval narrows in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C36),the fourth sensor (S4) has a “
      
      Z-axis displacement detection capacitance element, belonging to the fourth group and being positioned at a position at which an electrode interval widens in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45) and a “
      
      Z-axis displacement detection capacitance element, belonging to the third group and being positioned at a position at which an electrode interval narrows in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C46), andthe detection circuit (30) has a function of detecting a moment My about the Y-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the first group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the second group and a function of detecting a moment Mx about the X-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the third group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fourth group.
  - 17. The force detection device according to claim 16, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, belonging to a fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15) and a “
      
      Z-axis displacement detection capacitance element, belonging to a sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C16),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C26),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the third force transmitting member becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member becomes inclined”
      
      (C36),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C46), andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fifth group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the sixth group.
  - 18. The force detection device according to claim 15, whereinthe first sensor (S1) has a “
    - Y-axis inclination detection capacitance element, belonging to a first group and being positioned at a position at which an electrode interval narrows when the first force transmitting member (T1) becomes inclined in a positive Y-axis direction”
      
      (C13), and a “
      
      Y-axis inclination detection capacitance element, belonging to a second group and being positioned at a position at which an electrode interval widens when the first force transmitting member (T1) becomes inclined in the positive Y-axis direction”
      
      (C14),the second sensor (S2) has a “
      
      Y-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows when the second force transmitting member (T2) becomes inclined in the positive Y-axis direction”
      
      (C23), and a “
      
      Y-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens when the second force transmitting member (T2) becomes inclined in the positive Y-axis direction”
      
      (C24),the third sensor (S3) has an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval narrows when the third force transmitting member (T3) becomes inclined in a positive X-axis direction”
      
      (C31), and an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval widens when the third force transmitting member (T3) becomes inclined in the positive X-axis direction”
      
      (C32),the fourth sensor (S4) has an “
      
      X-axis inclination detection capacitance element, belonging to the first group and being positioned at a position at which an electrode interval narrows when the fourth force transmitting member (T4) becomes inclined in the positive X-axis direction”
      
      (C41), and an “
      
      X-axis inclination detection capacitance element, belonging to the second group and being positioned at a position at which an electrode interval widens when the fourth force transmitting member (T4) becomes inclined in the positive X-axis direction”
      
      (C42), andthe detection circuit (30) has a function of detecting a moment Mz about the Z-axis that acts on the force receiving member by a difference between an overall static capacitance value of a set of capacitance elements belonging to the first group and an overall static capacitance value of a set of capacitance elements belonging to the second group.
  - 19. The force detection device according to claim 2, whereinwith an xy two-dimensional coordinate system, having an origin along a longitudinal direction axis of a specific force transmitting member, having an x-axis parallel to the X-axis, and having a y-axis parallel to Y-axis, being defined, the X-axis inclination detection capacitance element for said force transmitting member is comprised of a pair of capacitance elements having electrodes (E1, E2), positioned respectively at a positive part and a negative part of the x-axis.
  - 20. The force detection device according to claim 3, whereinwith an xy two-dimensional coordinate system, having an origin along a longitudinal direction axis of a specific force transmitting member, having an x-axis parallel to the X-axis, and having a y-axis parallel to Y-axis, being defined, the Y-axis inclination detection capacitance element for said force transmitting member is comprised of a pair of capacitance elements having electrodes (E3, E4), positioned respectively at a positive part and a negative part of the y-axis.
  - 21. The force detection device according to claim 4, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 22. The force detection device according to claim 21, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 23. The force detection device according to claim 1, whereinthe upper ends of the respective force transmitting members (T1 to T4) are connected to the force receiving member (100) via connecting members (115, 125, 135 and 145) that have flexibility.
  - 24. The force detection device according to claim 23, whereinthe force receiving member (100) is comprised of a plate-like member, the respective force transmitting members (T1 to T4) are comprised of columnar members, and the connecting members (115, 125, 135 and 145), connecting the force receiving member with the respective force transmitting members, are comprised of thin parts of the plate-like force receiving member.
  - 25. The force detection device according to claim 1, whereinthe respective force transmitting members (T1 to T4) are comprised of columnar members, lower surfaces of said force transmitting members are joined to centers of diaphragms (215, 225, 235 and 245) that function as connecting members, and by fixing circumferences of said diaphragms to the supporting member (300), the force transmitting members are connected to the supporting member.
  - 26. The force detection device according to claim 25, whereindiaphragms (215, 225, 235, and 245), having flexibility and conductivity, are used as the connecting members, the lower surfaces of the force transmitting members (T1 to T4) are joined to the centers of the diaphragms, and by fixing the circumferences of said diaphragms to the supporting member (300), the force transmitting members are connected to the supporting member and said diaphragms themselves are used as displaceable electrodes.
  - 27. The force detection device according to claim 25, whereinat least a part of the plurality of fixed electrodes (E11 to E45) are formed on a top surface of the supporting member (300) so that at least a part of the capacitance elements are formed below the diaphragms (215, 225, 235 and 245).
  - 28. The force detection device according to claim 25, whereinan auxiliary base plate (400), having openings (H1 to H4) for passing through the force transmitting members (T1 to T4), is fixed to the supporting member (300) so as to be positioned above the diaphragms (215, 225, 235 and 245), and at least a part of the plurality of fixed electrodes (E11 to E45) are formed on a bottom surface of said auxiliary base plate so that at least a part of the capacitance elements are formed above the diaphragms.
  - 29. The force detection device according to claim 3, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the first force transmitting member (T1) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the second force transmitting member (T2) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the third force transmitting member (T3) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the fourth force transmitting member (T4) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45),the Z-axis displacement detection capacitance elements of said first to fourth sensors are connected to each other in parallel by a wiring, andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by an overall static capacitance value of a set of capacitance elements that are connected in parallel.
  - 30. The force detection device according to claim 8, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, belonging to a fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the first force transmitting member (T1) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the second force transmitting member (T2) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the third force transmitting member (T3) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval undergoes a change of either narrowing or widening in an overall manner when the fourth force transmitting member (T4) becomes displaced in the Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45), andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fifth group.
  - 31. The force detection device according to claim 11, whereinthe first sensor (S1) furthermore has a “
    - Z-axis displacement detection capacitance element, belonging to a fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C15) and a “
      
      Z-axis displacement detection capacitance element, belonging to a sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the first force transmitting member (T1) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the first force transmitting member (T1) becomes inclined”
      
      (C16),the second sensor (S2) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C25) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the second force transmitting member (T2) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the second force transmitting member (T2) becomes inclined”
      
      (C26),the third sensor (S3) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C35) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the third force transmitting member (T3) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the third force transmitting member (T3) becomes inclined”
      
      (C36),the fourth sensor (S4) furthermore has a “
      
      Z-axis displacement detection capacitance element, belonging to the fifth group and being positioned at a position at which an electrode interval widens in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C45) and a “
      
      Z-axis displacement detection capacitance element, belonging to the sixth group and being positioned at a position at which an electrode interval narrows in an overall manner when the fourth force transmitting member (T4) becomes displaced in the positive Z-axis direction and at which a change such that the electrode interval narrows at one part but widens at another part occurs when the fourth force transmitting member (T4) becomes inclined”
      
      (C46), andthe detection circuit (30) has a function of detecting a force Fz in the Z-axis direction, which acts on the force receiving member, by a difference between an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the fifth group and an overall static capacitance value of a set of Z-axis displacement detection capacitance elements belonging to the sixth group.
  - 32. The force detection device according to claims 13, whereinwith an xy two-dimensional coordinate system, having an origin along a longitudinal direction axis of a specific force transmitting member, having an x-axis parallel to the X-axis, and having a y-axis parallel to Y-axis, being defined, the X-axis inclination detection capacitance element for said force transmitting member is comprised of a pair of capacitance elements having electrodes (E1, E2), positioned respectively at a positive part and a negative part of the x-axis.
  - 33. The force detection device according to claims 18, whereinwith an xy two-dimensional coordinate system, having an origin along a longitudinal direction axis of a specific force transmitting member, having an x-axis parallel to the X-axis, and having a y-axis parallel to Y-axis, being defined, the X-axis inclination detection capacitance element for said force transmitting member is comprised of a pair of capacitance elements having electrodes (E1, E2), positioned respectively at a positive part and a negative part of the x-axis.
  - 34. The force detection device according to claim 13, whereinwith an xy two-dimensional coordinate system, having an origin along a longitudinal direction axis of a specific force transmitting member, having an x-axis parallel to the X-axis, and having a y-axis parallel to Y-axis, being defined, the Y-axis inclination detection capacitance element for said force transmitting member is comprised of a pair of capacitance elements having electrodes (E3, E4), positioned respectively at a positive part and a negative part of the y-axis.
  - 35. The force detection device according to claim 18, whereinwith an xy two-dimensional coordinate system, having an origin along a longitudinal direction axis of a specific force transmitting member, having an x-axis parallel to the X-axis, and having a y-axis parallel to Y-axis, being defined, the Y-axis inclination detection capacitance element for said force transmitting member is comprised of a pair of capacitance elements having electrodes (E3, E4), positioned respectively at a positive part and a negative part of the y-axis.
  - 36. The force detection device according to claim 29, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 37. The force detection device according to claim 5, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 38. The force detection device according to claim 7, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 39. The force detection device according to claim 12, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 40. The force detection device according to claim 31, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 41. The force detection device according to claim 16, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 42. The force detection device according to claim 17, whereinthe Z-axis displacement detection capacitance element for a specific force transmitting member is comprised of a capacitance element having a circular or annular electrode (E5) centered about a longitudinal direction axis of said force transmitting member.
  - 43. The force detection device according to claim 36, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 44. The force detection device according to claim 37, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 45. The force detection device according to claim 38, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 46. The force detection device according to claim 39, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 47. The force detection device according to claim 40, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 48. The force detection device according to claim 41, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 49. The force detection device according to claim 42, whereina plurality of Z-axis displacement capacitance elements are formed of a plurality of circular or annular electrodes (E15 to E45) that are positioned concentrically on the same plane.
  - 50. The force detection device according to claim 26, whereinat least a part of the plurality of fixed electrodes (E11 to E45) are formed on a top surface of the supporting member (300) so that at least a part of the capacitance elements are formed below the diaphragms (215, 225, 235 and 245).
  - 51. The force detection device according to claim 26, whereinan auxiliary base plate (400), having openings (H1 to H4) for passing through the force transmitting members (T1 to T4), is fixed to the supporting member (300) so as to be positioned above the diaphragms (215, 225, 235 and 245), and at least a part of the plurality of fixed electrodes (E11 to E45) are formed on a bottom surface of said auxiliary base plate so that at least a part of the capacitance elements are formed above the diaphragms.
  - 52. The force detection device according to claim 27, whereinan auxiliary base plate (400), having openings (H1 to H4) for passing through the force transmitting members (T1 to T4), is fixed to the supporting member (300) so as to be positioned above the diaphragms (215, 225, 235 and 245), and at least a part of the plurality of fixed electrodes (E11 to E45) are formed on a bottom surface of said auxiliary base plate so that at least a part of the capacitance elements are formed above the diaphragms.
  - 53. The force detection device according to claim 50, whereinan auxiliary base plate (400), having openings (H1 to H4) for passing through the force transmitting members (T1 to T4), is fixed to the supporting member (300) so as to be positioned above the diaphragms (215, 225, 235 and 245), and at least a part of the plurality of fixed electrodes (E11 to E45) are formed on a bottom surface of said auxiliary base plate so that at least a part of the capacitance elements are formed above the diaphragms.

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Litigation Campaign Assessment

Current Assignee
WACOH-TECH Inc.
Original Assignee
Wacoh Company
Inventors
Okada, Kazuhiro
Primary Examiner(s)
Cygan; Michael
Assistant Examiner(s)
DAVIS, OCTAVIA L

Application Number

US10/547,459
Publication Number

US 20060169060A1
Time in Patent Office

1,132 Days
Field of Search

738/620.41, 738/620.43, 738/620.44, 738/620.45
US Class Current

73/862.043
CPC Class Codes

G01L 5/165 using variations in capacit...

Force-detecting device

First Claim

2 Assignments

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Accused Products

Abstract

166 Citations

53 Claims

Specification

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Force-detecting device

First Claim

2 Assignments

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Subscription Required

0 Petitions

Subscription Required

Accused Products

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Abstract

166 Citations

53 Claims

Specification

Subscription Required

Solutions

Use Cases

Quick Links