Liquid crystal display device and fabricating method thereof

• US 7,220,612 B2
• Filed: 06/29/2005
• Issued: 05/22/2007
• Est. Priority Date: 12/24/2004
• Status: Active Grant

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Philips LCD Company Limited (LG Display Co., Ltd.)
• Inventors: Ahn, Byung Chul, Lim, Joo Soo, Park, Byung Ho
• Primary Examiner(s): FOURSON III, GEORGE R
• Application Number:
  US11/168,313
• Publication Number:
  US 20060138417A1
• Time in Patent Office: 692 Days
• Field of Search: 438/30, 438/38, 438/951, 438/FOR.455, 257/E21.411, 257/E21.025, 257/E21.038, 257/E21.235
• US Class Current: 438/30
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/41733 for thin film transistors with insulated gate
• CPC Class Codes: H01L 29/458 for thin film silicon, e.g. source or drain electrode
• CPC Class Codes: H01L 29/4908 for thin film semiconductor, e.g. gate of TFT
• CPC Class Codes: Y10S 438/951 Lift-off

Abstract

A thin film transistor substrate and a fabricating method thereof for simplifying a process are disclosed. In a liquid crystal display device according to the present invention, a gate line is provided on a substrate. A data line crosses the gate line with having a gate insulating film therebetween to define a pixel area. A thin film transistor includes a gate electrode connected to the gate line, a source electrode connected to the data line, a drain electrode opposed to the source electrode and a semiconductor layer for defining a channel between the source electrode and the drain electrode. A pixel electrode is connected to the drain electrode and is provided at said pixel area. Herein, said data line, said source electrode and said drain electrode have a double-layer structure in which a source/drain metal pattern and a transparent conductive pattern are built. Said pixel electrode is formed by an extension of the transparent conductive pattern of the drain electrode. A protective film makes a border with the transparent conductive pattern and provided at the remaining area thereof.

Claims

1. A method of fabricating a liquid crystal display device, comprising:

a first mask process of forming a gate line and a gate electrode connected to the gate line on a substrate;

a second mask process of forming a gate insulating film covering the gate line and the gate electrode and a semiconductor pattern and a source/drain metal pattern built thereon; and

a third mask process of forming a transparent conductive pattern on a gate insulating film provided with the source/drain metal pattern and forming a protective film making an interface with the transparent conductive pattern,

whereby a data line crossing the gate line to define a pixel area, a source electrode connected to the data line and a drain electrode opposed to the source electrode are provided in a double-layer structure in which the source/drain metal pattern and the transparent conductive pattern are built; and

a pixel electrode extended from the transparent conductive pattern of the drain electrode is provided at said pixel area.

2. The method as claimed in claim 1, wherein said first mask process includes the step of forming a lower pad electrode to be connected to any one of the gate line and the data line;

said second mask process includes the steps of forming a contact hole passing through the gate insulating film to expose the lower pad electrode; and

said third mask process includes the step of forming an upper pad electrode to be connected, via said contact hole, to the lower pad electrode from the transparent conductive pattern.

3. The method as claimed in claim 2, wherein said first mask process includes the step of forming a data link extended from the lower pad electrode to be connected to the data line;

said second mask process includes the step of forming a second contact hole for exposing the data link; and

said third mask process includes the step of forming a contact electrode extended from the transparent conductive pattern of the data line to be connected, via said second contact hole, to the data link.

4. The method as claimed in claim 2, wherein the contact electrode is integral to the upper pad electrode included in the data pad.

5. The method as claimed in claim 2, wherein the upper pad electrode and the contact electrode make an interface with the protective film.

6. The method as claimed in claim 2, wherein the gate line, the gate electrode, the lower pad electrode and the data link have a multiple-layer structure in which at least two metal layers are built on the substrate.

7. The method as claimed in claim 1, wherein the transparent conductive pattern is provided in such a manner to capture the source/drain metal pattern.

8. The method as claimed in claim 3, wherein said second mask process includes the steps of:

sequentially forming a gate insulating film covering the first mask pattern group, an amorphous silicon layer, an amorphous silicon layer doped with an impurity and a source/drain metal layer;

forming photo-resist patterns having a different thickness by a photolithography using a half tone mask or a diffractive exposure mask; and

forming first and second contact holes passing through an area extended from the source/drain metal layer until the gate insulating film, and the source/drain metal pattern and the semiconductor pattern by an etching process using the photo-resist pattern.

9. The method as claimed in claim 1, wherein said third mask process includes the steps of:

forming a transparent conductive layer on the gate insulating film provided with the source/drain metal pattern;

forming a photo-resist pattern by the photolithography;

forming the transparent conductive pattern by an etching process using the photo-resist pattern;

removing the source/drain metal pattern exposed through the transparent conductive pattern and an ohmic contact layer included in the semiconductor pattern under it;

entirely forming a protective film covering the photo-resist pattern; and

removing the photo-resist pattern provided with the protective film.

10. The method as claimed in claim 9, wherein the protective film is formed by the sputtering.

11. The method as claimed in claim 9, wherein the transparent conductive pattern is over-etched in comparison with the photo-resist pattern.

12. The method as claimed in claim 1, further comprising the step of:

allowing the pixel electrode to overlap with the gate line with having the gate insulating film therebetween, thereby providing a storage capacitor.