Guarded tub enclosure

• US 7,221,146 B2
• Filed: 01/14/2005
• Issued: 05/22/2007
• Est. Priority Date: 12/13/2002
• Status: Expired due to Fees

• Current Assignee: FormFactor Beaverton, Inc. (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Dunklee, John, Norgden, Greg, Cowan, C. Eugene
• Primary Examiner(s): Nguyen; Ha Tran
• Assistant Examiner(s): Nguyen; Tung X.
• Application Number:
  US11/035,543
• Publication Number:
  US 20050122125A1
• Time in Patent Office: 858 Days
• Field of Search: 324/158.1, 324/760, 324/765, 324/754, 324/761, 324/755
• US Class Current: 324/754.01
• CPC Class Codes: G01R 1/18 Screening arrangements against electric or magnetic fields, e.g. against earth's field
• CPC Class Codes: G01R 31/2862 Chambers or ovens; Tanks
• CPC Class Codes: G01R 31/2865 Holding devices, e.g. chucks; Handlers or transport devices having contacts G01R31/2863
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06

Abstract

A probe station with an improved guarding structure.

Claims

1. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a support having substantially planar a surface suitable for supporting said device under test thereon;

(c) a conductive member vertically spaced above at least 50 percent of said surface area of said support; and

(d) said surface maintaining a fixed relationship with respect to at least a portion of said conductive member when said surface is moved laterally with respect to said platen.

2. The probe station of claim 1 wherein said conductive member is vertically spaced above at least 60 percent of said surface area of said support.

3. The probe station of claim 1 wherein said conductive member is vertically spaced above at least 70 percent of said surface area of said support.

4. The probe station of claim 1 where said conductive member defines a central aperture.

5. The probe station of claim 1 where said conductive member comprises a plurality of slidably overlapping plates.

6. The probe station of claim 1 wherein said conductive member is supported by said platen.

7. The probe station of claim 1 further comprising an enclosure defining an opening at least partially surrounding said support.

8. The probe station of claim 7 wherein said conductive member encompasses at least 70 percent of said opening.

9. The probe station of claim 7 wherein said conductive member encompasses at least 80 percent of said opening.

10. The probe station of claim 7 wherein said conductive member encompasses at least 90 percent of said opening.

11. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a support having a substantially planar surface suitable for supporting said device under test thereon;

(c) an enclosure at least partially surrounding said support defining an opening;

(d) a conductive member that encompasses at least 70 percent of said opening; and

(e) said conductive member being supported by said platen such that at least a portion of said conductive member moves horizontally with respect to said platen when said surface is moved horizontally with respect to said platen.

12. The probe station of claim 11 wherein said conductive member encompasses at least 80 percent of said opening.

13. The probe station of claim 11 wherein said conductive member encompasses at least 90 percent of said opening.

14. The probe station of claim 11 wherein said conductive member is vertically spaced above at least 50 percent of said surface area of said support.

15. The probe station of claim 11 wherein said support maintains a fixed relationship with respect to said conductive member when said support is moved laterally with respect to said platen.

16. The probe station of claim 11 wherein said conductive member is vertically spaced above at least 60 percent of said surface area of said support.

17. The probe station of claim 16 wherein said conductive member is vertically spaced above at least 70 percent of said surface area of said support.

18. The probe station of claim 11 where said conductive member defines an aperture.

19. The probe station of claim 11 where said conductive member comprises a plurality of slidably overlapping plates.

20. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a chuck suitable for supporting said device under test thereon;

(c) an enclosure at least partially surrounding said chuck, wherein said enclosure defines an opening;

(d) a conductive member supported by said platen that encompasses at least 70 percent of said opening;

(e) the combination of said conductive member and said chuck laterally movable with respect to said platen while at least a portion of said conductive member and said chuck maintain a fixed relationship with respect to one another; and

(f) said conductive member defining an opening therein through which said probe extends to test said device under test.

21. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a support having a substantially planar surface suitable for supporting said device under test thereon;

(c) a conductive member vertically spaced above at least 50 percent of said surface;

(d) said surface maintaining a fixed relationship with respect to at least a portion of said conductive member when said surface is moved laterally with respect to said platen; and

(e) said conductive member comprises a plurality of slidably overlapping plates.

22. A probe station comprising:

(a) a platen suitable for supporting a probe for testing a device under test;

(b) a support having a substantially planar surface suitable for supporting said device under test thereon;

(c) an enclosure at least partially surrounding said surface and defining an opening;

(d) a conductive member that encompasses at least 70 percent of said opening;

(e) said conductive member being supported by said platen; and

(f) said conductive member comprises a plurality of slidably overlapping plates.