Frequency and/or phase compensated microelectromechanical oscillator
First Claim
1. A microelectromechanical oscillator, comprising:
- a microelectromechanical resonator to generate an output signal wherein the output signal includes a first frequency;
frequency adjustment means for generating an output signal having a second frequency using the output signal of the microelectromechanical resonator and a set of values, wherein;
(i) the frequency adjustment means includes first frequency multiplier means, and (ii) the second frequency is greater than the first frequency; and
wherein the microelectromechanical resonator and the frequency adjustment means are integrated in or on a common substrate.
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Abstract
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a compensated microelectromechanical oscillator, having a microelectromechanical resonator that generates an output signal and frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the microelectromechanical resonator and, in response to a set of values, to generate an output signal having second frequency. In one embodiment, the values may be determined using the frequency of the output signal of the microelectromechanical resonator, which depends on the operating temperature of the microelectromechanical resonator and/or manufacturing variations of the microelectromechanical resonator. In one embodiment, the frequency adjustment circuitry may include frequency multiplier circuitry, for example, PLLs, DLLs, digital/frequency synthesizers and/or FLLs, as well as any combinations and permutations thereof. The frequency adjustment circuitry, in addition or in lieu thereof, may include frequency divider circuitry, for example, DLLs, digital/frequency synthesizers (for example, DDS) and/or FLLs, as well as any combinations and permutations thereof.
129 Citations
49 Claims
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1. A microelectromechanical oscillator, comprising:
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a microelectromechanical resonator to generate an output signal wherein the output signal includes a first frequency; frequency adjustment means for generating an output signal having a second frequency using the output signal of the microelectromechanical resonator and a set of values, wherein;
(i) the frequency adjustment means includes first frequency multiplier means, and (ii) the second frequency is greater than the first frequency; andwherein the microelectromechanical resonator and the frequency adjustment means are integrated in or on a common substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A compensated microelectromechanical oscillator, comprising:
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a microelectromechanical resonator to generate an output signal wherein the output signal includes a frequency; frequency adjustment means for generating an output signal using the output signal of the microelectromechanical resonator and a set of values, wherein; (i) the frequency adjustment means includes frequency divider means comprising a PLL, DLL, FLL or digital/frequency synthesizer, and (ii) the output signal of frequency adjustment means includes a frequency that is less than the frequency of the output signal of the microelectromechanical resonator. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A method of operating a microelectromechanical oscillator having (1) a microelectromechanical resonator, integrated in or on a substrate, to generate an output signal wherein the output signal includes a first frequency, and (2) frequency adjustment means for generating an output signal having a second frequency in response to a first set of values, wherein the second frequency is (i) within a predetermined range of frequencies and (ii) greater than the first frequency, the method comprising:
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determining that the microelectromechanical resonator is at a second operating temperature; and providing a second set of values to the frequency adjustment means, wherein the frequency adjustment means, in response to the second set of values, generates an output signal having a frequency that is (1) within the predetermined range of frequencies when the microelectromechanical resonator is at the second operating temperature and (2) greater than the frequency of the output signal of the microelectromechanical resonator. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A microelectromechanical oscillator, comprising:
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a microelectromechanical resonator to generate an output signal wherein the output signal includes a first frequency; frequency adjustment means for generating a first output signal having a frequency using the output signal of the microelectromechanical resonator and a set of values, wherein; (i) the frequency adjustment means includes first frequency multiplier means, and (ii) the frequency of the first output signal is greater than the first frequency. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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Specification