Stage assembly including a reaction assembly having a connector assembly

• US 7,221,433 B2
• Filed: 01/28/2004
• Issued: 05/22/2007
• Est. Priority Date: 01/28/2004
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Binnard, Mike
• Primary Examiner(s): Lee; Diane
• Assistant Examiner(s): GUTIERREZ, KEVIN C
• Application Number:
  US10/767,628
• Publication Number:
  US 20050162635A1
• Time in Patent Office: 1,210 Days
• Field of Search: 355/53, 355/72, 355/77, 250/492.2, 310/10, 310/12
• US Class Current: 355/72
• CPC Class Codes: G03B 27/58 Baseboards, masking frames, or other holders for the sensitive material G03B27/53 takes precedence ; for electrophotographic copiers G03G15/65
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass

Abstract

A stage assembly (220) for moving and positioning a device (200) includes a stage base (202), a stage (206), a stage mover assembly (204), and a reaction assembly (226). The stage mover assembly (204) moves the stage (206) relative to the stage base (202). The reaction assembly (226) is coupled to the stage mover assembly (204). The reaction assembly (226) reduces the reaction forces created by the stage mover assembly (204) that are transferred to the stage base (202). In one embodiment, the reaction assembly (226) includes a pair of masses (250A), (250B) and a connector assembly (236) that connects the masses (250A), (250B) together, allows the masses to move independently along a first axis, and causes the masses (250A), (250B) to move concurrently along a second axis.

Claims

1. A stage assembly that moves a device relative to a mounting area, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along a first axis and generating reaction forces; and

a reaction assembly coupled to the stage mover assembly, the reaction assembly including a first reaction subassembly having a first mass that is movable along the first axis, a second reaction subassembly having a second mass that is movable along the first axis, and a connector assembly that connects the reaction subassemblies together, allows for relative movement of the masses with at least one degree of freedom and inhibits relative movement of the masses with at least one degree of freedom.

2. The stage assembly of claim 1 wherein the stage mover assembly moves the stage with two degrees of freedom, the reaction assembly reduces the reaction forces in the two degrees of freedom that are transferred to the mounting area, and the connector assembly allows for relative movement of the masses with at least two degrees of freedom.

3. The stage assembly of claim 2 wherein the stage mover assembly moves the stage along the first axis and along a second axis, the axes being orthogonal to each other, and the connector assembly allows for relative movement of the masses along the first axis and inhibits relative movement of the masses along the second axis.

4. The stage assembly of claim 3 wherein the reaction assembly adjusts the position of the masses along a third axis relative to the mounting area.

5. The stage assembly of claim 4 wherein the reaction assembly independently adjusts the position of the masses along the Z axis.

6. The stage assembly of claim 3 wherein the masses move independently along the first axis and the masses move concurrently along the second axis relative to the mounting area.

7. The stage assembly of claim 6 wherein when the stage mover assembly moves the stage along the first axis in one direction, at least one of the masses moves along the first axis in an opposite direction.

8. The stage assembly of claim 7 wherein when the stage mover assembly moves the stage along the second axis in one direction, the masses move concurrently along the second axis in the opposite direction.

9. The stage assembly of claim 1 wherein the first reaction subassembly includes a first X guide that guides the movement of the first mass along the first axis and a first Y guide that guides the movement of the first mass and the first X guide along a second axis.

10. The stage assembly of claim 9 wherein the first reaction subassembly includes a first trim assembly that adjusts the position of the first mass along the first axis and adjusts the position of the first mass and the first X guide along the second axis.

11. The stage assembly of claim 10 wherein the first trim assembly includes a first X trim mover that adjusts the position of the first mass along the first axis and a Y trim mover that adjusts the position of the first mass and the first X guide along the second axis.

12. The stage assembly of claim 1 wherein the reaction assembly independently adjusts the position of the masses along the first axis.

13. The stage assembly of claim 1 wherein the connector assembly secures the masses together.

14. The stage assembly of claim 1 wherein each reaction subassembly includes an X guide that guides the motion of the respective masses along the first axis and wherein the connector assembly secures the X guides together.

15. The stage assembly of claim 1 wherein the connector assembly includes a pair of spaced apart connectors.

16. The stage assembly of claim 15 wherein at least one of the connectors includes a bar and a joint.

17. The stage assembly of claim 1 further comprising a stage base that supports the stage.

18. The stage assembly of claim 17 further comprising a base isolator that adjusts the position of the stage base relative to the mounting area and the masses.

19. The stage assembly of claim 17 wherein the stage mover assembly includes a guide bar that guides motion of the stage, the guide bar being supported by the reaction assembly independently of the stage base.

20. The stage assembly of claim 17 wherein the stage mover assembly includes a guide bar that guides motion of the stage, the guide bar being supported by the stage base.

21. The stage assembly of claim 17 where the reaction assembly is supported by the stage base.

22. The stage assembly of claim 17 further comprising a subassembly adjuster that independently adjusts the position of the masses relative to the stage base and the mounting area.

23. An exposure apparatus including an irradiation apparatus that is a source of radiation, and the stage assembly of claim 1 that moves the device relative to the irradiation apparatus.

24. A process for manufacturing a device including the steps of providing a substrate and transferring an image onto the substrate with the exposure apparatus of claim 23.

25. A process for manufacturing a wafer including the steps of providing a substrate and transferring an image onto the substrate with the exposure apparatus of claim 23.

26. A method for making a stage assembly that moves a device relative to a mounting area, the method comprising the steps of:

providing a stage that retains the device;

connecting a stage mover assembly to the stage, the stage mover assembly moving the stage along a first axis and generating reaction forces; and

coupling a reaction assembly to the stage mover assembly, the reaction assembly including a first reaction subassembly having a first mass that is movable along the first axis, a second reaction subassembly having a second mass that is movable along the first axis, and a connector assembly that connects the reaction subassemblies together, allows for relative movement of the masses with at least one degree of freedom and inhibits relative movement of the masses with at least one degree of freedom.

27. The method of claim 26 wherein the step of connecting a stage mover assembly includes the step of moving the stage with two degrees of freedom with the stage mover assembly and wherein the step of coupling a reaction assembly includes the step of reducing the reaction forces in the two degrees of freedom that are transferred to the mounting area with the reaction assembly.

28. The method of claim 27 wherein the step of connecting a stage mover assembly includes the step of moving the stage along the first axis and along a second axis with the stage mover assembly, the axes being orthogonal to each other, and wherein the step of coupling a reaction assembly includes the steps of allowing for relative movement of the masses along the first axis and inhibiting relative movement of the masses along the second axis with the connector assembly.

29. The method of claim 28 wherein the step of coupling a reaction assembly includes the step of adjusting the position of the masses along a third axis relative to the mounting area with the reaction assembly.

30. The method of claim 29 wherein the step of coupling a reaction assembly includes the step of adjusting the position of the masses along the third axis with the reaction assembly.

31. The method of claim 28 wherein the step of coupling a reaction assembly includes the masses moving independently along the first axis and the masses moving concurrently along the second axis relative to the mounting area.

32. The method of claim 31 wherein when the step of connecting a stage mover assembly includes the step of moving the stage along the first axis in one direction with the stage mover assembly, and the step of coupling a reaction assembly includes at least one of the masses moving along the first axis in an opposite direction.

33. The method of claim 31 wherein when the step of connecting a stage mover assembly includes the step of moving the stage along the second axis in one direction with the stage mover assembly, and the step of coupling a reaction assembly includes the masses moving concurrently along the second axis in the opposite direction.

34. The method of claim 26 wherein the step of coupling a reaction assembly includes the steps of guiding the movement of the first mass along the first axis with a first X guide and guiding the movement of the first mass and the first X guide along a second axis with a first Y guide.

35. The method of claim 34 wherein the step of coupling a reaction assembly includes the steps of adjusting the position of the first mass along the first axis and adjusting the position of the first mass and the first X guide along the second axis with a first trim assembly.

36. The method of claim 35 wherein the step of coupling a reaction assembly includes the steps of adjusting the position of the first mass along the first axis with a first trim mover of the first trim assembly and adjusting the position of the first mass and the first X guide along the second axis with a Y trim mover of the first trim assembly.

37. The method of claim 26 wherein the step of coupling a reaction assembly includes the step of independently adjusting the position of the masses along the first axis.

38. The method of claim 26 wherein the step of coupling a reaction assembly includes the step of securing the masses together with the connector assembly.

39. The method of claim 26 wherein the step of coupling a reaction assembly includes the steps of guiding the motion of the respective masses along the first axis with an X guide and securing the X guides together with the connector assembly.

40. The method of claim 26 wherein the step of coupling a reaction assembly includes the connector assembly having a pair of spaced apart connectors.

41. The method of claim 40 wherein the step of coupling a reaction assembly includes at least one of the connectors including a bar and a joint.

42. The method of claim 26 further comprising the step of providing a stage base that supports the stage.

43. The method of claim 42 further comprising the step of providing a base isolator that adjusts the position of the stage base relative to the mounting surface and the masses.

44. The method of claim 42 wherein the step of connecting a stage mover assembly includes the step of guiding the motion of the stage with a guide bar, the guide bar being supported by the reaction assembly independently of the stage base.

45. The method of claim 42 wherein the step of connecting a stage mover assembly includes the step of guiding the motion of the stage with a guide bar, the guide bar being supported by the stage base.

46. The method of claim 42 wherein the step of coupling a reaction assembly includes the step of supporting the reaction assembly with the stage base.

47. The method of claim 26 wherein the step of coupling a reaction assembly includes each reaction subassembly including a mass support that allows the masses to move independently along the first axis and allows the masses to move concurrently along the second axis.

48. A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of:

providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and

providing the stage assembly made by the method of claim 26.

49. A method of making a wafer including the steps of providing a substrate and transferring an image onto the substrate with the exposure apparatus made by the method of claim 48.

50. A method of making a device including the steps of providing a substrate and transferring an image onto the substrate with the exposure apparatus made by the method of claim 48.

51. A process for manufacturing a device including the steps of providing a substrate and transferring an image onto the substrate with an exposure apparatus that includes a stage assembly that moves the device relative to a mounting area, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage and generating reaction forces; and

a reaction assembly coupled to the stage mover assembly, the reaction assembly including a first reaction subassembly having a first mass, a second reaction subassembly having a second mass, and a connector assembly that connects the reaction subassemblies together, allows for relative movement of the masses with at least one degree of freedom and inhibits relative movement of the masses with at least one degree of freedom.

52. A process for manufacturing a wafer including the steps of providing a substrate and transferring an image onto the substrate with an exposure apparatus that includes a stage assembly that moves a device relative to a mounting area, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage and generating reaction forces; and

a reaction assembly coupled to the stage mover assembly, the reaction assembly including a first reaction subassembly having a first mass, a second reaction subassembly having a second mass, and a connector assembly that connects the reaction subassemblies together, allows for relative movement of the masses with at least one degree of freedom and inhibits relative movement of the masses with at least one degree of freedom.

53. A method for making an exposure apparatus that forms an image on a wafer, the method comprising the steps of:

providing an irradiation apparatus that irradiates the wafer with radiation to form the image on the wafer; and

making a stage assembly that moves the wafer relative to a mounting area, the method comprising the steps of;

providing a stage that retains the wafer;

connecting a stage mover assembly to the stage, the stage mover assembly moving the stage and generating reaction forces; and

coupling a reaction assembly to the stage mover assembly, the reaction assembly including a first reaction subassembly having a first mass, a second reaction subassembly having a second mass, and a connector assembly that connects the reaction subassemblies together, allows for relative movement of the masses with at least one degree of freedom and inhibits relative movement of the masses with at least one degree of freedom.

54. A method of making a wafer including the steps of providing a substrate and transferring an image onto the substrate with the exposure apparatus made by the method of claim 53.

55. A method of making a device including the steps of providing a substrate and transferring an image onto the substrate with the exposure apparatus made by the method of claim 53.