Frequency and/or phase compensated microelectromechanical oscillator
First Claim
1. A microelectromechanical oscillator, comprising:
- a microelectromechanical resonator to generate an output signal wherein the output signal includes a first frequency;
frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the resonator and, in response to a set of values, to generate an output signal having a second frequency using the output signal of the microelectromechanical resonator, wherein;
(i) the frequency adjustment circuitry includes frequency multiplier circuitry, and(ii) the second frequency is greater than the first frequency; and
wherein the microelectromechanical resonator and the frequency adjustment circuitry are integrated in or on a common substrate.
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Abstract
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a compensated microelectromechanical oscillator, having a microelectromechanical resonator that generates an output signal and frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the microelectromechanical resonator and, in response to a set of values, to generate an output signal having second frequency. In one embodiment, the values may be determined using the frequency of the output signal of the microelectromechanical resonator, which depends on the operating temperature of the microelectromechanical resonator and/or manufacturing variations of the microelectromechanical resonator. In one embodiment, the frequency adjustment circuitry may include frequency multiplier circuitry, for example, PLLs, DLLs, digital/frequency synthesizers and/or FLLs, as well as any combinations and permutations thereof. The frequency adjustment circuitry, in addition or in lieu thereof, may include frequency divider circuitry, for example, DLLs, digital/frequency synthesizers (for example, DDS) and/or FLLs, as well as any combinations and permutations thereof.
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Citations
65 Claims
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1. A microelectromechanical oscillator, comprising:
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a microelectromechanical resonator to generate an output signal wherein the output signal includes a first frequency; frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the resonator and, in response to a set of values, to generate an output signal having a second frequency using the output signal of the microelectromechanical resonator, wherein; (i) the frequency adjustment circuitry includes frequency multiplier circuitry, and (ii) the second frequency is greater than the first frequency; and wherein the microelectromechanical resonator and the frequency adjustment circuitry are integrated in or on a common substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A compensated microelectromechanical oscillator, comprising:
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a microelectromechanical resonator to generate an output signal wherein the output signal includes a frequency; frequency adjustment circuitry, coupled to the microelectromechanical resonator, to generate an output signal using the output signal of the microelectromechanical resonator and a set of values, wherein; (i) the frequency adjustment circuitry includes frequency divider circuitry comprising a PLL, DLL, FLL or digital/frequency synthesizer, and (ii) the output signal of frequency adjustment circuitry includes a frequency that is less than the frequency of the output signal of the microelectromechanical resonator; and wherein the microelectromechanical resonator and the frequency adjustment circuitry are integrated in or on a common substrate. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A method of operating a microelectromechanical oscillator having (1) a microelectromechanical resonator, integrated in or on a substrate, to generate an output signal wherein the output signal includes a first frequency, and (2) frequency adjustment circuitry, coupled to the microelectromechanical resonator and integrated in or on the substrate, to receive the output signal of the microelectromechanical resonator wherein, in response to a first set of values, the frequency adjustment circuitry provides an output signal having a second frequency wherein the second frequency is (i) within a predetermined range of frequencies and (ii) greater than the first frequency, the method comprising:
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determining that the microelectromechanical resonator is at a second operating temperature; and providing a second set of values to the frequency adjustment circuitry, wherein the frequency adjustment circuitry, in response to the second set of values, generates an output signal having a frequency that is (1) within the predetermined range of frequencies when the microelectromechanical resonator is at the second operating temperature and (2) greater than the frequency of the output signal of the microelectromechanical resonator. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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51. A microelectromechanical oscillator, comprising:
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a microelectromechanical resonator to generate an output signal wherein the output signal includes a first frequency; frequency adjustment circuitry, coupled to the microelectromechanical resonator to receive the output signal of the resonator and, using a set of values and the output signal of the microelectromechanical resonator, to generate a plurality of output signals wherein at least one of the output signals includes a frequency that is greater than the first frequency; and wherein the microelectromechanical resonator and the frequency adjustment circuitry are integrated in or on a common substrate. - View Dependent Claims (52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65)
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Specification