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Fluorescent intensity measuring method and apparatus

  • US 7,224,826 B2
  • Filed: 06/26/2003
  • Issued: 05/29/2007
  • Est. Priority Date: 12/26/2000
  • Status: Expired due to Term
First Claim
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1. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:

  • a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image;

    a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance;

    an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image;

    a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask;

    an expansion step of expanding the foreign matter area of the binarized image by a determined quantity;

    a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; and

    a reliability judgment step of obtaining an area of each minute point after the foreign matter elimination step and judging the reliability of the measurement value by using a ratio of the obtained area and the reference area of the minute point.

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