Fluorescent intensity measuring method and apparatus
First Claim
Patent Images
1. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
- a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image;
a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance;
an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image;
a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask;
an expansion step of expanding the foreign matter area of the binarized image by a determined quantity;
a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; and
a reliability judgment step of obtaining an area of each minute point after the foreign matter elimination step and judging the reliability of the measurement value by using a ratio of the obtained area and the reference area of the minute point.
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Abstract
A fluorescent image is obtained by emitting the light with a wavelength which excites a labelling fluorescent substance, a mask is created by a foreign matter area image extracted from an image of foreign matter adhering to the measurement object obtained by emitting light with a wavelength which does not excite the fluorescent substance, and logical multiplication of the mask and the fluorescent image is executed, thereby obtaining a fluorescent image that a foreign matter area is eliminated from the fluorescent image.
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Citations
42 Claims
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1. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; an expansion step of expanding the foreign matter area of the binarized image by a determined quantity; a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; and a reliability judgment step of obtaining an area of each minute point after the foreign matter elimination step and judging the reliability of the measurement value by using a ratio of the obtained area and the reference area of the minute point. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; an expansion step of expanding the foreign matter area of the binarized image by a determined quantity; a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; and a correction step of correcting the second image by using a reference image.
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8. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imagine step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; an expansion step of expanding the foreign matter area of the binarized image by a determined quantity; and a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; wherein the extraction step obtains the binarized image by using a differential image acquired from the second image. - View Dependent Claims (9, 10, 11)
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12. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; an expansion step of expanding the foreign matter area of the binarized image by a determined quantity; and a reliability judgment step of obtaining an area of each minute point after the foreign matter elimination step and judging the reliability of the measurement value by using a ratio of the obtained area and the reference area of the minute point. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; and an expansion step of expanding the foreign matter area of the binarized image by a determined quantity; wherein the extraction step obtains the binarized image by using a differential image acquired from the second image. - View Dependent Claims (19, 20, 21)
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22. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; and a reliability judgment step of obtaining an area of each minute point after the foreign matter elimination step and judging the reliability of the measurement value by using a ratio of the obtained area and the reference area of the minute point. - View Dependent Claims (23, 24, 25, 26, 27)
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28. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; and a correction step of correcting the second image by using a reference image.
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29. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imagine step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; and a normalization step of normalizing the measured intensity of the minute point by using a reference area of the minute point; wherein the extraction step obtains the binarized image by using a differential image acquired from the second image. - View Dependent Claims (30, 31, 32)
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33. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; and a reliability judgment step of obtaining an area of each minute point after the foreign matter elimination step and judging the reliability of the measurement value by using a ratio of the obtained area and the reference area of the minute point. - View Dependent Claims (34, 35, 36, 37, 38)
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39. A fluorescent intensity measuring method which measures the intensity of minute points which are arranged on a substrate having a substantially flat surface and include a fluorescent substance, comprising:
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a first imaging step of emitting light with a wavelength with which the fluorescent substance can be excited and obtaining an image of each minute point including the fluorescent substance as a first image; a second imaging step of obtaining an image of foreign matter adhering on the substrate as a second image by light with a wavelength which does not excite the fluorescent substance; an extraction step of obtaining a binarized image by extracting a foreign matter area from the second image; and a foreign matter elimination step of disabling an image at a part overlapping the foreign matter area in the first image with the binarized image being used as a mask; wherein the extraction step obtains the binarized image by using a differential image acquired from the second image. - View Dependent Claims (40, 41, 42)
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Specification