Micro-electromechanical valve shutter assembly
First Claim
1. A micro-electromechanical shutter assembly for controlling a fluid flow through a fluid supply channel defined by a wafer substrate and drive circuitry layers positioned on a first surface of the wafer substrate, the fluid supply channel terminating at a fluid supply opening, the shutter assembly comprising;
- an elongate actuator anchored, at one end, to the first surface of the wafer substrate so as to be in electrical contact with at least one of the drive circuitry layers; and
a closure member fixedly mounted on an opposite end of the elongate actuator so as to be movable between a closed position, in which the closure member covers the fluid supply opening and prevents ink from flowing through the fluid supply channel, and an open position, in which the fluid supply opening is opened to allow the ink to flow through the fluid supply channel, whereinat least a portion of the actuator is arranged such that, upon receiving an electrical signal from the drive circuitry layer, it heats up and, thereby, changes its shape so as to displace the closure member from closed to open position.
3 Assignments
0 Petitions
Accused Products
Abstract
A micro-electromechanical shutter assembly includes an elongate actuator that is anchored at one end to the wafer substrate to be in electrical contact with the drive circuitry layers. A closure member is mounted on an opposite end of the elongate actuator. The actuator is configured to receive an electrical signal from the drive circuitry layer to displace the closure member between a closed position in which the closure member covers the fluid supply opening and ink is inhibited from flowing through the fluid supply channel and an open position. The elongate actuator is shaped so that, in a rest condition, the actuator encloses an arc. The actuator includes a heating portion that is capable of being heated on receipt of the electrical signal to expand. The heating portion is configured so that, when the portion is heated, the resultant expansion of the portion causes the actuator to straighten at least partially and a subsequent cooling of the portion causes the actuator to return to its rest condition thereby displacing the closure between the closed and open positions.
23 Citations
7 Claims
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1. A micro-electromechanical shutter assembly for controlling a fluid flow through a fluid supply channel defined by a wafer substrate and drive circuitry layers positioned on a first surface of the wafer substrate, the fluid supply channel terminating at a fluid supply opening, the shutter assembly comprising;
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an elongate actuator anchored, at one end, to the first surface of the wafer substrate so as to be in electrical contact with at least one of the drive circuitry layers; and a closure member fixedly mounted on an opposite end of the elongate actuator so as to be movable between a closed position, in which the closure member covers the fluid supply opening and prevents ink from flowing through the fluid supply channel, and an open position, in which the fluid supply opening is opened to allow the ink to flow through the fluid supply channel, wherein at least a portion of the actuator is arranged such that, upon receiving an electrical signal from the drive circuitry layer, it heats up and, thereby, changes its shape so as to displace the closure member from closed to open position. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification