Sequential lithographic methods to reduce stacking fault nucleation sites
First Claim
1. A method of fabricating an epitaxial silicon carbide layer comprising:
- forming a plurality of first features in a surface of a silicon carbide substrate having an off-axis orientation toward a predetermined crystallographic direction, the plurality of first features including at least one first sidewall that is oriented nonparallel to the predetermined crystallographic direction;
growing a first epitaxial silicon carbide layer on the surface of the silicon carbide substrate that includes the plurality of first features therein, the first epitaxial silicon carbide layer being thicker than a depth of the at least one first sidewall;
forming a plurality of second features in a surface of the first epitaxial layer, the plurality of second features including at least one second sidewall that is oriented nonparallel to the predetermined crystallographic direction; and
growing a second epitaxial silicon carbide layer on the surface of the first epitaxial layer that includes the plurality of second features therein, the second epitaxial silicon carbide layer being thicker than a depth of the at least one second sidewall.
1 Assignment
0 Petitions
Accused Products
Abstract
An epitaxial silicon carbide layer is fabricated by forming first features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The first features include at least one sidewall that is orientated nonparallel (i.e., oblique or perpendicular) to the crystallographic direction. A first epitaxial silicon carbide layer is then grown on the surface of the silicon carbide substrate that includes first features therein. Second features are then formed in the first epitaxial layer. The second features include at least one sidewall that is oriented nonparallel to the crystallographic direction. A second epitaxial silicon carbide layer is then grown on the surface of the first epitaxial silicon carbide layer that includes the second features therein.
-
Citations
32 Claims
-
1. A method of fabricating an epitaxial silicon carbide layer comprising:
-
forming a plurality of first features in a surface of a silicon carbide substrate having an off-axis orientation toward a predetermined crystallographic direction, the plurality of first features including at least one first sidewall that is oriented nonparallel to the predetermined crystallographic direction; growing a first epitaxial silicon carbide layer on the surface of the silicon carbide substrate that includes the plurality of first features therein, the first epitaxial silicon carbide layer being thicker than a depth of the at least one first sidewall; forming a plurality of second features in a surface of the first epitaxial layer, the plurality of second features including at least one second sidewall that is oriented nonparallel to the predetermined crystallographic direction; and growing a second epitaxial silicon carbide layer on the surface of the first epitaxial layer that includes the plurality of second features therein, the second epitaxial silicon carbide layer being thicker than a depth of the at least one second sidewall. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A method of fabricating an epitaxial monocrystalline layer comprising:
-
forming a plurality of first features in a surface of a monocrystalline substrate having an off-axis orientation toward a predetermined crystallographic direction, the plurality of first features including at least one first sidewall; growing a first epitaxial layer on the surface of the monocrystalline substrate that includes the plurality of features therein, the first epitaxial layer being thicker than a depth of the at least one first sidewall; forming a plurality of second features in a surface of the first epitaxial layer, the plurality of second features including at least one second sidewall; and growing a second epitaxial layer on the surface of the first epitaxial layer that includes the plurality of second features therein, the second epitaxial layer being thicker than a depth of the at least one second sidewall. - View Dependent Claims (17, 18, 19, 20, 21)
-
-
22. A method of fabricating an epitaxial silicon carbide layer comprising:
-
epitaxially growing from at least one first sidewall of a plurality of first features in a surface of a silicon carbide substrate having an off-axis orientation toward a predetermined crystallographic direction to form a first epitaxial silicon carbide layer that is thicker than a depth of the at least one first sidewall, the at least one first sidewall being oriented nonparallel to the predetermined crystallographic direction; and epitaxially growing at least one second sidewall of a plurality of second features in a surface of the first epitaxial layer to form a second epitaxial silicon carbide layer that is thicker than a depth of the at least one second sidewall, the at least one second sidewall being oriented nonparallel to the predetermined crystallographic direction. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
-
Specification