Micro light modulator arrangement

• US 7,227,677 B2
• Filed: 03/26/2002
• Issued: 06/05/2007
• Est. Priority Date: 03/26/2002
• Status: Expired due to Term

• Current Assignee: 3D Systems, Inc. (3D Systems Corporation)
• Original Assignee: Dtcon A/S
• Inventors: Henningsen, Henning, Ravnkilde, Jan Tue
• Primary Examiner(s): Thompson; Timothy
• Assistant Examiner(s): FANG, JERRY C
• Application Number:
  US10/509,148
• Publication Number:
  US 20050157365A1
• Time in Patent Office: 1,897 Days
• Field of Search: 359/254, 359/223, 359/290, 359/291, 359/292, 359/295
• US Class Current: 359/254
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence

Abstract

The invention relates to a micro light modulator arrangement (10) comprising at least one light transmission path (23) and at least one controllable shutter (11, 16) arranged for modulation of light transmitted via said at least one light transmission path (23), said at least a part of said light transmission path comprising a translucent solid material, and said at least a part of said light transmission path being an integral part of a substrate to which said at least one controllable shutter (11, 16) is anchored.

Claims

1. Micro light modulator arrangement comprising:

at least one light transmission path and at least one controllable shutter arranged for modulation of light transmitted via said at least one light transmission path;

at least a part of said light transmission path comprising a translucent modulator substrate;

said at least part of said light transmission path being an integral part of a substrate to which said at least one controllable shutter is anchored;

at least one blade movable between at least two positions via at least one movement path, wherein said blade is anchored on a micro shutter platform by anchoring means;

said at least one transmission path (TP) extending through said micro shutter platform via a solid translucent transmission path; and

said at least one transmission path guiding electromagnetic light through said shutter platform which is at least partly defined by means of a masking.

2. Micro light modulator arrangement according to claim 1, wherein said at least part of said light transmission path comprises a part of a microlens arrangement.

3. Micro light modulator arrangement according to claim 2, wherein said microlens arrangement may be adapted for guiding incoming light through the light transmission path to at least one controllable shutter.

4. Micro light modulator arrangement according to claim 2, wherein said microlens arrangement may be adapted for guiding outgoing light through the light transmission path from said at least one controllable shutter.

5. Micro light modulator arrangement according to claim 1, wherein an extension of said light transmission path comprises a translucent modulator substrate of at least 100 micrometer, preferably at least 150 micrometer.

6. Micro light modulator arrangement according to claim 5, wherein the extension of said light transmission path comprises a translucent modulator substrate not in excess of 3000 micrometer, preferably not in excess of 2000 micrometer.

7. Micro light modulator arrangement according to claim 1, the extension of said at least part of said light transmission path comprising a translucent modulator substrate of at least 200 micrometer, preferably at least 250 micrometer.

8. Micro light modulator arrangement according to claim 1, wherein said one light transmission path is a part of a substrate to which the at least one controllable shutter is anchored.

9. Micro light modulator arrangement according to claim 1, said shutter being controlled by electrical activation means.

10. Micro light modulator arrangement according to claim 1, said shutter comprising a mechanical blade which may be moved between at least two positions, and said blade in one of said at least two positions blocking transmission of light via said at least a part of said light transmission path.

11. Micro light modulator arrangement according to claim 10, said shutter blade performing a sliding movement with respect the substrate forming said transmission path.

12. Micro light modulator arrangement according to claim 1, said modulator comprising at least one microlens arrangement.

13. Micro light modulator arrangement according to claim 2, said microlens arrangement forming a light input of said modulator.

14. Micro light modulator arrangement according to claim 1, said modulator arrangement comprising light-emitting means arranged for transmission of light to an output of the modulator via at least one microlens arrangement and said at least one light transmission path.

15. Micro light modulator arrangement according to claim 14, wherein said light-emitting means comprises at least one UV light source.

16. Micro light modulator arrangement according to claim 14, wherein said light-emitting means comprises at least one laser light emitter.

17. Micro light modulator arrangement according to claim 1, comprising at least one blade movable between at least two positions via at least one movement path;

a microshutter comprising electrode means for activating movement of said at least one blade between said at least two positions and for positioning the at least one blade in one of said at least two positions; and

said electrode means being arranged out of reach of the at least one blade and a beam in one of said at least two positions.

18. Micro light modulator arrangement according to claim 1, wherein a translucent light transmission path comprises a part of at least one microlens.

19. Micro light modulator arrangement according to claim 1, wherein said light modulator is located on said at least one translucent substrate and said light modulator is arranged for modulation of light through said at least one translucent substrate via said at least a part of said light transmission path.

20. Micro light modulator arrangement according to claim 19, wherein said substrate, forming said at least one light transmission path, forms at least one microlens.

21. Micro light modulator arrangement according to claim 1, wherein at least one microlens is adapted to focusing light on at least one micro-shutter.

22. Micro light modulator arrangement according to claim 21, wherein said micro light modulator comprises at least one further set of microlenses.

23. Micro light modulator arrangement according to claim 22, wherein said at least one further set of microlenses are arranged as at least one separate layer.

24. Micro light modulator arrangement according to claim 1 wherein said translucent substrate comprises fused silica.

25. Micro light modulator arrangement according to claim 1 wherein said translucent substrate comprises glass.

26. Micro light modulator arrangement according to claim 15, wherein said translucent substrate comprises polymers.

27. Micro light modulator arrangement according to claim 1, wherein said micro light modulator arrangement comprises said at least one blade movable between said at least two positions via said at least one movement path, and

electrode means for activating movement of said at least one blade between said at least two positions and for positioning the at least one blade in one of said at least two positions,

said electrode means being arranged out of reach of the at least one blade when the blade moves along said at least one movement path.

28. Micro light modulator arrangement according to claim 27, wherein a connection portion comprises at least one beam,

wherein said at least one blade is established on a microshutter platform comprising a translucent substrate, such as a glass wafer.

29. Micro light modulator arrangement according to claim 27, wherein said at least two positions comprise at least one position in which the at least one blade defines a blocking of at least one electromagnetic light transmission path.

30. Micro light modulator arrangement according to claim 14, wherein said light-emitting means is adapted for emitting visible light.

31. Micro light modulator arrangement according to claim 1, wherein the micro light modulator arrangement comprises a plurality of light modulators.

32. Sealing arrangement comprising:

a micro light modulator, comprising at least one light transmission path and at least one controllable shutter arranged for modulation of light transmitted via said at least one light transmission path, at least a part of said light transmission path comprising a translucent modulator substrate, and said at least part of said light transmission path being an integral part of a substrate to which said at least one controllable shutter is anchored;

wherein said sealing comprises said at least a part of said light transmission path; and

at least one blade movable between at least two positions via at least one movement path, wherein said blade is anchored on a micro shutter platform by anchoring means;

said at least one transmission path (TP) extending through said micro shutter platform via a solid translucent transmission path; and

said at least one transmission path guiding electromagnetic light through said shutter platform which is at least partly defined by means of a masking.

33. Sealing arrangement according to claim 32, wherein said sealing further comprises at least one microlens arrangement.

34. Sealing arrangement according to claim 32, wherein said sealing encloses said at least one controllable shutter.