RF-actuated MEMS switching element
First Claim
1. An RF-actuated microelectromechanical systems (MEMS) switch module, comprising:
- an antenna for receiving an externally-generated RF MEMS switch control signal, and providing an antenna output signal representative thereof;
a circuit operatively connected to the antenna for receiving the antenna output signal and generating a trigger voltage;
a MEMS switch configured to actuate in response to the trigger voltage; and
wherein said module is formed as a metamaterial having characteristics that can be altered by applying said RF MEMS switch control signal.
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Accused Products
Abstract
An RF-actuated microelectromechanical systems (MEMS) switch for use with switchable RF structures such as antennas and reflectors is disclosed. An antenna within each MEMS switch module is coupled to a circuit that provides a trigger voltage based on an RF control signal received at the antenna. The trigger voltage output of the circuit is used as the control the MEMS switch. This allows arrays of MEMS switch modules to be actuated by remotely generated radio frequency signals thus alleviating the need for running metallic conductors or optical fibers to each MEMS switch. Frequency response characteristics, phasing, reflectivity, and directionality characteristics may be altered in real-time.
65 Citations
19 Claims
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1. An RF-actuated microelectromechanical systems (MEMS) switch module, comprising:
- an antenna for receiving an externally-generated RF MEMS switch control signal, and providing an antenna output signal representative thereof;
a circuit operatively connected to the antenna for receiving the antenna output signal and generating a trigger voltage;
a MEMS switch configured to actuate in response to the trigger voltage; and
wherein said module is formed as a metamaterial having characteristics that can be altered by applying said RF MEMS switch control signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
- an antenna for receiving an externally-generated RF MEMS switch control signal, and providing an antenna output signal representative thereof;
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15. An RF-actuated microelectromechanical systems (MEMS) switch module, comprising:
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an antenna for receiving an externally-generated RF MEMS switch control signal, and providing an antenna output signal representative thereof; a circuit operatively connected to the antenna for receiving the antenna output signal and generating a trigger voltage; and a MEMS switch configured to actuate in response to the trigger voltage, so as to connect or disconnect a first reflective element to a second reflective element; wherein the module and the first and second reflective elements form part of a metamaterial having reflective characteristics that can be altered by applying the RF MEMS switch control signal. - View Dependent Claims (16)
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17. A selectively changeable radio frequency (RF) element device, comprising:
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at least two RF elements having one or more operating frequencies; and an RF-actuated MEMS switch module having at least one MEMS switch configured to receive an RF MEMS switch control signal different than the one or more operating frequencies, and to selectively connect the two RF elements by said MEMS switch in response to the RF MEMS switch control signal; and wherein the RF element device is a metamaterial. - View Dependent Claims (18, 19)
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Specification