Torsional rate sensor with momentum balance and mode decoupling
First Claim
1. A rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate in phase opposition about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axes for monitoring rate of rotation about the input axis.
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Abstract
Rate sensor having a plurality of generally planar masses, a drive axis in the plane of each of the masses, an input axis perpendicular to the drive axes, and sense axes perpendicular to the drive axes and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.
14 Citations
44 Claims
- 1. A rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate in phase opposition about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axes for monitoring rate of rotation about the input axis.
- 10. A rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate in phase opposition about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.
- 15. A rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axes for monitoring rate of rotation about the input axis.
- 33. A rate sensor comprising a substrate, an input axis and a plurality of drive axes disposed in a plane generally parallel to the substrate, sense axes perpendicular to the plane, supports mounted on the substrate in a manner permitting only out-of-plane torsional movement of the supports about the drive axes, a plurality of generally planar masses mounted on the supports in a manner permitting only in-plane torsional movement of the masses about the sense axes relative to the supports, and means for driving the masses to oscillate about the drive axes, with Coriolis forces produced by rotation of the sensor about the input axis causing in-plane torsional movement of the masses about the sense axes.
- 36. A rate sensor comprising a substrate, an input axis and a plurality of drive axes disposed in a plane generally parallel to the substrate, sense axes perpendicular to the plane, supports mounted on the substrate in a manner permitting only in-plane torsional movement of the masses about the sense axes, a plurality of generally planar masses mounted on the supports in a manner permitting only out-of-plane torsional movement of the supports about the drive axes, and means for driving the masses to oscillate about the drive axes, with Coriolis forces produced by rotation of the sensor about the input axis causing in-plane torsional movement of the masses about the sense axes.
- 39. A rate sensor comprising a substrate, supports, first suspension members mounting the supports on the substrate for out-of-plane torsional movement about axes which are parallel to the substrate, a plurality of masses, and second suspension members mounting the masses to the supports for in-plane torsional movement about axes which are perpendicular to the substrate, with the first and second suspension members being independent of each other and the movement about the axes which are perpendicular to the substrate being decoupled from the movement about the axes which are parallel to the substrate.
- 42. A rate sensor comprising a substrate, supports, first suspension members mounting the supports on the substrate for in-plane torsional movement about axes which are perpendicular to the substrate, a plurality of masses, and second suspension members mounting the masses to the supports for out-of-plane torsional movement about axes which are parallel to the substrate, with the first and second suspension members being independent of each other and the movement about the axes which are perpendicular to the substrate being decoupled from the movement about the axes which are parallel to the substrate.
Specification