Light blocking electrical interconnect

• US 7,230,749 B2
• Filed: 02/18/2005
• Issued: 06/12/2007
• Est. Priority Date: 02/18/2005
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Martin, Eric T.
• Primary Examiner(s): Mack; Ricky
• Assistant Examiner(s): CHOI, WILLIAM C
• Application Number:
  US11/061,014
• Publication Number:
  US 20060187396A1
• Time in Patent Office: 844 Days
• Field of Search: 359/245, 359/290, 359/291, 359/295, 349/139, 257/691
• US Class Current: 359/291
• CPC Class Codes: G02B 1/11 Anti-reflection coatings
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An electrical interconnect to block light for use with an array of micro electromechanical machines separated by the first breaks includes a layer of an electrically conductive and an electrically isolated portions separated by second breaks configured to cross the first breaks on multiple sides of one of the micro electromechanical machines.

Claims

1. An electronic device comprising:

a first member;

a second member;

an electrical interconnect layer having a first electrically conductive portion and a second electrically conductive portion electrically isolated from the first electrically conductive portion;

a conductive plate between the electrical interconnect layer and the first and second members, the conductive plate having a periphery outwardly beyond the first member, wherein the conductive plate is configured to be charged from the periphery;

a first charge transmitting flexure extending from the first portion to the first member; and

a second charge transmitting flexure extending from the second portion to the second member.

2. The device of claim 1, wherein the electrical interconnect layer is electrically isolated from the conductive plate.

3. The device of claim 1, wherein the first portion and the second portion are separated by a single gap.

4. The device of claim 1 including a third charge transmitting flexure extending from the first portion to the first member.

5. The device of claim 4 including a fourth charge transmitting flexure extending from the first portion to the first member.

6. The device of claim 5 including a fifth charge transmitting flexure extending from the second portion to the second member and a sixth charge transmitting flexure extending from the second portion to the second member.

7. The device of claim 5 including a fifth charge transmitting flexure extending from the first portion to the first member.

8. The device of claim 7 including a sixth charge transmitting flexure extending from the second portion to the second member.

9. The device of claim 8 including a seventh charge transmitting flexure extending from the second portion to the second member.

10. The device of claim 9 including an eighth charge transmitting flexure extending from the second portion to the second member.

11. The device of claim 4 including a fourth charge transmitting flexure extending from the second portion to the second member.

12. The device of claim 1, wherein the first member is movably supported by a total number of flexures including the first flexure and wherein each of the total number of flexures is electrically connected to the first portion.

13. The device of claim 1, wherein the conductive layer includes a total number of electrically isolated and electrically conductive portions including the first portion and the second portion, wherein the device further includes a total number of members including a first member and a second member and wherein the total number of portions is less than or equal to the total number of members.

14. The device of claim 1, wherein the first portion and the second portion are separated by a non-linear break.

15. The device of claim 1, wherein the first portion and the second portion extend side-by-side one another.

16. The device of claim 1, wherein the first member has a center point and wherein the first portion extends opposite the center point.

17. The device of claim 1, wherein the first member has a face with a first surface area and wherein the first portion has a second face facing the first face and having a second surface area of at least 80 percent of the first surface area.

18. The device of claim 1, wherein the first portion has a surface area of at least 70 square microns opposite the first member.

19. The device of claim 1, wherein the first portion is non-rectangular.

20. The device of claim 1, wherein the first member has a first edge and a second opposite edge and wherein the first portion spans the first edge and the second edge.

21. The device of claim 1 including at least one adjacent circuitry layer, wherein the electrical interconnect layer is between the circuitry layer and the conductive plate.

22. The device of claim 21, wherein the circuitry layer includes electrical switching elements.

23. The device of claim 1, wherein the first portion includes an anti-reflective coating facing the conductive plate.

24. The device of claim 1, wherein the conductive plate includes an anti-reflective coating facing the first portion.

25. The device of claim 1, wherein the first flexure passes through an opening in the conductive plate and wherein the second portion is spaced from the opening by at least one micron.

26. The device of claim 1, wherein the device comprises a light modulator.

27. The device of claim 1, wherein the first member and the second member are each semi-reflective or semi-transparent.

28. The device of claim 1, wherein the first member and the second member are configured to move relative to one another.

29. The device of claim 1, wherein the conductive plate is reflective.