Techniques for analyzing data generated by instruments
First Claim
1. A method for analyzing data from an instrument comprising:
- receiving raw data from the instruments and configuration data from a user including parameters to generate an algorithm;
passing the raw data and the configuration data to an engine to generate the algorithm based on the parameters;
receiving results from the engine based on the raw data, the configuration data, and the algorithm generated by the engine; and
returning the results to the user,wherein passing the raw data and the configuration data comprises;
packaging the raw data and the configuration data in a model; and
transmitting the model to the engine,wherein packaging the raw data an the configuration data in a model comprises;
generating a list of layers for the model including algorithms for determining a characteristic of a layer;
generating a list of species for the model within the list of layers;
generating a list of results including the results within the list of species; and
generating a list of regions of the raw data.
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Abstract
According to one embodiment of the invention, a method for analyzing data from an instrument is disclosed. The raw data generated by the instrument, along with configuration data generated by a user, is packaged into a calling model. The raw data may include, for example, counts having a certain kinetic energy when analyzing photoelectron spectroscopy data. The configuration data may include several parameters selected by the user based on the composition and configuration of the structure being measured. The calling model may serve as an interface between the instrument and an engine for generating an algorithm for returning desired results to the user. The engine then generates the algorithm as well as the results specified by the user, and the calling model returns the results to the user. This allows a specific algorithm and results for a specific measured sample or structure to be generated using known algorithms and functions.
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Citations
24 Claims
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1. A method for analyzing data from an instrument comprising:
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receiving raw data from the instruments and configuration data from a user including parameters to generate an algorithm; passing the raw data and the configuration data to an engine to generate the algorithm based on the parameters; receiving results from the engine based on the raw data, the configuration data, and the algorithm generated by the engine; and returning the results to the user, wherein passing the raw data and the configuration data comprises; packaging the raw data and the configuration data in a model; and transmitting the model to the engine, wherein packaging the raw data an the configuration data in a model comprises; generating a list of layers for the model including algorithms for determining a characteristic of a layer; generating a list of species for the model within the list of layers; generating a list of results including the results within the list of species; and generating a list of regions of the raw data. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for determining characteristics of a layer on a substrate comprising:
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receiving raw data from an instrument measuring the layer and configuration data including parameters for determining a characteristic of the layer; passing the raw data and the configuration data to an engine to generate an algorithm to determine the characteristic of the layer; receiving results from the engine including the characteristic of the layer; and returning the results to a user; determining the parameters based on an elemental species of the layer and a number of other layers on the substrate; and determining the algorithm using other algorithms selected based on the parameters, wherein the other algorithms are predetermined based on known characteristics of photoelectron species and layers. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A method for determining characteristics of layers on a substrate using photoelectron spectroscopy comprising:
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receiving raw data from an instrument including counts of photoelectrons; receiving configuration data from a user including parameters to determine an algorithm to determine a characteristic of a layer on the substrate; packaging the raw data and the configuration data in a model and passing the model to an engine; receiving results from the engine including the characteristic of the layer, wherein the characteristic is determined using the algorithm; and returning the results to the user, wherein packaging the raw data and the configuration data in the model comprises; generating a list of layers for the model including algorithms for determining the characteristic of the layer; generating a list of species for the model within the list of layers; generating a list of results including the results within the list of species; and generating a list of regions of the raw data. - View Dependent Claims (15, 16, 17, 18)
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19. A machine readable medium having stored thereon executable program code which, when executed, causes a machine to perform a method for determining characteristics of a layer on a substrate, the method comprising:
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receiving raw data from an instrument measuring the layer and configuration data including parameters for determining a characteristic of the layer; passing the raw data and the configuration data to an engine to generate an algorithm to determine the characteristic of the layer; receiving results from the engine including the characteristic of the layer; returning the results to a user; determining the parameters based on an elemental species of the layer and a number of other layers on the substrate; and determining the algorithm using other algorithms selected based on the parameters, wherein the other algorithms are predetermined based on known characteristics of photoelectron species and layers. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification