Techniques for analyzing data generated by instruments

• US 7,231,324 B2
• Filed: 04/29/2005
• Issued: 06/12/2007
• Est. Priority Date: 04/29/2005
• Status: Active Grant

• Current Assignee: Intel Corporation, Nova Measuring Instruments Incorporated (Nova Ltd.)
• Original Assignee: Revera Incorporated (Nova Ltd.)
• Inventors: Schueler, Bruno, Gurer, Emir, Larson, Thomas, Orrock, James, Quigley, James, Bot, Lawrence
• Primary Examiner(s): Barlow; John
• Assistant Examiner(s): Sun; Xiuqin
• Application Number:
  US11/118,683
• Publication Number:
  US 20060247899A1
• Time in Patent Office: 774 Days
• Field of Search: 702/189, 702/182, 205/305
• US Class Current: 702/189
• CPC Class Codes: G01N 23/2273 Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]

Abstract

According to one embodiment of the invention, a method for analyzing data from an instrument is disclosed. The raw data generated by the instrument, along with configuration data generated by a user, is packaged into a calling model. The raw data may include, for example, counts having a certain kinetic energy when analyzing photoelectron spectroscopy data. The configuration data may include several parameters selected by the user based on the composition and configuration of the structure being measured. The calling model may serve as an interface between the instrument and an engine for generating an algorithm for returning desired results to the user. The engine then generates the algorithm as well as the results specified by the user, and the calling model returns the results to the user. This allows a specific algorithm and results for a specific measured sample or structure to be generated using known algorithms and functions.

Claims

1. A method for analyzing data from an instrument comprising:

receiving raw data from the instruments and configuration data from a user including parameters to generate an algorithm;

passing the raw data and the configuration data to an engine to generate the algorithm based on the parameters;

receiving results from the engine based on the raw data, the configuration data, and the algorithm generated by the engine; and

returning the results to the user,

wherein passing the raw data and the configuration data comprises;

packaging the raw data and the configuration data in a model; and

transmitting the model to the engine,

wherein packaging the raw data an the configuration data in a model comprises;

generating a list of layers for the model including algorithms for determining a characteristic of a layer;

generating a list of species for the model within the list of layers;

generating a list of results including the results within the list of species; and

generating a list of regions of the raw data.

2. The method of claim 1, further comprising:

selecting the parameters based on elemental species within and a configuration of a structure measured by the instrument.

3. The method of claim 2, wherein selecting the parameters based on elemental species within and a configuration of a structure comprises:

selecting the parameters based on a number of layers on a substrate and photoelectron species of the layers on the substrate.

4. The method of claim 1, wherein receiving raw data comprises:

receiving counts of photoelectrons having a kinetic energy.

5. The method of claim 4, wherein receiving counts of photoelectrons having a kinetic energy comprises:

generating photoelectrons using X-ray photoelectron spectroscopy (XPS).

6. The method of claim 1, wherein generating a list of layers for the model comprises:

generating the list of layers including thickness algorithms for determining a thickness of the layer and concentration algorithms for determining an atomic concentration of the layer.

7. The method of claim 1, further comprising:

generating a list of custom functions including a list of custom function parameters to execute the custom functions.

8. A method for determining characteristics of a layer on a substrate comprising:

receiving raw data from an instrument measuring the layer and configuration data including parameters for determining a characteristic of the layer;

passing the raw data and the configuration data to an engine to generate an algorithm to determine the characteristic of the layer;

receiving results from the engine including the characteristic of the layer; and

returning the results to a user;

determining the parameters based on an elemental species of the layer and a number of other layers on the substrate; and

determining the algorithm using other algorithms selected based on the parameters,

wherein the other algorithms are predetermined based on known characteristics of photoelectron species and layers.

9. The method of claim 8, wherein the characteristic is selected from a group consisting of:

a thickness of the layer, an atomic concentration of the layer, and a profile of the layer.

10. The method of claim 8, wherein passing the raw data and the configuration data to an engine comprises:

packaging the raw data and the configuration data in a model; and

transmitting the model to the engine.

11. The method of claim 10, wherein packaging the raw data and the configuration data in a model comprises:

generating a list of layers for the model including algorithms for determining the characteristic of the layer;

generating a list of species for the model within the list of layers;

generating a list of results including the results within the list of species; and

generating a list of regions of the raw data.

12. The method of claim 11, wherein generating the list of layers for the model comprises:

generating the list of layers including thickness algorithms for determining a thickness of the layer and concentration algorithms for determining an atomic concentration of the layer.

13. The method of claim 11, further comprising:

generating a list of custom functions including a list of custom function parameters to execute the custom functions.

14. A method for determining characteristics of layers on a substrate using photoelectron spectroscopy comprising:

receiving raw data from an instrument including counts of photoelectrons;

receiving configuration data from a user including parameters to determine an algorithm to determine a characteristic of a layer on the substrate;

packaging the raw data and the configuration data in a model and passing the model to an engine;

receiving results from the engine including the characteristic of the layer, wherein the characteristic is determined using the algorithm; and

returning the results to the user,

wherein packaging the raw data and the configuration data in the model comprises;

generating a list of layers for the model including algorithms for determining the characteristic of the layer;

generating a list of species for the model within the list of layers;

generating a list of results including the results within the list of species; and

generating a list of regions of the raw data.

15. The method of claim 14, wherein generating the list of layers for the model comprises:

generating the list of layers including thickness algorithms for determining a thickness of the layer and concentration algorithms for determining an atomic concentration of the layer.

16. The method of claim 14, wherein receiving raw data comprises:

receiving counts per minute of photoelectrons having a kinetic energy.

17. The method of claim 14, wherein the photoelectron spectroscopy is X-ray photoelectron spectroscopy.

18. The method of claim 14, further comprising:

generating a list of custom functions including a list of custom function parameters to execute the custom functions.

19. A machine readable medium having stored thereon executable program code which, when executed, causes a machine to perform a method for determining characteristics of a layer on a substrate, the method comprising:

receiving raw data from an instrument measuring the layer and configuration data including parameters for determining a characteristic of the layer;

passing the raw data and the configuration data to an engine to generate an algorithm to determine the characteristic of the layer;

receiving results from the engine including the characteristic of the layer;

returning the results to a user;

determining the parameters based on an elemental species of the layer and a number of other layers on the substrate; and

determining the algorithm using other algorithms selected based on the parameters,

wherein the other algorithms are predetermined based on known characteristics of photoelectron species and layers.

20. The machine readable medium of claim 19, wherein the characteristic is selected from a group consisting of:

a thickness of the layer, an atomic concentration of the layer, and a profile of the layer.

21. The machine readable medium of claim 19, wherein passing the raw data and the configuration data to an engine comprises:

packaging the raw data and the configuration data in a model; and

transmitting the model to the engine.

22. The machine readable medium of claim 21, wherein packaging the raw data and the configuration data in a model comprises:

generating a list of layers for the model including algorithms for determining the characteristic of the layer;

generating a list of species for the model within the list of layers;

generating a list of results including the results within the list of species; and

generating a list of regions of the raw data.

23. The machine readable medium of claim 22, wherein generating the list of layers for the model comprises:

generating the list of layers including thickness algorithms for determining a thickness of the layer and concentration algorithms for determining an atomic concentration of the layer.

24. The machine readable medium of claim 22, the method further comprising:

generating a list of custom functions including a list of custom function parameters to execute the custom functions.