Electrostatic valves for microfluidic devices
First Claim
1. A valve structure comprising:
- a first elastomeric layer defining a flow channel having walls and a deflectable ceiling;
a first electrode positioned on top of the first elastomeric layer over the deflectable ceiling of the flow channel;
a second elastomeric layer positioned over the first electrode;
a third elastomeric layer positioned over the second elastomeric layer, the third elastomeric layer defining a control channel having walls and a ceiling, the second elastomeric layer forming a floor of the control channel; and
a second electrode positioned on top of the third elastomeric layer over the control channel, such that application of a potential difference between the first electrode and the second electrode drives the first electrode and the second electrode together, causing the walls of the control channel and of the underlying flow channel to be driven together.
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Accused Products
Abstract
Valve structures formed in elastomer material are electrostatically actuated by applying voltage to a flexible, electrically conductive wire pattern. An actuation force generated between the patterned wire structure and an electrode result in closure of a flow channel formed in elastomer material underlying the wire. In one embodiment of a valve structure in accordance with the present invention, the wire structure is patterned by lithography and etching of a copper/polyimide laminate, with an underlying gold plate positioned on the opposite side of the flow channel serving as an electrode. In an alternative embodiment, a first wire structure is patterned by physically cutting out a first pattern of strips from an Aluminum/Mylar(®) laminate sheet. A second patterned wire structure serving as the electrode is formed by the same method, and positioned on the opposite side of a control channel. Application of an actuation force between the first and second patterned strips closes the control channel and an associated flow channel underlying the control channel.
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Citations
2 Claims
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1. A valve structure comprising:
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a first elastomeric layer defining a flow channel having walls and a deflectable ceiling; a first electrode positioned on top of the first elastomeric layer over the deflectable ceiling of the flow channel; a second elastomeric layer positioned over the first electrode; a third elastomeric layer positioned over the second elastomeric layer, the third elastomeric layer defining a control channel having walls and a ceiling, the second elastomeric layer forming a floor of the control channel; and a second electrode positioned on top of the third elastomeric layer over the control channel, such that application of a potential difference between the first electrode and the second electrode drives the first electrode and the second electrode together, causing the walls of the control channel and of the underlying flow channel to be driven together. - View Dependent Claims (2)
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Specification