Device comprising low outgassing photo or electron beam cured rubbery polymer material
First Claim
1. An optical device comprising at least one lens element and, as lens potting material, a photo or electron beam cured composition of matter consisting essentially of a mixture, a blend or a reaction product of(i) a photo or electron beam curable material component based on a completely or substantially completely hydrogenated hydrocarbon based rubber material having a backbone completely or substantially free of carbon-carbon double and triple bonds;
- (ii) a photoinitiator/photosensitizer component having essentially no volatility at room temperature and also yield photoproducts after exposure to actinic radiation that have minimal or no volatility at room temperature;
(iii) an optional viscosity adjustment component that is either homopolymerizable or is capable of copolymerizing with the photo or electron beam curable material component of (i); and
(iv) an optional inert filler.
1 Assignment
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Accused Products
Abstract
Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.
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Citations
16 Claims
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1. An optical device comprising at least one lens element and, as lens potting material, a photo or electron beam cured composition of matter consisting essentially of a mixture, a blend or a reaction product of
(i) a photo or electron beam curable material component based on a completely or substantially completely hydrogenated hydrocarbon based rubber material having a backbone completely or substantially free of carbon-carbon double and triple bonds; -
(ii) a photoinitiator/photosensitizer component having essentially no volatility at room temperature and also yield photoproducts after exposure to actinic radiation that have minimal or no volatility at room temperature; (iii) an optional viscosity adjustment component that is either homopolymerizable or is capable of copolymerizing with the photo or electron beam curable material component of (i); and (iv) an optional inert filler. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification