×

System and method for detecting liquid flow from a nozzle in a semiconductor processing device

  • US 7,233,015 B2
  • Filed: 11/04/2004
  • Issued: 06/19/2007
  • Est. Priority Date: 11/04/2004
  • Status: Active Grant
First Claim
Patent Images

1. A system for detecting liquid flow from a nozzle in a semiconductor processing device, comprising:

  • a first fiber optic sensor and a second fiber optic sensor located on opposite sides of at least one nozzle, the first fiber optic sensor operable to transmit light, the second fiber optic sensor operable to receive more of the light when the nozzle is not dispensing liquid than when the nozzle is dispensing liquid; and

    an amp coupled to the first fiber optic sensor and second fiber optic sensor and operable to indicate whether the nozzle is dispensing liquid according to an amount of the light received at the second fiber optic sensor.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×