Semiconductor device having pixels

• US 7,233,033 B2
• Filed: 02/11/2004
• Issued: 06/19/2007
• Est. Priority Date: 05/16/1998
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Nagao, Shou, Ohnuma, Hideto, Shionoiri, Yutaka, Koyama, Jun
• Primary Examiner(s): Soward; Ida M.
• Application Number:
  US10/775,327
• Publication Number:
  US 20040160407A1
• Time in Patent Office: 1,224 Days
• Field of Search: 257/57, 257/59, 257/66, 257 72- 73, 257/88, 257/223, 257/291
• US Class Current: 257/223
• CPC Class Codes: G02F 1/13454 Drivers integrated on the active matrix substrate G02F1/136277 takes precedence
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1277 using a crystallisation promoting species, e.g. local introduction of Ni catalyst

Abstract

A small semiconductor display device of low power consumption and with high definition/high resolution/high image quality is provided. The semiconductor display device according to the present invention includes a pixel matrix circuit, a data line driver circuit and scanning line driver circuits, and these components are formed on the same substrate using a polycrystalline TFT. The fabricating method of the device which includes a process for promoting crystallization by a catalytic element and a process for gettering the catalytic element provides the semiconductor display device with high definition/high resolution/high image quality while it is small in size.

Claims

1. A semiconductor device comprising:

a plurality of pixels over a substrate, each pixel comprising a first thin film transistor;

a data line driver circuit over the substrate, comprising a second thin film transistor;

an insulating film over the first thin film transistor and the second thin film transistor;

a film comprising a metal having a light shielding property, and overlapping the first thin film transistor through the insulating film;

a dividing circuit over the substrate, for dividing a signal into n signals, and outputting the n signals to n video input signal lines,

wherein the n signals are inputted into n first thin film transistors corresponding to n pixels among the plurality of pixels by a timing signal supplied from the data driver circuit, simultaneously, and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

2. A semiconductor device according to claim 1, wherein the data line driver circuit comprises a shift register, NAND circuits, a level shifter and a buffer.

3. A semiconductor device according to claim 1, wherein the substrate comprises glass.

4. A semiconductor device according to claim 1, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a personal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

5. A semiconductor device according to claim 1, wherein the first and second thin film transistors comprise polycrystalline silicon film.

6. A semiconductor device according to claim 1, wherein the insulating film comprises a silicon nitride film and a silicon oxide film.

7. A semiconductor device according to claim 1, wherein the metal is titanium.

8. A semiconductor device according to claim 1, wherein the first thin film transistor has a triple gate electrode-structure.

9. A semiconductor device according to claim 1, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length 4 μ

m.

10. A semiconductor device according to claim 1, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

11. A semiconductor device according to claim 1, wherein the data line driver circuit comprises a D/A conversion circuit.

12. A semiconductor device comprising:

a plurality of pixels over a substrate, each pixel comprising a first thin film transistor;

a data line driver circuit comprising a plurality of NAND circuits over the substrate, each NAND comprising a second thin film transistor;

an insulating film over the first thin film transistor and the second thin film transistor;

a film comprising a metal having a light shielding property, and overlapping the first thin film transistor through the insulating film;

a dividing circuit over the substrate, for dividing a signal into n signals, and outputting the n signals to n video input signal lines,

wherein the n signals are inputted into n first thin film transistors corresponding to n pixels among the plurality of pixels by a timing signal supplied from one of the plurality of NAND circuits, simultaneously,and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

13. A semiconductor device according to claim 12, wherein the data line driver circuit further comprises a shift register, a level shifter and a buffer.

14. A semiconductor device according to claim 12, wherein the substrate comprises glass.

15. A semiconductor device according to claim 12, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a ppersonal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

16. A semiconductor device according to claim 12, wherein the first and second thin film transistors comprise polycrystalline silicon film.

17. A semiconductor device according to claim 12, wherein the insulating film comprises a silicon nitride film and a silicon oxide film.

18. A semiconductor device according to claim 12, wherein the metal is titanium.

19. A semiconductor device according to claim 12, wherein the first thin film transistor has a triple gate electrode-structure.

20. A semiconductor device according to claim 12, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length of 4 μ

m.

21. A semiconductor device according to claim 12, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

22. A semiconductor device according to claim 12, wherein the data line driver circuit comprises a D/A conversion circuit.

23. A semiconductor device comprising:

a plurality of pixels over a substrate, each pixel comprising a first thin film transistor;

a data line driver circuit over the substrate, and comprising a second thin film transistor

an insulating film over the first thin film transistor and the second thin film transistor;

a film comprising a metal having a light shielding property, and overlapping the first thin film transistor through the insulating film;

a dividing circuit over the substrate, for dividing three signals corresponding to colors R, G and B into 3n signals, and outputting the 3n signals to 3n video input signal lines,

wherein the 3n signals are inputted into 3n first thin film transistors corresponding to 3n pixels among the plurality of pixels by a timing signal supplied from the data driver circuit, simultaneously, and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

24. A semiconductor device according to claim 23, wherein the data line driver circuit comprises a shift register, NAND circuits, a level shifter and a buffer.

25. A semiconductor device according to claim 23, wherein the substrate comprises glass.

26. A semiconductor device according to claim 23, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a personal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

27. A semiconductor device according to claim 23, wherein the first and second thin film transistors comprise polycrystalline silicon film.

28. A semiconductor device according to claim 23, wherein the insulating film comprises a silicon nitride film and a silicon oxide film.

29. A semiconductor device according to claim 23, wherein the metal is titanium.

30. A semiconductor device according to claim 23, wherein the first thin film transistor has a triple gate electrode-structure.

31. A semiconductor device according to claim 23, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length of 4 μ

m.

32. A semiconductor device according to claim 23, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

33. A semiconductor device according to claim 23, wherein the data line driver circuit comprises a D/A conversion circuit.

34. A semiconductor device comprising:

a plurality of pixels over a substrate, each comprising a first thin film transistor;

a data line driver circuit comprising a plurality of NAND circuits, each NAND comprising a second thin film transistor over the substrate; and

an insulating film over the first thin film transistor and the second thin film transistor;

a film comprising a metal having a light shielding property, and overlapping the first thin film transistor through the insulating film;

a dividing circuit over the substrate, for dividing three signals corresponding to colors R, G and. B into 3n signals, and outputting the 3n signals to 3n video input signal lines,

wherein the 3n signals are inputted into 3n first thin film transistors corresponding to 3n pixels among the plurality of pixels by a timing signal supplied from one of the plurality of NAND circuits, simultaneously, and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

35. A semiconductor device according to claim 34, wherein the data line driver circuit further comprises a shift register, a level shifter and a buffer.

36. A semiconductor device according to claim 34, wherein the substrate comprises glass.

37. A semiconductor device according to claim 34, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a personal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

38. A semiconductor device according to claim 34, wherein the first and second thin film transistors comprise polycrystalline silicon film.

39. A semiconductor device according to claim 34, wherein the insulating film comprises a silicon nitride film and a silicon oxide film.

40. A semiconductor device according to claim 34, wherein the metal is titanium.

41. A semiconductor device according to claim 34, wherein the first thin film transistor has a triple gate electrode-structure.

42. A semiconductor device according to claim 34, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length of 4 μ

m.

43. A semiconductor device according to claim 34, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

44. A semiconductor device according to claim 34, wherein the data line driver circuit comprises a D/A conversion circuit.

45. A semiconductor device comprising:

a plurality of pixels over a substrate, each of the plurality of pixels having a first thin film transistor;

a data line driver circuit over the substrate, and comprising a second thin film transistor; and

a first insulating film over the first thin film transistor and the second thin film transistor;

a second insulating film over the first insulating film;

a film comprising a metal having a light shielding property, provided over the second insulating film, and overlapping the first thin film transistor;

a dividing circuit over the substrate, for dividing a signal into n signals, and outputting the n signals to n video input signal lines,

wherein the n signals are inputted into n first thin film transistors corresponding to n pixels among the plurality of pixels by a timing signal supplied from the data driver circuit, simultaneously, and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

46. A semiconductor device according to claim 45, wherein the data line driver circuit comprises a shift register, NAND circuits, a level shifter and a buffer.

47. A semiconductor device according to claim 45, wherein the substrate comprises glass.

48. A semiconductor device according to claim 45, wherein the first and second thin film transistors comprise polycrystalline silicon film.

49. A semiconductor device according to claim 45, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a personal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

50. A semiconductor device according to claim 45, wherein the first insulating film comprises a silicon nitride film and a silicon oxide film and the second insulating film comprises an organic resin film selected from the group consisting of polyimide, acryl and polyimideamide.

51. A semiconductor device according to claim 45, wherein the metal is titanium.

52. A semiconductor device according to claim 45, wherein the first thin film transistor has a triple gate electrode-structure.

53. A semiconductor device according to claim 45, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length of 4 μ

m.

54. A semiconductor device according to claim 45, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

55. A semiconductor device according to claim 45, wherein the data line driver circuit comprises a D/A conversion circuit.

56. A semiconductor device comprising:

a plurality of pixels over a substrate, each of the plurality of pixels having a first thin film transistor;

a data line driver circuit comprising a plurality of NAND circuits over the substrate, each NAND comprising a second thin film transistor; and

a first insulating film over the first thin film transistor and the second thin film transistor;

a second insulating film over the first insulating film;

a film comprising a metal having a light shielding property, provided over the second insulating film, and overlapping the first thin film transistor;

a dividing circuit over the substrate, for dividing a signal into n signals, and outputting the n signals to n video input signal lines,

wherein the n signals are inputted into n first thin film transistors corresponding to n pixels among the plurality of pixels by a timing signal supplied from one of the plurality of NAND circuits, simultaneously, and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

57. A semiconductor device according to claim 56, wherein the data line driver circuit further comprises a shift register, a level shifter and a buffer.

58. A semiconductor device according to claim 56, wherein the substrate comprises glass.

59. A semiconductor device according to claim 56, wherein the first and second thin film transistors comprise polycrystalline silicon film.

60. A semiconductor device according to claim 56, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a personal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

61. A semiconductor device according to claim 56, wherein the first insulating film comprises a silicon nitride film and a silicon oxide film and the second insulating film comprises an organic resin film selected from the group consisting of polyimide, acryl and polyimideamide.

62. A semiconductor device according to claim 56, wherein the metal is titanium.

63. A semiconductor device according to claim 56, wherein the first thin film transistor has a triple gate electrode-structure.

64. A semiconductor device according to claim 56, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length of 4 μ

m.

65. A semiconductor device according to claim 56, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

66. A semiconductor device according to claim 56, wherein the data line driver circuit comprises a D/A conversion circuit.

67. A semiconductor device comprising:

a plurality of pixels over a substrate, each of the plurality of pixels having a first thin film transistor;

a data line driver circuit over the substrate, and comprising a second thin film transistor;

a first insulating film over the first thin film transistor and the second thin film transistor;

a second insulating film over the first insulating film;

a film comprising a metal having a light shielding property, provided over the second insulating film, and overlapping the first thin film transistor;

a dividing circuit over the substrate, for dividing three signals corresponding to colors R, G and B into 3n signals, and outputting the 3n signals to 3n video input signal lines,

wherein the 3n signals are inputted into 3n first thin film transistors corresponding to 3n pixels among the plurality of pixels by a timing signal supplied from the data driver circuit, simultaneously, and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

68. A semiconductor device according to claim 67, wherein the data line driver circuit comprises a shift register, NAND circuits, a level shifter and a buffer.

69. A semiconductor device according to claim 67, wherein the substrate comprises glass.

70. A semiconductor device according to claim 67, wherein the first and second thin film transistors comprise polycrystalline silicon film.

71. A semiconductor device according to claim 67, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a personal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

72. A semiconductor device according to claim 67, wherein the first insulating film comprises a silicon nitride film and a silicon oxide film and the second insulating film comprises an organic resin film selected from the group consisting of polyimide, acryl and polyimideamide.

73. A semiconductor device according to claim 67, wherein the metal is titanium.

74. A semiconductor device according to claim 67, wherein the first thin film transistor has a triple gate electrode-structure.

75. A semiconductor device according to claim 67, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length of 4 μ

m.

76. A semiconductor device according to claim 67, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

77. A semiconductor device according to claim 67, wherein the data line driver circuit comprises a D/A conversion circuit.

78. A semiconductor device comprising:

a plurality of pixels over a substrate, each of the plurality of pixels having a first thin film transistor;

a data line driver circuit comprising a plurality of NAND circuits over the substrate, each NAND comprising a second thin film transistor;

a first insulating film over the first thin film transistor and the second thin film transistor;

a second insulating film over the first insulating film;

a film comprising a metal having a light shielding property, provided over the second insulating film, and overlapping the first thin film transistor;

a dividing circuit over the substrate, for dividing three signals corresponding to colors R, G and B into 3n signals, and outputting the 3n signals to 3n video input signal lines,

wherein the 3n signals are inputted into 3n first thin film transistors corresponding to 3n pixels among the plurality of by a timing signal supplied from one of the plurality of NAND circuits, simultaneously, and

wherein wirings of the data line driver circuit and the dividing circuit comprise the metal.

79. A semiconductor device according to claim 78, wherein the data line driver circuit further comprises a shift register, a level shifter and a buffer.

80. A semiconductor device according to claim 78, wherein the substrate comprises glass.

81. A semiconductor device according to claim 78, wherein the first and second thin film transistors comprise polycrystalline silicon film.

82. A semiconductor device according to claim 78, wherein the semiconductor device is applied to an electric apparatus selected from the group consisting of a personal computer, a video camera, a mobile computer, a goggle type display, a player apparatus which is equipped with a recording medium for recording a program and a digital camera.

83. A semiconductor device according to claim 78, wherein the first insulating film comprises a silicon nitride film and a silicon oxide film and the second insulating film comprises an organic resin film selected from the group consisting of polyimide, acryl and polyimideamide.

84. A semiconductor device according to claim 78, wherein the metal is titanium.

85. A semiconductor device according to claim 78, wherein the first thin film transistor has a triple gate electrode-structure.

86. A semiconductor device according to claim 78, wherein the second thin film transistor has a maximum operating frequency of 16 MHz when the second thin film transistor has a channel length of 4 μ

m.

87. A semiconductor device according to claim 78, the semiconductor device is a liquid crystal display device having an antiferroelectric liquid crystal material.

88. A semiconductor device according to claim 78, wherein the data line driver circuit comprises a D/A conversion circuit.