Capacity load type probe, and test jig using the same

• US 7,233,156 B2
• Filed: 02/06/2003
• Issued: 06/19/2007
• Est. Priority Date: 02/07/2002
• Status: Expired due to Fees

• Current Assignee: Yokowo Company Limited
• Original Assignee: Yokowo Company Limited
• Inventors: Yanagisawa, Wasuke, Horie, Ryo, Yoshida, Takuto, Nakakoji, Makoto
• Primary Examiner(s): Nguyen; Ha Tran
• Assistant Examiner(s): Nguyen; Tung X.
• Application Number:
  US10/503,669
• Publication Number:
  US 20050088189A1
• Time in Patent Office: 1,594 Days
• Field of Search: 324/754, 324/757, 324761-762, 324/765, 324/158.1, 324/72.5, 439 71- 73
• US Class Current: 324/755.02
• CPC Class Codes: G01R 1/06722 Spring-loaded
• CPC Class Codes: G01R 1/06772 High frequency probes

Abstract

A plurality of probes such as a signal probe (3) and a power supply probe (4) are provided into a metal block (1) so as to penetrate. Each of the probes has a movable pin (11). A tip of the movable pin is projecting from one surface of the metal block (1). And a projection length of the tip is variable. A DUT 20 is pressed onto the surface of the metal block (1) to contact between electrode terminals (21 to 24) and tips of the probes to test characteristics of the DUT. At least one of the probes is capacity loaded probe having a capacitor by providing a dielectric layer and a metal film to peripheral of the probe. As a result, noise can be removed reliably. Additionally, when the capacity loaded probe is used as the power supply probe, a voltage drop is reduced at the power supply terminal in a case of change of the output.

Claims

1. A capacity loaded probe for power supply comprising:

a hollow metal pipe;

a movable pin that slides axially within said hollow metal pipe and is provided in and electrically connected to said hollow metal pipe directly, a projection length of said movable pin projecting from at least one end portion of said hollow metal pipe being variable;

a dielectric layer provided directly on an outer peripheral of said hollow metal pipe; and

a first metal film provided on a surface of said dielectric layer,

wherein a capacitance of 50 pF or more is formed between said movable pin and said first metal film.

3. The capacity loaded probe as set forth in claim 1, wherein said dielectric layer is formed from a film directly deposited on an outer surface of said metal pipe, and said first metal film is formed on said film.

4. The capacity loaded probe as set forth in claim 1, wherein at least two types of capacitances are formed on said metal pipe.

2. A capacity loaded probe comprising:

a hollow metal pipe;

a movable pin that slides axially and is electrically connected to said hollow metal pipe, a projection length of said movable pin projecting from at least one end portion of said hollow metal pipe being variable;

a dielectric layer provided on an outer peripheral of said hollow metal pipe; and

a first metal film provided on a surface of said dielectric layer,

wherein a capacitance of 50 pF or more is formed between said movable pin and said first metal film, and

wherein said dielectric layer is formed from a dielectric cylinder, said first metal film is formed on an outer surface of said dielectric cylinder, a second metal film is formed on an inner surface of said dielectric cylinder, and said second metal film is electrically connected to said metal pipe.

5. The capacity loaded probe as set forth in claim 2, wherein at least two types of capacitances are formed on said hollow metal pipe.