Method and apparatus for a reflective spatial light modulator with a flexible pedestal

• US 7,233,428 B2
• Filed: 04/26/2006
• Issued: 06/19/2007
• Est. Priority Date: 07/28/2004
• Status: Expired due to Fees

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Yang, Xiao
• Primary Examiner(s): Mack; Ricky
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US11/412,263
• Publication Number:
  US 20060187525A1
• Time in Patent Office: 419 Days
• Field of Search: 359/291, 359/290, 359/292, 359/293, 359/295, 359/223, 359/224, 359/320, 359/322, 359/298, 359/220, 359/222
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An electro-mechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region and a tip region. The system also comprises a reflective member coupled to the flexible member, including a reflective surface and a backside region, the backside region being coupled to the second end of the flexible member, the reflective surface being substantially parallel to the surface region while the reflective member is in a first state and being substantially non-parallel to the surface region while the reflective member is in a second state. The flexible member moves from a first position characterized by the first state to a second position characterized by the second state and the angle between the first state and the second state is greater than 12°.

Claims

1. An electromechanical system, comprising:

a substrate comprising a surface region;

a flexible member comprising a first end coupled to the surface region of the substrate, the flexible member comprising a second end and a length defined between the first end and the second end;

a base region within a first portion of the flexible member, the base region being defined from the first end to a first predetermined portion of the length of the flexible member, the base region being characterized by at least a first cross-sectional area, the first cross-sectional area being parallel to the surface region of the substrate;

a tip region within a second portion of the flexible member, the tip region being defined from the second end to a second predetermined portion of the length of the flexible member, the tip region being characterized by at least a second cross-sectional area, the second cross-sectional area being parallel to the surface region of the substrate and being smaller than the first cross-sectional area; and

a reflective member coupled to the flexible member, the reflective member comprising a reflective surface and a backside region, the backside region being coupled to the second end of the flexible member, the reflective surface being substantially parallel to the surface region while the reflective member is in a first state and being substantially non-parallel to the surface region while the reflective member is in a second state;

whereupon the flexible member moves from a first position characterized by the first state to a second position characterized by the second state, the movement of the flexible member from the first position to the second position being constrained to lie in a first plane defined by an axis parallel to the length of the flexible member and an axis parallel to the surface region, wherein an angle between the reflective member in the first state and the reflective member in the second state, measured in the first plane, is less than 12°

.

2. The electro-mechanical system of claim 1 wherein a portion of the reflective member has a reflectance greater than 95%.

3. The electro-mechanical system of claim 2 wherein the reflective member comprises a micro-mirror forming a portion of a micro-mirror array.

4. The electro-mechanical system of claim 1 wherein the flexible member and the reflective member are fabricated from single crystal silicon.

5. The electro-mechanical system of claim 1 wherein the movement of the flexible member from the first position to the second position is constrained to lie in the first plane because a first dimension of the flexible member parallel to the axis parallel to the surface region is less than a second dimension of the flexible member orthogonal to the axis parallel to the length of the flexible member and the axis parallel to the surface region.

6. The electro-mechanical system of claim 5 wherein the first dimension is a cross-sectional width of the flexible member and the second dimension is a cross-sectional length of the flexible member, the product of the cross-sectional width and the cross-sectional length being the first cross-sectional area.

7. The electro-mechanical system of claim 6 wherein the cross-sectional length of the flexible member prevents movement of the flexible member in any plane other than the first plane.

8. The electro-mechanical system of claim 6 wherein the movement of the flexible member from the first position to the second position results in a restoring torque purely orthogonal to the first plane.

9. An electromechanical system, comprising:

a substrate comprising a surface region;

a flexible member comprising a first end coupled to the surface region of the substrate, the flexible member comprising a second end and a length defined between the first end and the second end;

a base region within a first portion of the flexible member, the base region being defined from the first end to a first predetermined portion of the length of the flexible member, the base region being characterized by at least a first cross-sectional area, the first cross-sectional area being parallel to the surface region of the substrate;

a tip region within a second portion of the flexible member, the tip region being defined from the second end to a second predetermined portion of the length of the flexible member, the tip region being characterized by at least a second cross-sectional area, the second cross-sectional area being parallel to the surface region of the substrate and being smaller than the first cross-sectional area; and

a reflective member coupled to the flexible member, the reflective member comprising a reflective surface and a backside region, the backside region being coupled to the second end of the flexible member, the reflective surface being substantially parallel to the surface region while the reflective member is in a first state and being substantially non-parallel to the surface region while the reflective member is in a second state;

whereupon the flexible member moves from a first position characterized by the first state to a second position characterized by the second state, the movement of the flexible member from the first position to the second position being constrained to lie in a first plane defined by an axis parallel to the length of the flexible member and an axis parallel to the surface region, wherein an angle between the reflective member in the first state and the reflective member in the second state, measured in the first plane, is greater than 12°

.

10. The electro-mechanical system of claim 9 wherein a portion of the reflective member has a reflectance greater than 95%.

11. The electro-mechanical system of claim 10 wherein the reflective member comprises a micro-mirror forming a portion of a micro-mirror array.

12. The electro-mechanical system of claim 9 wherein the flexible member and the reflective member are fabricated from single crystal silicon.

13. The electro-mechanical system of claim 9 wherein the movement of the flexible member from the first position to the second position is constrained to lie in the first plane because a first dimension of the flexible member parallel to the axis parallel to the surface region is less than a second dimension of the flexible member orthogonal to the axis parallel to the length of the flexible member and the axis parallel to the surface region.

14. The electro-mechanical system of claim 13 wherein the first dimension is a cross-sectional width of the flexible member and the second dimension is a cross-sectional length of the flexible member, the product of the cross-sectional width and the cross-sectional length being the first cross-sectional area.

15. The electro-mechanical system of claim 14 wherein the cross-sectional length of the flexible member prevents movement of the flexible member in any plane other than the first plane.

16. The electro-mechanical system of claim 14 wherein the movement of the flexible member from the first position to the second position results in a restoring torque purely orthogonal to the first plane.

17. An electro-mechanical system, comprising:

a first substrate comprising a surface region;

a plurality of electrically activated electrodes coupled to the surface region of the first substrate, the plurality of electrically activated electrodes being coupled to an electrical source to receive a first electrical signal;

a plurality of flexible members comprising a first end coupled to the surface region of the first substrate, the members comprising a second end and a length defined between the first end and the second end;

a base region within a first portion of the plurality of flexible members, the base region being defined from the first end to a first predetermined portion of the length of the flexible members, the base region being characterized by at least a first cross-sectional area, the first cross-sectional area being parallel to the surface region of the substrate;

a tip region within a second portion of the plurality of flexible members, the tip region being defined from the second end to a second predetermined portion of the length of the flexible members, the tip region being characterized by at least a second cross-sectional area smaller than the first cross-sectional area; and

a moveable structure, coupled to the plurality of flexible members, comprising a frontside surface and a backside surface, the backside surface being coupled to the second end of the plurality of flexible members, the frontside surface being substantially parallel to the surface region while the moveable structure is in a first state and being substantially non-parallel to the surface region while the moveable structure is in a second state;

whereupon the tip region of the plurality of flexible members moves from a first position characterized by the first state to a second position characterized by the second state upon application of a predetermined voltage bias associated with the first electrical signal, the movement of the tip region of the plurality of flexible members from the first position to the second position being constrained to lie in a plane including an axis parallel to the length of the plurality of flexible members, wherein the moveable structure tilts at an angle of less than 12°

with respect to the first surface upon application of the predetermined voltage bias associated with the first electrical signal.

18. The electro-mechanical system of claim 17 wherein the plurality of flexible members comprise a first flexible member coupled to a first corner of the moveable structure and a second flexible member coupled to a second corner of the moveable structure, the second corner located opposite the first corner.

19. The electro-mechanical system of claim 18 wherein the movement of the tip region of the plurality of flexible members from the first position to the second position is constrained to lie in the plane including the axis parallel to the length of the plurality of flexible members because a dimension of the plurality of flexible members parallel to a line running from the first corner of the moveable structure to the second corner of the moveable structure is greater than a dimension of the plurality of flexible members orthogonal to the line and parallel to the surface region.

20. The electro-mechanical system of claim 18 wherein a portion of the frontside surface of the moveable structure is adapted to reflect incident radiation.

21. The electro-mechanical system of claim 20 wherein the portion of the frontside surface of the moveable structure has a reflectance greater than 95%.

22. The electro-mechanical system of claim 21 wherein the moveable structure comprises an element of an array of micro-mirrors.

23. The electro-mechanical system of claim 17 wherein the plurality of flexible members and the moveable structure are fabricated from single crystal silicon.

24. An electro-mechanical system, comprising:

a first substrate comprising a surface region;

a plurality of electrically activated electrodes coupled to the surface region of the first substrate, the plurality of electrically activated electrodes being coupled to an electrical source to receive a first electrical signal;

a plurality of flexible members comprising a first end coupled to the surface region of the first substrate, the members comprising a second end and a length defined between the first end and the second end;

a base region within a first portion of the plurality of flexible members, the base region being defined from the first end to a first predetermined portion of the length of the flexible members, the base region being characterized by at least a first cross-sectional area, the first cross-sectional area being parallel to the surface region of the substrate;

a tip region within a second portion of the plurality of flexible members, the tip region being defined from the second end to a second predetermined portion of the length of the flexible members, the tip region being characterized by at least a second cross-sectional area smaller than the first cross-sectional area; and

a moveable structure, coupled to the plurality of flexible members, comprising a frontside surface and a backside surface, the backside surface being coupled to the second end of the plurality of flexible members, the frontside surface being substantially parallel to the surface region while the moveable structure is in a first state and being substantially non-parallel to the surface region while the moveable structure is in a second state;

whereupon the tip region of the plurality of flexible members moves from a first position characterized by the first state to a second position characterized by the second state upon application of a predetermined voltage bias associated with the first electrical signal, the movement of the tip region of the plurality of flexible members from the first position to the second position being constrained to lie in a plane including an axis parallel to the length of the plurality of flexible members, wherein the moveable structure tilts at an angle of greater than 12°

with respect to the first surface upon application of the predetermined voltage bias associated with the first electrical signal.

25. The electro-mechanical system of claim 24 wherein the plurality of flexible members comprise a first flexible member coupled to a first corner of the moveable structure and a second flexible member coupled to a second corner of the moveable structure, the second corner located opposite the first corner.

26. The electro-mechanical system of claim 25 wherein the movement of the tip region of the plurality of flexible members from the first position to the second position is constrained to lie in the plane including the axis parallel to the length of the plurality of flexible members because a dimension of the plurality of flexible members parallel to a line running from the first corner of the moveable structure to the second corner of the moveable structure is greater than a dimension of the plurality of flexible members orthogonal to the line and parallel to the surface region.

27. The electro-mechanical system of claim 25 wherein a portion of the frontside surface of the moveable structure is adapted to reflect incident radiation.

28. The electro-mechanical system of claim 27 wherein the portion of the frontside surface of the moveable structure has a reflectance greater than 95%.

29. The electro-mechanical system of claim 28 wherein the moveable structure comprises an element of an array of micro-mirrors.

30. The electro-mechanical system of claim 24 wherein the plurality of flexible members and the moveable structure are fabricated from single crystal silicon.