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Radiation window and method of manufacture

  • US 7,233,647 B2
  • Filed: 04/25/2006
  • Issued: 06/19/2007
  • Est. Priority Date: 09/13/2002
  • Status: Expired due to Term
First Claim
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1. A window device configured to transmit radiation, the device comprising:

  • a) a support configured to be subject to a substantial vacuum, including a nickel material, and having an opening configured to transmit radiation therethrough;

    b) a film, mounted directly on the support across the opening, having a material and a thickness selected to transmit soft x-rays, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum, and the film including a native oxide forming a polar surface on the film;

    c) an adhesive, directly adhering the film to the support, including a polyimide configured to chemically react with the nickel material of the support to form covalent bonds;

    d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, including a material having a polarity approximately the same as the polarity of the film to facilitate adherence of the coating to the film, and covering a portion of the support surrounding the film; and

    e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum.

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