Radiation window and method of manufacture

• US 7,233,647 B2
• Filed: 04/25/2006
• Issued: 06/19/2007
• Est. Priority Date: 09/13/2002
• Status: Expired due to Term

• Current Assignee: Moxtek Inc (Nippon Kayaku Company Limited)
• Original Assignee: Moxtek Inc (Nippon Kayaku Company Limited)
• Inventors: Decker, Keith W., Turner, D. Clark, Roberts, M. Christine, Stillwell, Robert N.
• Primary Examiner(s): THOMAS, COURTNEY D
• Application Number:
  US11/411,996
• Publication Number:
  US 20060280291A1
• Time in Patent Office: 420 Days
• Field of Search: 378/140, 378/161
• US Class Current: 378/140
• CPC Class Codes: G21K 1/10 Scattering devices; Absorbing devices; Ionising radiation filters
• CPC Class Codes: G21K 5/04 with beam-forming means
• CPC Class Codes: H01J 2235/183 Multi-layer structures
• CPC Class Codes: H01J 33/04 Windows
• CPC Class Codes: H01J 35/18 Windows
• CPC Class Codes: H01J 5/18 Windows permeable to X-rays, gamma-rays, or particles
• CPC Class Codes: H01J 5/24 between insulating parts of vessel
• CPC Class Codes: H01J 9/26 Sealing together parts of vessels

Abstract

A radiation window device to transmit radiation as part of an x-ray source or detector includes a support to be subject to a substantial vacuum, and an opening configured to transmit radiation. A film is mounted directly on the support across the opening, and has a material and a thickness selected to transmit soft x-rays. An adhesive directly adheres the film to the support. A coating covers exposed portions of at least one of the evacuated or ambient sides of the film, and covers a portion of the support surrounding the film. The support, film and adhesive form a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum. In addition, the vacuum tight assembly can withstand a temperature of greater than approximately 250 degrees Celsius.

Claims

1. A window device configured to transmit radiation, the device comprising:

a) a support configured to be subject to a substantial vacuum, including a nickel material, and having an opening configured to transmit radiation therethrough;

b) a film, mounted directly on the support across the opening, having a material and a thickness selected to transmit soft x-rays, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum, and the film including a native oxide forming a polar surface on the film;

c) an adhesive, directly adhering the film to the support, including a polyimide configured to chemically react with the nickel material of the support to form covalent bonds;

d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, including a material having a polarity approximately the same as the polarity of the film to facilitate adherence of the coating to the film, and covering a portion of the support surrounding the film; and

e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum.

2. A device in accordance with claim 1, wherein the film is directly adhered to the support without any stress-relief structure.

3. A device in accordance with claim 1, wherein the coating also covers an exposed portion of the adhesive.

4. A device in accordance with claim 1, wherein the coating covers exposed portions of both the evacuated and ambient sides of the film.

5. A device in accordance with claim 1, wherein the adhesive includes an organic material, and wherein the coating includes an inorganic material.

6. A device in accordance with claim 1, wherein the vacuum tight assembly is configured to withstand a temperature greater than approximately 250 degrees Celsius during manufacturing.

7. A device in accordance with claim 1, wherein the film and the adhesive include polar materials, and wherein the adhesive has sufficiently low viscosity to fill grain boundary gaps in the film by capillary action to form mechanical bonds.

8. A device in accordance with claim 7, wherein the film includes a beryllium material.

9. A device in accordance with claim 1, wherein the material and the thickness of the film transmits at least 10% of incident radiation of wavelength longer than 18.5 angstroms.

10. A device in accordance with claim 1, wherein the support forms part of a sealed, evacuated chamber;

and further comprising an x-ray detector or an x-ray source.

11. A device in accordance with claim 1, wherein the film includes a beryllium material having a thickness less than approximately 23 micrometers.

12. A window device configured to transmit radiation, the device comprising:

a) a support configured to be subject to a substantial vacuum, including a nickel material, and having an opening configured to transmit radiation therethrough;

b) a film, mounted directly on the support across the opening, including a beryllium material, and having a thickness less than approximately 23 micrometers, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum, and the film including a native oxide forming a polar surface on the film;

c) an adhesive, adhering the film to the support, including a polymeric material configured to chemically react with the nickel material of the support to form covalent bonds; and

d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, including a material having a polarity approximately the same as the polarity of the film to facilitate adherence of the coating to the film, and covering a portion of the support surrounding the film, the coating including a boron-hydrogen composition; and

e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum.

13. A device in accordance with claim 12, wherein the film is directly adhered to the support without any stress-relief structure.

14. A device in accordance with claim 12, wherein the coating also covers an exposed portion of the adhesive.

15. A device in accordance with claim 12, wherein the coating covers exposed portions of both the evacuated and ambient sides of the film.

16. A device in accordance with claim 12, wherein the film includes a beryllium oxide covering that makes the surface polar and is covered by the coating.

17. A device in accordance with claim 12, wherein the support includes a material selected from the group consisting of:

monel, kovar, stainless steel and nickel; and

wherein the adhesive chemically reacts with the material of the support to form covalent bonds.

18. A device in accordance with claim 12, wherein the adhesive has sufficiently low viscosity to fill grain boundary gaps in the film by capillary action to form mechanical bonds.

19. A device in accordance with claim 12, wherein the film transmits at least 10% of incident radiation of wavelength longer than 18.5 angstroms.

20. A device in accordance with claim 12, wherein the support forms part of a sealed, evacuated chamber;

and further comprising an x-ray detector or an x-ray source.

21. A device in accordance with claim 12, further comprising:

the vacuum tight assembly being configured to withstand a temperature greater than approximately 250 degrees Celsius during manufacturing.

22. A method for making a radiation window device, comprising the steps of:

a) applying a liquid polyimide adhesive to an area of contact between a beryllium film and a support, the support including a nickel material that chemically reacts with the polyimide adhesive to form covalent bonds;

b) disposing the film on the support and across an opening in the support;

c) applying a temperature greater than approximately 250 degrees Celsius to the adhesive, the film and the support to cure the adhesive; and

d) coating an exposed portion of the film with a boron-hydrogen composition on at least i) an evacuated side of the film configured to face a substantial vacuum, or ii) an ambient side of the film configured to face away from the substantial vacuum, the boron hydrogen composition having a polarity approximately the same as a polarity of a native oxide of the beryllium film to facilitate adherence of the coating to the film.

23. A method in accordance with claim 22, wherein the step of applying a temperature further includes applying a temperature greater than approximately 450 degrees Celsius.

24. A method in accordance with claim 22, wherein the step of coating further includes using chemical vapor deposition to apply the boron-hydrogen composition.

25. A method in accordance with claim 22, wherein the step of coating further includes coating exposed portions of the film on both the evacuated and ambient sides of the film.