Gate valve
First Claim
Patent Images
1. A gate valve including:
- a valve body having a transfer chamber opening and a process chamber opening formed in mutually opposing walls thereof, respectively; and
a transfer chamber-side valve element and a process chamber-side valve element provided in said valve body, said transfer chamber-side valve element and process chamber-side valve element being connected to a single shaft;
wherein said transfer chamber-side valve element and said process chamber-side valve element are controlled by actuation of said single shaft so that said transfer chamber-side valve element closes said transfer chamber opening, or said process chamber-side valve element closes said process chamber opening, or both said transfer chamber-side valve element and said process chamber-side valve element fully open said transfer chamber opening and said process chamber opening, respectively, to allow an object to pass there through;
said gate valve comprising;
a rotary latch pivotably supported on an inner surface of at least one of said process chamber-side valve element and said transfer chamber-side valve element, said rotary latch having a latch surface at a forward end thereof;
wherein when a rotational force is applied to said rotary latch in one direction, said latch surface is pressed against a joint surface of said single shaft, whereby said at least one of said process chamber-side valve element and said transfer chamber-side valve element is latched to said single shaft, and when a rotational force is applied to said rotary latch in a direction opposite to said one direction, said latch surface is separated from said joint surface of said single shaft to unlatch said at least one of said process chamber-side valve element and said transfer chamber-side valve element.
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Accused Products
Abstract
A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft. A rotary latch pivotably supported on an inner surface of one of the valve element with the rotary latch having a latch surface at a forward end thereof, wherein when a rotational force is applied to the rotary latch in one direction, the latch surface is pressed against a joint surface of the single shaft, whereby the valve element is latched to said single shaft, and when a rotational force is applied to the rotary latch in the opposite direction, the latch surface is separated from the joint surface of the single shaft to unlatch the valve element.
20 Citations
8 Claims
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1. A gate valve including:
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a valve body having a transfer chamber opening and a process chamber opening formed in mutually opposing walls thereof, respectively; and a transfer chamber-side valve element and a process chamber-side valve element provided in said valve body, said transfer chamber-side valve element and process chamber-side valve element being connected to a single shaft; wherein said transfer chamber-side valve element and said process chamber-side valve element are controlled by actuation of said single shaft so that said transfer chamber-side valve element closes said transfer chamber opening, or said process chamber-side valve element closes said process chamber opening, or both said transfer chamber-side valve element and said process chamber-side valve element fully open said transfer chamber opening and said process chamber opening, respectively, to allow an object to pass there through; said gate valve comprising; a rotary latch pivotably supported on an inner surface of at least one of said process chamber-side valve element and said transfer chamber-side valve element, said rotary latch having a latch surface at a forward end thereof; wherein when a rotational force is applied to said rotary latch in one direction, said latch surface is pressed against a joint surface of said single shaft, whereby said at least one of said process chamber-side valve element and said transfer chamber-side valve element is latched to said single shaft, and when a rotational force is applied to said rotary latch in a direction opposite to said one direction, said latch surface is separated from said joint surface of said single shaft to unlatch said at least one of said process chamber-side valve element and said transfer chamber-side valve element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification