Molecular detection device and chip including MOSFET

• US 7,235,389 B2
• Filed: 04/23/2002
• Issued: 06/26/2007
• Est. Priority Date: 04/23/2001
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Park, Chin-Sung, Lim, Geun-Bae, Kim, Sun-Hee, Cho, Yoon-Kyoung
• Primary Examiner(s): FORMAN, BETTY J
• Application Number:
  US10/239,736
• Publication Number:
  US 20030102510A1
• Time in Patent Office: 1,890 Days
• Field of Search: None
• US Class Current: 435/174
• CPC Class Codes: B01J 2219/00497 Features relating to the solid phase supports
• CPC Class Codes: B01J 2219/00511 Walls of reactor vessels
• CPC Class Codes: B01J 2219/00585 Parallel processes
• CPC Class Codes: B01J 2219/00596 Solid-phase processes
• CPC Class Codes: B01J 2219/00653 the compounds being bound to electrodes embedded in or on the solid supports
• CPC Class Codes: B01J 2219/00657 One-dimensional arrays
• CPC Class Codes: B01J 2219/00659 Two-dimensional arrays
• CPC Class Codes: B01J 2219/00677 Ex-situ synthesis followed by deposition on the substrate
• CPC Class Codes: B01J 2219/00722 Nucleotides
• CPC Class Codes: B01J 2219/00725 Peptides
• CPC Class Codes: B01J 2219/00729 Peptide nucleic acids [PNA]
• CPC Class Codes: B01J 2219/00731 Saccharides
• CPC Class Codes: B01J 2219/00743 Cells
• CPC Class Codes: B01L 3/5027 by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip B01L3/5023 takes precedence; micromixers B01F33/30; microreactors for synthesis B01J19/0093; microcapillary devices in general B81B1/00
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C12Q 1/6837 using probe arrays or probe chips C12Q1/6874 takes precedence
• CPC Class Codes: C12Q 2565/607 being a sensor, e.g. electrode
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: G01N 33/5438 : Electrodes

Abstract

A molecular detection chip including a metal oxide silicon-field effect transistor (MOSFET) on sidewalls of a micro-fluid channel and a molecular detection device including the molecular detection chip are provided. A molecular detection method, particularly, qualification methods for the immobilization of molecular probes and the binding of a target sample to the molecular probes, using the molecular detection device, and a nucleic acid mutation assay device and method are also provided. The formation of the MOSFET on the sidewalls of the micro-fluid channel makes easier to highly integrate a molecular detection chip. In addition, immobilization of probes directly on the surface of a gate electrode ensures the molecular detection chip to check for the immobilization of probes and coupling of a target molecule to the probes in situ.

Claims

1. A molecular detection chip comprising:

a semiconductor substrate;

a micro-fluid channel serving as a flow path of a molecular sample and formed in the semiconductor substrate, wherein the micro-fluid channel has sidewalls comprising at least one convex corner; and

a metal oxide silicon field-effect transistor (MOSFET) on the sidewalls of the micro-fluid channel, wherein the MOSFET comprises a channel region formed in the convex corner, a source region and a drain region spaced apart from each other and formed in the sidewalls of the convex corner and a gate electrode formed on the channel region.

2. The molecular detection chip of claim 1, wherein thiol-substituted probes are immobilized as self assembled monolayers on the surface of the gate electrode.

3. The molecular detection chip of claim 1, wherein the molecular sample comprises nucleic acids, proteins, enzyme substrates, adjuvants, or oligosaceharides.

4. The molecular detection chip of claim 3, wherein the nucleic acids comprise single-stranded deoxyribonucleic acids (DNAs), single-stranded ribonucleic acids (RNAs), or single-stranded peptide nucleic acids (PNAs).

5. The molecular detection chip of claim 3, wherein the proteins comprise agonists to cell membrane receptors, antagonists to cell membrane receptors, toxins, virus epitopes, hormones, peptides, enzymes, or monoclonal antibodies.

6. The molecular detection chip of claim 1, wherein the gate electrode of the MOSFET is formed of a thin gold (Au) layer.

7. A molecular detection device comprising:

a substrate;

a molecular-sample loading unit formed on the surface of the substrate;

at least one micro-fluid channel having one end connected to the molecular-sample loading unit and serving as a flow path for a molecular sample, wherein the micro-fluid channel has sidewalls comprising at least one convex corner; and

a metal oxide silicon-field effect transistor (MOSFET) sensor connected to the other end of the micro-fluid channel and on which a molecular probe is immobilized, wherein the MOSFET comprises a channel region formed in the convex corner, a source region and a drain region spaced apart from each other and formed in the sidewalls of the convex corner and a gate electrode formed on the channel region.

8. The molecular detection device of claim 7, wherein the gate electrode of the MOSFET is formed of a thin gold (Au) layer.

9. A nucleic acid mutation assay device comprising:

a

substrate;

a sample loading unit formed on the surface of the substrate;

a micro-fluid channel directly connected to the sample loading unit to serve as a sample flow path, wherein the micro-fluid channel has sidewalls comprising at least one convex corner; and

at least one thermal control and detection unit formed in the micro-fluid channel and including a metal oxide silicon-field effect transistor (MOSFET) sensor for nucleic acid immobilization, a heater, and a thermal sensor, wherein the MOSFET comprises a channel region formed in the convex corner, a source region and a drain region spaced apart from each other and formed in the sidewalls of the convex corner and a gate electrode formed on the channel region.

10. The nucleic acid mutation assay device of claim 9, wherein the metal oxide silicon-field effect transistor sensor is implemented as part of a molecular detection chip comprising:

a semiconductor substrate; and

a micro-fluid channel serving as a flow path of a molecular sample and formed in the semiconductor substrate, wherein the metal oxide silicon field-effect transistor (MOSFET) is on sidewalls of the micro-fluid channel.

11. The nucleic acid mutation assay device of claim 10, wherein the molecular sample comprises nucleic acids, proteins, enzyme substrates, adjuvants, or oligosaccharides.

12. The nucleic acid mutation assay device of claim 11, wherein the nucleic acids comprise single-stranded deoxyribonucleic acids (DNAs), single-stranded ribonucleic acids (RNAs), or single-stranded peptide nucleic acids (PNAs).

13. The nucleic acid mutation assay device of claim 11, wherein the proteins comprise agonists to cell membrane receptors, antagonists to cell membrane receptors, toxins, virus epitopes, hormones, peptides, enzymes, or monoclonal antibodies.

14. The nucleic acid mutation assay device of claim 9, wherein thiol-substituted probes are immobilized as self assembled monolayers on the surface of the gate electrode.

15. The nucleic acid mutation assay device of claim 9, wherein the heater and the thermal sensor are located adjacent to the metal oxide silicon-field effect transistor sensor and control a temperature which is significant to the nucleic acid immobilized on the metal oxide silicon-field effect transistor sensor, and the metal oxide silicon-field effect transistor sensor detects denaturated or renaturated double-stranded nucleic acid at the melting point T_m of the immobilized nucleic acid.

16. The nucleic acid mutation assay device of claim 9, wherein the gate electrode of the MOSFET is formed of a thin gold (Au) layer.

17. A molecular detection chip comprising:

a substrate;

a micro-fluid channel serving as a flow path of a molecular sample and formed in the substrate, wherein the micro-fluid channel has sidewalls comprising at least one convex corner; and

a metal oxide silicon field-effect transistor (MOSFET) on the sidewalls of the micro-fluid channel, wherein the MOSFET comprises a channel region formed in the convex corner, a source region and a drain region spaced apart from each other and formed in the sidewalls of the convex corner and a gate electrode formed on the channel region, wherein thiol-substituted probes are immobilized as self-assembled monolayers on a surface of the gate electrode of the MOSFET.