Low temperature etchant for treatment of silicon-containing surfaces

• US 7,235,492 B2
• Filed: 01/31/2005
• Issued: 06/26/2007
• Est. Priority Date: 01/31/2005
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Samoilov, Arkadii V.
• Primary Examiner(s): DEO, DUY VU NGUYEN
• Application Number:
  US11/047,323
• Publication Number:
  US 20060169668A1
• Time in Patent Office: 876 Days
• Field of Search: None
• US Class Current: 438/714
• CPC Class Codes: B08B 7/0035 by radiant energy, e.g. UV, laser, light beam or the like
• CPC Class Codes: H01L 21/02019 Chemical etching
• CPC Class Codes: H01L 21/02046 Dry cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/02057 Cleaning during device manufacture
• CPC Class Codes: H01L 21/02381 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02529 Silicon carbide
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/02658 Pretreatments cleaning in general H01L21/02041
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/823425 manufacturing common source or drain regions between a plurality of conductor-insulator-semiconductor structures
• CPC Class Codes: H01L 21/823807 with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
• CPC Class Codes: H01L 21/823814 with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures

Abstract

In one embodiment of the invention, a method for finishing or treating a silicon-containing surface is provided which includes removing contaminants and/or smoothing the surface contained on the surface by a slow etch process (e.g., about <100 Å/min). The silicon-containing surface is exposed to an etching gas that contains an etchant, a silicon source and a carrier gas. Preferably, the etchant is chlorine gas so that a relatively low temperature (e.g., <800° C.) is used during etching or smoothing processes. In another embodiment of the invention, a method for etching a silicon-containing surface during a fast etch process (e.g., about >100 Å/min) is provided which includes removing silicon-containing material to form a recess in a source/drain (S/D) area on the substrate. The silicon-containing surface is exposed to an etching gas that contains an etchant, preferably chlorine, a carrier gas and an optional silicon source.

Claims

1. A method of etching a silicon-containing material on a substrate surface, comprising:

positioning a substrate comprising the silicon-containing material containing a contaminant into a process chamber;

exposing the silicon-containing material to an etching gas comprising chlorine gas, a silicon source and a carrier gas at a temperature less than 800°

C.; and

removing the contaminant and a predetermined thickness of the silicon-containing material.

2. The method of claim 1, wherein the silicon-containing material is removed at a rate in a range from about 2 Å

per minute to about 20 Å

per minute.

3. The method of claim 2, wherein the process chamber is maintained at a temperature in a range from about 500°

C. to about 700°

C.

4. The method of claim 3, wherein the carrier gas is selected from the group consisting of nitrogen, argon, helium and combinations thereof.

5. The method of claim 4, wherein the silicon source is selected from the group consisting of silane, disilane, dichlorosilane, tetrachlorosilane, hexachlorodisilane, derivatives thereof and combinations thereof.

6. The method of claim 5, wherein the carrier gas is nitrogen and the silicon source is silane.

7. The method of claim 2, wherein an epitaxy deposition process is conducted in the process chamber after the removing step.

8. The method of claim 7, wherein the contaminant is selected from the group consisting of oxides, fluorides, chlorides, nitrides, organic residues, carbon, derivatives thereof and combinations thereof.

9. The method of claim 8, wherein the substrate is exposed to a wet clean process prior to positioning into the process chamber.

10. The method of claim 9, wherein the substrate is exposed to ambient conditions for a period of time in a range from about 6 hours to about 24 hours after the wet clean process and before positioning into the process chamber.

11. The method of claim 8, wherein the silicon-containing material further comprises a rough surface that is removed during the removing step.

12. The method of claim 1, wherein the step of removing further comprises:

forming a recess in a source and drain area on the substrate.

13. A method of smoothing a silicon-containing material on a substrate surface, comprising:

positioning a substrate into a process chamber, wherein the substrate contains a silicon-containing material comprising a first surface roughness of about 1 nm RMS or greater;

exposing the silicon-containing material to an etching gas comprising an etchant, a silicon source and a carrier gas at a temperature less than 800°

C.; and

redistributing the silicon-containing material to form a second surface roughness of less than about 1 nm RMS.

14. The method of claim 13, wherein a predetermined thickness of the silicon-containing material is removed at a rate in a range from about 2 Å

per minute to about 20 Å

per minute.

15. The method of claim 13, wherein the process chamber is maintained at a temperature in a range from about 500°

C. to about 700°

C.

16. The method of claim 15, wherein the carrier gas is selected from the group consisting of nitrogen, argon, helium and combinations thereof.

17. The method of claim 16, wherein the silicon source is selected from the group consisting of silane, disilane, dichlorosilane, tetrachlorosilane, hexachlorodisilane, derivatives thereof and combinations thereof.

18. The method of claim 17, wherein the etchant is selected from the group consisting of chlorine, chlorine trifluoride, tetrachlorosilane, derivatives thereof and combinations thereof.

19. The method of claim 18, wherein the carrier gas is nitrogen, the silicon source is silane and the etchant is chlorine gas.

20. The method of claim 15, wherein an epitaxy deposition process is conducted in the process chamber after the redistributing step.

21. The method of claim 20, wherein the silicon-containing material further comprises a contaminant that is removed during the redistributing step and the contaminant is selected from the group consisting of oxides, fluorides, chlorides, nitrides, organic residues, carbon, derivatives thereof and combinations thereof.

22. The method of claim 20, wherein the substrate is exposed to a wet clean process prior to positioning into the process chamber.

23. The method of claim 22, wherein the substrate is exposed to ambient conditions for a period of time in a range from about 6 hours to about 24 hours after the wet clean process and before positioning into the process chamber.

24. The method of claim 13, wherein the step of redistributing further comprises:

forming a recess in a source and drain area on the substrate.

25. A method of etching a silicon-containing monocrystalline material on a substrate comprising at least a second material selected from the group consisting of a nitride material, an oxide material or combinations thereof, comprising:

positioning a substrate into a process chamber;

exposing the substrate to an etching gas comprising chlorine gas and a carrier gas at a temperature less than 800°

C.;

removing a predetermined thickness of the silicon-containing monocrystalline material to form an exposed monocrystalline surface; and

depositing an epitaxy layer on the exposed monocrystalline surface in the process chamber.

26. The method of claim 25, wherein the etching gas further comprises a silicon source selected from the group consisting of silane, disilane, dichlorosilane, tetrachlorosilane, hexachlorodisilane, derivatives thereof and combinations thereof.

27. The method of claim 25, wherein the process chamber is maintained at a temperature in a range from about 500°

C. to about 700°

C.

28. The method of claim 27, wherein the carrier gas is selected from the group consisting of nitrogen, argon, helium and combinations thereof.

29. The method of claim 28, wherein the predetermined thickness of the monocrystalline material is removed at a rate in a range from about 200 Å

per minute to about 1,000 Å

per minute.

30. The method of claim 29, wherein the process chamber is maintained at a pressure in a range from about 10 Torr to about 750 Torr.

31. The method of claim 30, wherein the epitaxial layer comprises a material selected from the group consisting of silicon, silicon-germanium, silicon-carbon, silicon-germanium-carbon, derivatives thereof and combinations thereof.

32. The method of claim 25, wherein removing the predetermined thickness of the silicon-containing monocrystalline material forms a recess formation within a source/drain area on the substrate.

33. The method of claim 32, wherein the source/drain area is used within a device selected from the group consisting of CMOS, Bipolar or BiCMOS application.

34. The method of claim 25, wherein the step of removing further comprises:

forming a recess in a source and drain area on the substrate.

35. A method of forming a silicon-containing monocrystalline material on a substrate, comprising:

exposing a substrate to a HF-last wet clean process;

positioning the substrate into a process chamber;

exposing the substrate to an etching gas comprising chlorine gas and a carrier gas at a temperature less than 800°

C.;

removing a predetermined thickness of the silicon-containing monocrystalline material to form an exposed monocrystalline surface;

depositing an epitaxy layer on the exposed monocrystalline surface in the process chamber; and

cleaning the process chamber with the chlorine gas to remove silicon-containing contaminant adhered thereon.

36. The method of claim 35, wherein the epitaxy layer is deposited by a deposition gas containing the chlorine gas.

37. The method of claim 36, wherein the carrier gas is nitrogen.

38. The method of claim 37, wherein nitrogen is co-flowed with the chlorine in the deposition gas and during the process chamber clean step.

39. The method of claim 35, wherein the step of removing further comprises:

forming a recess in a source and drain area on the substrate.

40. The method of claim 35, wherein the process chamber is maintained at a temperature in a range from about 500°

C. to about 700°

C.