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Digital optical switch apparatus and process for manufacturing same

  • US 7,236,279 B2
  • Filed: 10/18/2002
  • Issued: 06/26/2007
  • Est. Priority Date: 10/19/2001
  • Status: Expired due to Term
First Claim
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1. A micro-machined device comprising:

  • a) a housing;

    b) a support structure coupled to the housing;

    c) a mass coupled to the support structure by a pair of single-gimbaled structures for providing rotational movement of the mass about first and second axes of rotation; and

    d) a plurality of electrodes coupled to the housing in a diagonal relationship, one or more of the plurality of the electrodes capable of being energized with electrical power to provide a selectable force to the mass for moving the mass in one of a plurality of angular directions to a discrete stopping position for digital positioning of the mass to one of a plurality of digital switching positions.

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