Gantry-type XY stage

• US 7,239,161 B2
• Filed: 10/28/2004
• Issued: 07/03/2007
• Est. Priority Date: 07/30/2004
• Status: Expired due to Fees

• Current Assignee: Laserfront Technologies Incorporated
• Original Assignee: Laserfront Technologies Incorporated
• Inventors: Mitobe, Kazuhiko, Iwanaga, Yasushi
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US10/974,753
• Publication Number:
  US 20060023206A1
• Time in Patent Office: 978 Days
• Field of Search: 324/758, 324/757, 324/158.1, 356/244, 250/442.11
• US Class Current: 324/750.19
• CPC Class Codes: B23K 26/0876 in at least two axial directions
• CPC Class Codes: G02B 7/005 Motorised alignment
• CPC Class Codes: G03F 7/70716 Stages

Abstract

Nine vibration isolating mounts are disposed on a pedestal, and a granite plate is placed thereon. A pair of guide bases are disposed on the granite plate, and disposed thereon are a pair of posts made of CFRP for movements in a Y-direction relative to the granite plate. A beam made of CFRP is extended between the pair of posts. Further, a movement base is disposed for movement in an X-direction relative to the beam, and a laser optical unit is mounted on the movement base.

Claims

1. A gantry-type XY stage comprising:

a granite plate;

a pair of posts made of a first composite material having a Young'"'"'s modulus of 200 GPa or more, disposed on said granite plate, and spaced apart from one another in a first direction parallel to a top of said granite plate for movements in a second direction intersecting with the first direction;

a beam made of a second composite material having a Young'"'"'s modulus of 200 GPa or more, extended between said pair of posts;

a movement base disposed for movements in the first direction relative to said beam;

said beam is a hollow body comprising a shell formed with a first hole through a top thereof, and

said gantry-type XY stage comprises;

a linear guide bearing for guiding movements of said movement base which is made of a metal or an alloy, disposed on the top of said beam, and formed with a second hole at a position in alignment to said first hole;

a backing member made of a metal or an alloy, disposed at a position opposite to said linear guide bearing across said shell within said beam, and formed with a third hole at a position in alignment to said first hole; and

a securing member for securing said linear guide bearing to said beam through said second hole, said first hole and said third hole.

2. The gantry-type XY stage according to claim 1, wherein at least one of said first and second composite materials is carbon fiber reinforced plastics.

3. The gantry-type XY stage according to claim 1, wherein:

said third hole is a threaded hole, and said securing member is a bolt screwed into said threaded hole.

4. The gantry-type XY stage according to claim 1, comprising a supporting member made of said second composite material, and extending in a vertical direction within said beam.

5. The gantry-type XY stage according to claim 1, wherein a top of said beam and bottoms of said posts are ground after said beam is bonded to said posts.

6. The gantry-type XY stage according to claim 1, installed in a defect testing apparatus for liquid crystal displays.

7. The gantry-type XY stage according to claim 1, installed in a defect testing apparatus for semiconductor devices.

8. The gantry-type XY stage according to claim 1, comprising a laser irradiator fixed to said movement base.

9. The gantry-type XY stage according to claim 8, installed in a laser repair apparatus for liquid crystal displays.

10. The gantry-type XY stage according to claim 8, installed in a laser repair apparatus for liquid crystal masks.

11. The gantry-type XY stage according to claim 8, installed in a patterning apparatus for solar cell panels.