Miniature RF and microwave components and methods for fabricating such components
First Claim
1. A coaxial RF or microwave component that guides or controls a desired radiation, comprising:
- a. at least one RF or microwave radiation entry port in a conductive structure;
b. at least one RF or microwave radiation exit port in the conductive structure;
c. at least one passage substantially bounded on the sides by the conductive structure through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;
d. a central conductor extending along a length of the at least one passage from the entry port to the exit port; and
wherein the conductive structure includes one or more apertures which extend from the passage to an outer region, wherein the apertures have cross-sectional dimensions that are no larger than the greater of 1/10 of a wavelength of the desired radiation or 200 microns, wherein the apertures are not intended to pass a significant amount of the desired radiation, and wherein the apertures are provided at locations where an electric field at the surface of the conductive structure when in use is less than about 20% of its maximum value within the passage.
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Accused Products
Abstract
RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, antennae, transmission lines, filters, hybrid couplers, antenna arrays and/or other active or passive components. Components may include non-radiation-entry and non-radiation-exit channels that are useful in separating sacrificial materials from structural materials. Preferred formation processes use electrochemical fabrication techniques (e.g. including selective depositions, bulk depositions, etching operations and planarization operations) and post-deposition processes (e.g. selective etching operations and/or back filling operations).
167 Citations
34 Claims
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1. A coaxial RF or microwave component that guides or controls a desired radiation, comprising:
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a. at least one RF or microwave radiation entry port in a conductive structure; b. at least one RF or microwave radiation exit port in the conductive structure; c. at least one passage substantially bounded on the sides by the conductive structure through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port; d. a central conductor extending along a length of the at least one passage from the entry port to the exit port; and wherein the conductive structure includes one or more apertures which extend from the passage to an outer region, wherein the apertures have cross-sectional dimensions that are no larger than the greater of 1/10 of a wavelength of the desired radiation or 200 microns, wherein the apertures are not intended to pass a significant amount of the desired radiation, and wherein the apertures are provided at locations where an electric field at the surface of the conductive structure when in use is less than about 20% of its maximum value within the passage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A method of manufacturing a microdevice, comprising:
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a. forming a plurality of adhered layers of material, wherein the forming of each layer of material comprises, i. deposition of at least a first material; ii. deposition of at least a second material; and iii. planarization of the first and second materials to a common level; and b. removing of at least a portion of the first or second material after formation of the plurality of layers; wherein a structure resulting from the formation and the removal provides at least one structure that can function as one or more of an RF or microwave control, guidance, transmission, or reception component for a desired radiation, and comprises; a. at least one RF or microwave radiation entry port in a conductive structure; b. at least one RF or microwave radiation exit port in the conductive structure; c. at least one passage substantially bounded on the sides by the conductive structure through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port; d. central conductor extending along a length of the at least one passage from the entry port to the exit port; and wherein the conductive structure includes one or more apertures which extend from the passage to an outer region, wherein the apertures have cross-sectional dimensions that are no larger than the greater of 1/10 of a wavelength of the desired radiation or 200 microns and wherein the apertures are not intended to pass a significant amount of the desired radiation. - View Dependent Claims (29, 30)
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31. A method of manufacturing a circuit for supplying signals to a passive array of N antenna elements to produce a plurality of beams, comprising:
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a. depositing a plurality of layers of material to form (N/2)log2 N four port hybrid couplers from a plurality of adhered layers each comprising four microminiature coaxial elements, each coaxial element extending between a respective pair of ports of the hybrid coupler such that a pair of coaxial elements is coupled to each port; and b. connecting at least some of the hybrid couplers to other hybrid couplers via phase shifting components to form a Butler matrix. - View Dependent Claims (32)
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- 33. A Butler matrix for supplying signals to a passive array of N antenna elements to produce a plurality of beams, comprising (N/2)log2 N four port hybrid couplers wherein each of the four hybrid couples comprise four microminiature coaxial elements, a first of the four coaxial elements extending between two of four ports, and a second of the coaxial elements extending between the other two of the four ports, while the remaining two coaxial elements extend between the first and second coaxial elements, wherein at least a portion of the length of least one of the coaxial elements is arranged in a serpentine form.
Specification