Torsional rate sensor with momentum balance and mode decoupling
First Claim
1. A rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.
8 Assignments
0 Petitions
Accused Products
Abstract
Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis and the input axis. The masses are driven to oscillate about drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the messes about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.
-
Citations
31 Claims
- 1. A rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.
- 6. A rate sensor comprising two generally planar proof masses mounted side-by-side for anti-phase torsional movement about a pair of spaced apart drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means connecting adjacent inner edge portions of the two masses together for movement in concert about both the drive axes and the sense axes, a sensing frame constrained (or linear movement, and links connecting the masses to the sensing frame for transforming torsional motion of the masses about the sense axes to linear motion of the sensing frame.
- 14. A rate sensor comprising two generally planar proof masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate in phase opposition about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, a pair of sensing frames coupled to opposite sides of each of the masses for movement in opposite directions in response to the torsional movement of the masses about the sense axes, and electrode plates on the sensing frames which move in opposite directions relative to fixed plates on the opposite sides of the masses to form capacitors which change value in opposite directions in response to the torsional movement of the masses about the sense axes.
- 19. A rate sensor comprising a pair of spaced apart, parallel drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, a pair of generally planar proof masses pivotally mounted on inner frames for see-saw movement about the drive axes, with the inner frames being located entirely within the lateral confines of the masses and being mounted for rotational movement about the sense axes, sensing frames mounted on opposite sides of the masses for rotation about axes parallel to the sense axes, means for transferring rotational movement of the masses to the sensing frames, and electrode plates on the sensing frames which are interleaved with fixed plates to form capacitors which change in value in response to rotational movement of the masses about the sensing axes.
- 23. A rate sensor comprising a pair of spaced apart, parallel drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, a pair of generally planar proof masses pivotally mounted on sensing frames for see-saw movement about the drive axes, means mounting the sensing frames for rotational movement about the sense axes, means for transferring rotational movement of the masses to the sensing frames, and electrode plates on the sensing frames which are interleaved with fixed plates to form capacitors which change in value in response to rotational movement of the masses about the sensing axes, with both the sensing frames and the capacitors being located entirely within the lateral confines of the masses.
- 27. A rate sensor comprising a pair of generally planar proof masses pivotally mounted within generally circular gimbals for see-saw movement about a pair of spaced apart, parallel drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the gimbals and the masses for torsional movement about the sense axes, and electrode plates extending radially from the gimbals interleaved with fixed electrodes to form capacitors which change in value in accordance with torsional movement of the masses about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis.
-
31. A rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, and at least one sensing frame responsive to the torsional movement of the masses about the sense axes.
Specification